Method of processing a silicon substrate and method of manufacturing a substrate for a liquid ejection head

Patent metadata

Field	Value
Publication number	US-9555632-B2
Application number	US-201615160350-A
Country	US
Kind code	B2
Filing date	May 20, 2016
Priority date	Jun 26, 2015
Publication date	Jan 31, 2017
Grant date	Jan 31, 2017

Abstract

Performed are a non-through hole forming step of partitioning a supply path forming region of a second surface into a first region corresponding to a forming position of a beam, a second region located adjacent to the first region on both sides thereof, and a third region that is none of the first region and the second region, and forming a plurality of non-through holes in the second region and the third region, and an etching step of subjecting a silicon substrate to anisotropic etching from the second surface, to thereby form the supply path and the beam in the supply path. In the non-through hole forming step, at least one of an interval or a depth of the non-through holes is caused to differ in the second region and the third region, to thereby control the shape and dimension of the beam to be formed in the etching step.

First claim

What is claimed is:

1. A method of processing a silicon substrate, comprising forming a supply path in a silicon substrate having a first surface and a second surface on an opposite side of the first surface, the supply path penetrating the silicon substrate and including a beam configured to connect opposed sides of the supply path to each other,
the method further comprising:
a non-through hole forming step of partitioning, for each beam, a region of the second surface in which the supply path is to be formed, into a first region that corresponds to a forming position of the beam, a second region that is adjacent to the first region on both sides of the first region, and a third region that is none of the first region and the second region, and forming a plurality of non-through holes, which are prevented from penetrating the silicon substrate, in the second region and the third region with a predetermined depth from the second surface; and
an etching step of subjecting the silicon substrate having the plurality of non-through holes formed therein, to anisotropic etching from the second surface, to thereby form the supply path and the beam in the supply path,
the non-through hole forming step comprising causing at least one of an interval or a depth of each of the plurality of non-through holes to differ in the second region and the third region.

2. The method of processing a silicon substrate according to claim 1 , wherein the beam is formed so that a position of an apex closest to the first surface in a sectional shape of the beam is retracted toward the second surface from a surface position of the first surface.

3. The method of processing a silicon substrate according to claim 1 , wherein the non-through hole forming step comprises causing the interval of the plurality of non-through holes in the second region to be smaller than the interval of the plurality of non-through holes in the third region.

4. The method of processing a silicon substrate according to claim 1 , wherein the non-through hole forming step comprises causing the depth of the plurality of non-through holes in the second region to be larger than the depth of the plurality of non-through holes in the third region.

5. The method of processing a silicon substrate according to claim 1 , wherein the etching step comprises removing a sacrificial layer formed on the silicon substrate in a region of the first surface corresponding to a position at which the supply path is to be formed.

6. The method of processing a silicon substrate according to claim 1 , wherein the silicon substrate has an oxide film formed on the second surface except the region in which the supply path is to be formed, and the oxide film is used as an etching mask in the etching step.

7. The method of processing a silicon substrate according to claim 1 , wherein the silicon substrate has an oxide film formed on the second surface except the second region and the third region, and the oxide film is used as an etching mask in the etching step.

8. The method of processing a silicon substrate according to claim 1 , wherein at least two beams are formed in the supply path, and at least one of the beams is different in at least one of a dimension or a shape from another beam in the supply path.

9. A method of manufacturing a substrate for a liquid ejection head, comprising forming a supply path in a silicon substrate having a first surface and a second surface on an opposite side of the first surface and having a plurality of energy generating elements formed on the first surface, the supply path penetrating the silicon substrate and including a beam configured to connect opposed sides of the supply path to each other,
the method further comprising:
a non-through hole forming step of partitioning, for each beam, a region of the second surface in which the supply path is to be formed, into a first region that corresponds to a forming position of the beam, a second region that is adjacent to the first region on both sides of the first region, and a third region that is none of the first region and the second region, and forming a plurality of non-through holes, which are prevented from penetrating the silicon substrate, in the second region and the third region with a predetermined depth from the second surface; and
an etching step of subjecting the silicon substrate having the plurality of non-through holes formed therein, to anisotropic etching from the second surface, to thereby form the supply path and the beam in the supply path,
the non-through hole forming step comprising causing at least one of an interval or a depth of each of the plurality of non-through holes to differ in the second region and the third region.

10. The method of manufacturing a substrate for a liquid ejection head according to claim 9 , wherein the beam is formed so that a position of an apex closest to the first surface in a sectional shape of the beam is retracted toward the second surface from a surface position of the first surface.

11. The method of manufacturing a substrate for a liquid ejection head according to claim 9 , wherein the non-through hole forming step comprises causing the interval of the plurality of non-through holes in the second region to be smaller than the interval of the plurality of non-through holes in the third region.

12. The method of manufacturing a substrate for a liquid ejection head according to claim 9 , wherein the non-through hole forming step comprises causing the depth of the plurality of non-through holes in the second region to be larger than the depth of the plurality of non-through holes in the third region.

13. The method of manufacturing a substrate for a liquid ejection head according to claim 9 , wherein the etching step comprises removing a sacrificial layer formed on the silicon substrate in a region of the first surface corresponding to a position at which the supply path is to be formed.

14. The method of manufacturing a substrate for a liquid ejection head according to claim 9 , wherein the silicon substrate has an oxide film formed on the second surface except the region in which the supply path is to be formed, and the oxide film is used as an etching mask in the etching step.

15. The method of manufacturing a substrate for a liquid ejection head according to claim 9 , wherein the silicon substrate has an oxide film formed on the second surface except the second region and the third region, and the oxide film is used as an etching mask in the etching step.

16. The method of manufacturing a substrate for a liquid ejection head according to claim 9 , wherein at least two beams are formed in the supply path, and at least one of the beams is different in at least one of a dimension or a shape from another beam in the supply path.

Assignees

• Canon Kk

Inventors

• Watanabe Makoto
• Tagawa Yoshinori
• Murayama Hiroyuki
• Oya Shuhei
• MANABE Takanobu

Classifications

• H10P90/126 Primary

  by chemical etching · CPC title

• B41J2/162 Primary

  Manufacturing of the nozzle plates · CPC title

• H01L21/02019

  Electricity · mapped topic

• B41J2/1626 Primary

  etching · CPC title

• H01L21/30608

  Electricity · mapped topic