Gas supplying apparatus

Patent metadata

Field	Value
Publication number	US-9556966-B2
Application number	US-201414231338-A
Country	US
Kind code	B2
Filing date	Mar 31, 2014
Priority date	Sep 30, 2011
Publication date	Jan 31, 2017
Grant date	Jan 31, 2017

Abstract

A gas supply line and gas supplying apparatus that facilitates maintenance and management of various types of devices. The supplying apparatus is formed with a supply line that is made up of a gas inlet-side block, a gas outlet-side block and a plurality of fluid control devices. The gas supplying apparatus is formed with at least two gas supply lines, the fluid control device of each gas supply line includes at least one flow controller, an inlet-side block of the flow controller on one gas supplying line is connected to an inlet-side block of the flow controller on the other gas supply line so as to oppose the inlet-side block, and an outlet-side block of one flow controller is connected to an outlet-side block of the other flow controller so as to oppose the gas outlet-side block.

First claim

What is claimed is:

1. A gas supplying apparatus, comprising:
at least first and second gas supply lines, having a common gas inlet side block and a common gas outlet side block;
a fluid control device provided for each of the first and second gas supply line, each fluid control device including at least one flow controller having an inlet-side block and an outlet side block;
wherein the inlet-side block of the flow controller for the first gas supply line and the inlet-side block of the flow controller for the second gas supply line are connected to the common gas inlet side block so as to oppose each other, interposing the common gas inlet side block there between; and
wherein the outlet-side block of the flow controller for the first gas supply line and the outlet-side block of the flow controller for the second gas supply line are connected to the common gas outlet side block so as to oppose each other, interposing the common gas outlet side block there between.

2. The gas supplying apparatus according to claim 1 further comprising:
a purge gas passage communicating between the first and second gas supply lines provided in the common gas inlet side block, and a process gas passage communicating between the first and second gas supply lines provided in the common gas outlet side block.

3. The gas supplying apparatus according to claim 1 , wherein each of the plurality of fluid control devices includes an inlet opening/closing valve, a three-way switching opening/closing valve, the at least one flow controller and an outlet opening/closing valve.

4. A gas supplying apparatus comprising a plurality of gas supply lines, including a first gas supply line and a second gas supply line in parallel, each gas supply line having a process gas distribution path comprising, an inlet opening/closing valve, a three-way switching opening/closing valve, a flow controller, an outlet opening/closing valve, and a purge gas distribution path comprising the three-way switching opening/closing valve, wherein a common gas inlet-side block and a common gas outlet-side block, each having a shape of a long/narrow rectangular column with height H′, are arrayed in a direction of depth L for the first gas supply line and the second gas supply line, wherein the inlet opening/closing valve, the three-way switching opening/closing valve, and an inlet block of the flow controller for the first gas supply line are fixed on one side surface of the common gas inlet-side block, and an outlet block of the flow controller and the outlet opening/closing valve for the first gas supply line are fixed on one side surface of the common gas outlet-side block, wherein the second gas supply line is formed so as to oppose the first gas supply line on an other side surface of the common gas inlet-side block and that of the gas outlet-side block, and wherein the inlet opening/closing valve, the three-way switching opening/closing valve and an inlet block of the flow controller for the second gas supply line are fixed on the other side surface of the common gas inlet-side block, and an outlet block of the flow controller and the outlet opening/closing valve for the second gas supply line are fixed on the other side surface of the common gas outlet-side block.

5. The gas supplying apparatus according to claim 4 , wherein a plurality of a pair of the first and second gas supply lines, opposing to each other, are disposed in parallel in a direction of height H of the common gas inlet-side block and that of the common gas outlet-side block.

6. The gas supplying apparatus according to claim 4 ,
wherein the common gas inlet-side block is formed with a purge gas passage extending in a direction of height H,
wherein, on both sides of the gas inlet-side block, a first gas passage is formed communicating between a process gas inlet joint and the inlet opening/closing valve, a second gas passage is formed communicating between the inlet opening/closing valve and the three-way switching opening/closing valve, a third gas passage is formed communicating between the three-way switching opening/closing valve and the inlet block of the flow controller, and a fourth gas passage is formed communicating between the purge gas passage and the three-way switching opening/closing valve so as to oppose each other.

7. The gas supplying apparatus according to claim 4 ,
wherein a process gas passage is formed which extends in a direction of height H of the common gas outlet-side block, and
wherein, on each of the one and the other sides of the common gas outlet-side block, a first gas passage is formed communicating between the outlet block of the flow controller and the outlet opening/closing valve, and a second gas passage is formed communicating between the outlet opening/closing valve and the process gas passage so as to oppose each other.

8. The gas supplying apparatus according to claim 4 , wherein the flow controller is a pressure type flow controller having a piezoelectric element driving control valve.

9. The gas supplying apparatus according to claim 4 , wherein valve chamber recessed parts for the inlet opening/closing valve, the three-way switching opening/closing valve and the outlet opening/closing valve are formed at the gas inlet-side block and the gas outlet-side block.

10. The gas supplying apparatus according to claim 4 ,
wherein the flow controller comprises a rectangular main body block between the inlet block and the outlet block, wherein the main body block of the flow controller includes a valve chamber recessed part of a piezoelectric element driving control valve provided on a first side surface of the main block body, a pressure detector attachment recessed part provided on the a second side surface of the main body block body, a first gas passage communicating between the valve chamber recessed part and the pressure detector attachment recessed part, a second gas passage communicating between the valve chamber recessed part and the inlet block, a third gas passage communicating between the pressure detector attachment recessed part and the outlet block, and an orifice provided on the third gas passage communicating between the pressure detector attachment recessed part and the outlet block.

11. The gas supplying apparatus according to claim 4 ,
wherein the flow controller has a main body block equipped with the inlet block and the outlet block,
wherein the main body block of each flow controller is structured so that two valve chamber recessed parts of two piezoelectric element driving control valves are provided in parallel on a front surface side of the main block body,
wherein two pressure detector attachment recessed parts are provided in parallel at a back surface side of the main block body, and
wherein first gas passages are provided communicating between each of the valve chamber recessed parts and each of the pressure detector attachment recessed parts,
wherein second gas passages are provided communicating between each of the valve chamber recessed parts and the inlet block,
wherein third gas passages are provided communicating between each of the pressure detector attachment recessed parts and the outlet block, and
wherein orifices are provided on each of the third gas passages communicating between the pressure detector attachment recessed part and the outlet block.

12. The gas supplying apparatus according to claim 11 ,
wherein the outlet block of the flow controller has gas passages for communicating the third gas passages of the main body block with gas passages of the common gas outlet-side block.

13. The gas supplying apparatus according to claim 12 ,
wherein the outlet blo

Assignees

• Fujikin Kk

Inventors

• Hirose Takashi
• Yamaji Michio

Classifications

• F16K27/003 Primary

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• Y10T137/86493

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