Transport system for an extreme ultraviolet light source

Patent metadata

Field	Value
Publication number	US-9557650-B2
Application number	US-201514740916-A
Country	US
Kind code	B2
Filing date	Jun 16, 2015
Priority date	Sep 9, 2013
Publication date	Jan 31, 2017
Grant date	Jan 31, 2017

Abstract

A system for an extreme ultraviolet (EUV) light source includes a radical transport system that includes one or more conduits, each of the one or more conduits comprising a sidewall, the sidewall comprising a linear portion and a second portion, the linear portion of the sidewall comprising a first end that defines a first opening, and the second portion of the sidewall comprising one or more openings from an interior of the conduit to an exterior of the conduit, where the second portion of at least one of the one or more conduits is positioned relative to a collector that is inside of a vacuum chamber of the EUV light source with a gap between the collector and the second portion; and a control system.

First claim

What is claimed is:

1. A system for an extreme ultraviolet (EUV) light source, the system comprising:
a radical transport system comprising:
one or more conduits, each of the one or more conduits comprising a sidewall, the sidewall comprising a linear portion and a second portion, the linear portion of the sidewall comprising a first end that defines a first opening, and the second portion of the sidewall comprising one or more openings from an interior of the conduit to an exterior of the conduit, wherein
the second portion of at least one of the one or more conduits is configured to be positioned relative to an outer perimeter of a reflective surface of a collector that is inside of a vacuum chamber of the EUV light source with a gap between the collector and the second portion;

a mount configured to hold the collector, the mount comprising a wall and a lip extending from the wall, the lip being angled toward the reflective surface of the collector, the gap being between the lip and the outer perimeter of the reflective surface, and
a control system comprising:
one or more electronic processors;
a non-transient computer-readable medium coupled to the one or more electronic processors, the computer-readable medium comprising instructions that, when executed, cause the one or more electronic processors to:
control a flow of a gas through an aperture of the collector,
control a flow of the gas through the gap between the second portion of the at least one of the one or more conduits and the collector, and
control a flow of free radicals through the one or more openings in the second portion of the one or more conduits.

2. The system of claim 1 , wherein a perimeter of the second portion of the sidewall has the same shape of at least a portion of the perimeter of the collector that is inside of a vacuum chamber of the EUV light source.

3. The system of claim 1 , wherein the flow of gas through the aperture has a first flow rate, the flow of gas through the gap has a second flow rate, and the flow of free radicals has a third flow rate.

4. The system of claim 3 , wherein:
the instructions to cause the one or more processors to control the flow of the gas through the aperture of the collector comprise instructions to cause the one or more processors to adjust the first flow rate,
the instructions to cause the one or more processors to control the flow of the gas through the gap comprise instructions to cause the one or more processors to adjust the second flow rate, and
the instructions to cause the one or more processors to control the flow of the free radicals comprise instructions to cause the one or more processors to adjust the third flow rate.

5. The system of claim 4 , wherein the instructions to cause the one or more processors to adjust the third flow rate comprise instructions to cause the one or more processors to lower a pressure at the one or more openings in the second portion of the conduit relative to the first opening at the first end of the linear portion of the conduit.

6. The system of claim 4 , wherein one or more of the first flow rate, the second flow rate, and the third flow rate are adjusted until the first flow rate is the same as the sum of the second flow rate and the third flow rate.

7. The system of claim 1 , further comprising a source of free radicals coupled to the conduit at the first opening.

8. The system of claim 7 , wherein the linear portion of the sidewall passes through a wall of the vacuum chamber.

9. The system of claim 1 , wherein the side wall of the second portion of the conduit is curved.

10. The system of claim 1 , wherein the side wall of the second portion of the conduit forms an arc of a circle.

11. The system of claim 1 , wherein
the perimeter of the collector is in a first plane and each second portion the second of the one or more conduits are in a second plane, different from the first plane, and
the second plane does not include any portion of the collector.

12. The system of claim 11 , wherein the first plane and the second plane are parallel to each other.

13. The system of claim 1 , wherein the free radicals comprise hydrogen radicals, and the gas comprises hydrogen gas.

14. The system of claim 1 , wherein the perimeter of the collector is a circle, and the one or more conduits comprise two conduits, the shape of the second portion of the sidewall of each of the two conduits being arc of the circle, and each of the second portions being positioned relative to a different portion of the perimeter of the collector.

15. The system of claim 1 , wherein the second portion of the sidewall of at least one of the conduits comprises more than one opening, each of the more than one opening having a different diameter.

16. The system of claim 15 , wherein the second portion of the sidewall of each of the conduits comprises more than one opening, each of the more than one openings having a different diameter.

17. The system of claim 15 , wherein the second portion of the sidewall of each of the conduits comprises more than one opening, each of the more than one opening being spaced from the nearest opening on the second portion of the sidewall by a spacing distance.

18. The system of claim 17 , wherein the spacing distance varies.

19. The system of claim 18 , wherein the spacing distance decreases as the distance from the linear portion increases.

20. The system of claim 1 , wherein the lip has the same shape as a perimeter of the collector,
the collector is placed in the mount with a space between the perimeter of the collector and the lip,
the gap between the perimeter of the collector and the second portion of the one or more conduits further comprises the space, and
at least some of the gas that flows through the gap between the second portion of the one or more conduits and the perimeter of the collector flows through the space.

21. A method of removing debris from an element inside of a vacuum chamber of an extreme ultraviolet (EUV) light source, the method comprising:
directing free radicals toward a surface of the element inside of a vacuum chamber of the EUV light source, the free radicals flowing from an outer perimeter region of the element at a first flow rate;
directing a gas toward the surface of the element inside of a vacuum chamber of an EUV light source, the gas flowing through a gap formed between a mount and the outer perimeter region of the element, a lip of the mount directing the gas from the outer perimeter region of the element toward the surface of the element at a second flow rate;
directing gas through an aperture in the center of the element at a third flow rate; and
adjusting one or more of the first flow rate and the second flow rate relative to the third flow rate.

22. The method of claim 21 , wherein adjusting the first flow rate and the second flow rate relative to the third flow rate comprises adjusting one or more of the first flow rate and the second flow rate until the sum of the first flow rate and the second flow rate are the same as the third flow rate.

23. The method of claim 21 , wherein adjusting the first flow rate and the second flow rate relative to the third flow rate comprises adjusting the first flow rate and the second flow rate until the sum of the first flow rate and the second flow rate are the same as the third flow rate.

24. The method of claim 21 , wherein the free radicals and the gas are directed toward the sur

Assignees

• Asml Netherlands Bv

Inventors

• De Dea Silvia
• Ershov Alexander I
• Verhoff Brandon
• Wilson Gregory
• La Fontaine Bruno M

Classifications

• G03F7/70925

  Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning · CPC title

• G03F7/2039 Primary

  X-ray radiation · CPC title

• H05G2/0086

  Optical arrangements for conveying the laser beam to the plasma generation location · CPC title

• H05G2/0027

  Arrangements for controlling the supply; Arrangements for measurements · CPC title

• G03F7/70175 Primary

  Lamphouse reflector arrangements or collector mirrors, i.e. collecting light from solid angle upstream of the light source · CPC title