Metal gates for semiconductor devices and method thereof
US-2024429281-A1 · Dec 26, 2024 · US
US9558765B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9558765-B2 |
| Application number | US-201615162059-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 23, 2016 |
| Priority date | May 11, 2010 |
| Publication date | Jan 31, 2017 |
| Grant date | Jan 31, 2017 |
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A spin transfer oscillator (STO) with a seed/FGL/spacer/SIL/capping configuration is disclosed with a composite seed layer made of Ta and a metal layer having a fcc(111) or hcp(001) texture to enhance perpendicular magnetic anisotropy (PMA) in an overlying (A1/A2) Y FeCo laminated field generation layer (FGL). The spin injection layer (SIL) may be laminated with a (A1/A2) X FeCo configuration. The FeCo layer in the SIL is exchanged coupled with the (A1/A2) X laminate (x is 5 to 50) to improve robustness. The (A1/A2) Y laminate (y=5 to 30) in the FGL may be exchange coupled with a high Bs layer to enable easier oscillations. A1 may be one of Co, CoFe, or CoFeR where R is a metal, and A2 is one of Ni, NiCo, or NiFe. The STO is typically formed between a main pole and trailing shield in a write head.
Opening claim text (preview).
We claim: 1. A spin transfer oscillator (STO) structure in a spintronic device, comprising: (a) a composite seed layer comprising at least a lower Ta layer formed on a substrate and a metal (M1) layer having a fcc(111) or hcp(001) crystal structure contacting the lower Ta layer; (b) a field generation layer (FGL) that has an (A1/A2) Y /FeCo alloy configuration where A1 is one of Co, CoFe, or CoFeR wherein R is one of Ru, Rh, Pd, Ti, Zr, Hf, Ni, Cr, Mg, Mn, or Cu, and A2 is one of Ni, NiCo, and NiFe, and Y is a number of laminations, the (A1/A2) Y laminate has perpendicular magnetic anisotropy (PMA) and contacts a top surface of the composite seed layer and is one of (Co/NiFe) Y , (Co/NiCo) Y , (CoFe/NiFe) Y , (CoFe/NiCo) Y , (CoFeR/Ni) Y , (CoFeR/NiFe) Y , or (CoFeR/NiCo) Y where R is one of Ru, Rh, Pd, Ti, Zr, Hf, Ni, Cr, Mg, Mn, or Cu, and the FeCo alloy includes one or more of Al, Ge, Si, Ga, C, Se, and Sn and contacts a bottom surface of a non-magnetic spacer; (c) the non-magnetic spacer; (d) a laminated spin injection layer (SIL) with high perpendicular magnetic anisotropy (PMA) and with a (A1/A2) X /FeCo configuration contacting a top surface of the non-magnetic spacer wherein X is in a range from 5 to 50, and a thickness (t2) of each A2 magnetic layer is greater than a thickness (t1) of each A1 magnetic layer; and (e) a capping layer contacting the FeCo layer of the SIL. 2. The STO structure of claim 1 wherein the Fe content in the FeCo alloy in the FGL is less than 50 atomic %. 3. The STO structure of claim 1 where Y is from about 5 to 30. 4. The STO structure of claim 1 wherein the non-magnetic spacer is comprised of Cu to give a CPP-GMR configuration or is made of AlOx, MgO, TiOx, TiAlOx, MgZnOx, or ZnOx to give a CPP-TMR configuration. 5. The STO structure of claim 1 wherein the M1 layer is Ru, Cu, or NiCr. 6. The STO structure of claim 1 wherein the composite seed layer has a Ta/Ru/Cu configuration. 7. The STO structure of claim 5 wherein the composite seed layer is further comprised of a metal (M2) layer where M2 is Ti, Pd, W, Rh, Au, or Ag to give a Ta/M1/M2 composite seed layer configuration.
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