Metal gates for semiconductor devices and method thereof
US-2024429281-A1 · Dec 26, 2024 · US
US9556085B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9556085-B2 |
| Application number | US-201214113457-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 27, 2012 |
| Priority date | Apr 28, 2011 |
| Publication date | Jan 31, 2017 |
| Grant date | Jan 31, 2017 |
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Provided are graphene nanoribbons (GNRs), methods of making GNRs, and uses of the GNRs. The methods can provide control over GNR parameters such as, for example, length, width, and edge composition (e.g., edge functional groups). The methods are based on a metal catalyzed cycloaddition reaction at the carbon-carbon triple bonds of a poly(phenylene ethynylene) polymer. The GNRs can be used in devices such a microelectronic devices.
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What is claimed is: 1. A method for making a graphene nanoribbon comprising the steps of: a) contacting a poly(phenylene ethynylene) (PPE) polymer, an annulating compound, and a catalyst system comprising a metal catalyst and a protic acid, such that the PPE polymer is arylannulated; b) oxidizing the arylannulated polymer product from a), such that a graphene nanoribbon is formed. 2. The method of claim 1 , wherein the PPE polymer has the following structure: wherein Ar is an aryl group having from 6 carbons to 24 carbons, R 1 and R 2 are, at each occurrence in the PPE polymer, independently selected from the group consisting of H, alkyl, aryl, ether, thioether, ester, carboxylic acid, amide, halide, and azide groups, and n is from 10 to 500. 3. The method of claim 1 , wherein the annulating compound comprises an aryl ethynylene group, and an en-al group or an aryl aldehyde group. 4. The method of claim 1 , wherein the metal catalyst is a copper(II) salt or a zinc(II) salt. 5. The method of claim 4 , wherein the copper(II) salt is selected from the group consisting of Cu(OTf) 2 , Cu(acetate) 2 , Cu(trifluoroacetate) 2 , Cu(halide) 2 , Cu(sulfate) 2 , and Cu(II) oxide. 6. The method of claim 4 , wherein the zinc (II) salt is selected from the group consisting of Zn(OTf) 2 , Zn(acetate) 2 , Zn(trifluoroacetate) 2 , Zn(halide) 2 , Zn(sulfate) 2 , and Zn oxide. 7. The method of claim 1 , wherein the oxidizing step is carried out in solution and the concentration of arylannulated polymer is present at a concentration of 50 mM or less. 8. The method of claim 1 , wherein the PPE polymer has the following structure: wherein Ar is an aryl group having from 6 carbons to 24 carbons, R 1 and R 2 is independently selected from the group consisting of H, alkyl, aryl, ether, thioether, ester, carboxylic acid, amide, halide, and azide groups, and n is from 10 to 500. 9. The method of claim 1 , wherein the PPE polymer has the following structure: wherein R 1 and R 2 are, at each occurrence in the PPE polymer, independently selected from the group consisting of H, alkyl, aryl, ether, thioether, ester, carboxylic acid, amide, halide, and azide groups, and n is from 10 to 500. 10. The method of claim 1 , wherein the PPE polymer has the following structure: wherein R 1 and R 2 are, at each occurrence in the PPE polymer, independently selected from the group consisting of H, alkyl, aryl, ether, thioether, ester, carboxylic acid, amide, halide, and azide groups, and n is from 10 to 500. 11. The method of claim 1 , wherein the metal catalyst is a copper(II) salt. 12. The method of claim 1 , wherein the metal catalyst is a zinc(II) salt. 13. A graphene nanoribbon (GNR) having the following structure: R 1 , R 2 , R 3 , and R 4 are, at each occurrence in the GNR, independently selected from the group consisting of H, alkyl, aryl, ether, thioether, ester, carboxylic acid, amide, halide, and azide groups, n is from 10 to 500, and s+t is from 10 to 500, wherein R 1 , R 2 , R 3 , and R 4 are not each H. 14. The GNR of claim 13 , wherein the GNR has a length of 10 to 500 nm. 15. The GNR of claim 13 , wherein the GNR has a width of 1.0 to 1.2 nm, wherein the width does not include R 1 , R 2 , R 3 , and R 4 . 16. A device comprising a graphene nanoribbon of claim 13 . 17. The device of claim 16 , where the device is selected from a transistor, a solar cell, and a light emitting diode. 18. The graphene nanoribbon (GNR) of claim 13 , wherein the GNR has the following structure: 19. The graphene nanoribbon (GNR) of claim 13 , wherein the GNR has the following structure: 20. The graphene nanoribbon (GNR) of claim 13 , wherein the GNR has the following structure: 21. The graphene nanoribbon (GNR) of claim 13 , wherein the GNR has the following structure: 22. The graphene nanoribbon (GNR) of claim 13 , wherein the GNR has the following structure:
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