Quantitative analyzing method of CIGS film using a laser induced breakdown spectroscopy

Patent metadata

Field	Value
Publication number	US-9557273-B2
Application number	US-201314143723-A
Country	US
Kind code	B2
Filing date	Dec 30, 2013
Priority date	May 8, 2013
Publication date	Jan 31, 2017
Grant date	Jan 31, 2017

Abstract

Disclosed herein is a quantitative analyzing method of a copper indium gallium selenide (CIGS) film, the method including: obtaining spectra by irradiating a laser on the plurality of CIGS films having different component compositions, selecting a first spectral line and a second spectral line among the spectra of target elements to be analyzed and obtaining a correlation plot between a measured intensity of the first spectral line and a measured intensity of the second spectral line, correcting the measured intensity of the first spectral line and the measured intensity of the second spectral line using results obtained by curve fitting the correlation plot, obtaining a linear calibration curve using the corrected intensity of the first spectral line and the corrected intensity of the second spectral line; and comparing the linear calibration curve with LIBS analysis of a target sample to be analyzed.

First claim

What is claimed is:

1. A quantitative analyzing method of a copper indium gallium selenide (CIGS) film, the method comprising:
obtaining spectra by irradiating a laser on the plurality of CIGS films having different component compositions,
selecting a first spectral line and a second spectral line among the spectral lines of target elements to be analyzed and obtaining a correlation plot between a measured intensity of the first spectral line and a measured intensity of the second spectral line,
correcting the measured intensity of the first spectral line and the measured intensity of the second spectral line using results obtained by curve fitting the correlation plot,
obtaining a linear calibration curve using the corrected intensity of the first spectral line and the corrected intensity of the second spectral line; and
comparing the linear calibration curve with LIBS analysis of a target sample to be analyzed.

2. The method of claim 1 , wherein an upper energy level of the first spectral line is the same as that of the second spectral line.

3. The method of claim 2 , wherein
a relationship between the measured intensity (j′ 1 ) and the corrected intensity (J 1 ) of the first spectral line is represented by the following Equation (1):

J
1
′

=

J
1

⁡

[

1
-

exp
⁡

(

-

J
1

⁢

C
1

)

J
1

⁢

C
1

]

β

(
1
)

a relationship between the measured intensity (J′ 2 ) and the corrected intensity (J 2 ) of the second spectral line is represented by the following Equation (2):

J
2
′

=

α
⁢

⁢

J
2

⁡

[

1
-

exp
⁡

(

-

J
2

⁢

C
2

)

J
2

⁢

C
2

]

β

(
2
)

a ratio between C 1 and C 2 is represented by the following Equation (3):

C
2

C
1

=

⁢

λ
2
5

λ
1
5

⁢

⁢

exp
⁡

(

hc

Assignees

• Gwangju Inst Science & Tech

Inventors

• Jeong Sungho
• In Jeong Hwan
• Kim Chan Kyu
• Lee Seokhee
• Lee Hakjae

Classifications

• Y02E10/543

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