Wafer processing apparatus and wafer processing method
US-2024395512-A1 · Nov 28, 2024 · US
US9556510B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9556510-B2 |
| Application number | US-201615076236-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 21, 2016 |
| Priority date | Dec 20, 2012 |
| Publication date | Jan 31, 2017 |
| Grant date | Jan 31, 2017 |
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A method of achieving precision registration in a roll to roll process by simultaneously depositing multiple inks onto a printing roll. One of these inks prints a pattern of fiducial marks onto a substrate while another ink prints a predetermined pattern on the same substrate such that the predetermined pattern bears a predictable spatial relationship to the pattern of fiducial marks. Consequently, even if the ink forming the predetermined pattern is invisible, or has such low contrast with the substrate that it is effectively invisible, or even has been dissolved away in a subsequent processing step, it is still possible to know where the predetermined pattern is by referring to the pattern of fiducial marks.
Opening claim text (preview).
The invention claimed is: 1. A method of providing a substrate having a predetermined pattern thereon comprising: providing a printing roll, a first ink dispenser, and a second ink dispenser, the first ink dispenser and the second ink dispenser positioned to dispense a first and a second ink onto the printing roll in separate first and second zones respectively; dispensing a low contrast ink into the first zone and a visible ink into the second zone; advancing the substrate against the printing roll to print fiducial marks onto the substrate with the visible ink, while simultaneously printing a first predetermined pattern onto the substrate with the low-contrast ink; subsequently placing a secondary pattern in registration with the first predetermined pattern on the substrate using the fiducial marks as a guide. 2. The method according to claim 1 wherein the printing roll is a roll selected from the group consisting of flexographic, gravure, dual offset and anilox rolls, at least in the first zone. 3. The method according to claim 1 wherein the predetermined pattern includes features having a dimension less than 20 microns in size. 4. The method according to claim 1 wherein the fiducial marks and the first predetermined pattern are in registration with a dimensional accuracy of less than 20 microns.
Sputtering · CPC title
Sequential or multiple printing, e.g. on previously printed background; Mirror printing; Recto-verso printing; using a combination of different printing techniques; Printing of patterns visible in reflection and by transparency; by superposing printed artifacts · CPC title
Devices for scanning register marks · CPC title
Inking devices for reversible printing presses · CPC title
by other printing techniques, e.g. letterpress printing, intaglio printing, lithographic printing, offset printing · CPC title
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