Photoacoustic gas sensor with a helmholtz cell

Patent metadata

Field	Value
Publication number	US-9551829-B2
Application number	US-201213450551-A
Country	US
Kind code	B2
Filing date	Apr 19, 2012
Priority date	Apr 21, 2011
Publication date	Jan 24, 2017
Grant date	Jan 24, 2017

Abstract

A photoacoustic detection device including a nanophotonic circuit including a first chip on which is formed at least one optical waveguide and in which is formed a set of cavities defining a Helmholtz resonator; at least one optical source capable of emitting an optical signal in a given wavelength range, capable of being modulated at an acoustic modulation frequency, this source being attached to the first chip; a second chip forming a cap for said cavities and including acoustic sensors; and electronic circuits for processing the output of the acoustic sensors formed in the first or the second chip.

First claim

What is claimed is:

1. A photoacoustic detection device comprising a nanophotonic circuit comprising:
a first chip on which is formed at least one optical waveguide and in which is formed a set of cavities defining a Helmholtz resonator, each of the cavities having an opening;
at least one optical source configured to emit an optical signal in a given wavelength range, and configured to be modulated at an acoustic modulation frequency, this source being attached to the first chip;
a second chip forming a cap, which closes the openings of said cavities and comprising acoustic sensors;
electronic circuits for processing the output of the acoustic sensors formed in the first or the second chip; and
a set of waveguides on the first chip, each waveguide being associated with an optical source linked to the first chip.

2. The device of claim 1 , wherein said at least one optical source is formed in a third chip placed on a recessed portion of the first chip.

3. The device of claim 1 , wherein said at least one optical source comprises at least one QCL-type laser.

4. The device of claim 1 , wherein the end of the at least one waveguide on the side of said at least one optical source is arranged as an optical coupler.

Assignees

• Brun Mickaël
• Nicoletti Sergio
• Parvitte Bertrand
• Zeninari Virginie
• Commissariat Energie Atomique
• Univ Reims Champagne Ardenne

Inventors

• Brun Mickaël
• Nicoletti Sergio
• Parvitte Bertrand
• Zeninari Virginie

Classifications

• G01N2021/1704

  in gases · CPC title

• G01N2291/021

  Gases · CPC title

• Y10T29/49007

  Indicating transducer · CPC title

• G01N2201/0221

  Portable; cableless; compact; hand-held · CPC title

• G01N2021/399

  Diode laser · CPC title