Porosity control in piezoelectric films

Patent metadata

Field	Value
Publication number	US-9548439-B2
Application number	US-201114240168-A
Country	US
Kind code	B2
Filing date	Aug 24, 2011
Priority date	Aug 24, 2011
Publication date	Jan 17, 2017
Grant date	Jan 17, 2017

Abstract

A piezoelectric film having a porosity between 20 and 40%, a thickness ranging from tens of microns to less than a few millimeters can be used to form an ultrasonic transducer UT for operation in elevated temperature ranges, that emit pulses having a high bandwidth. Such piezoelectric films exhibit greater flexibility allowing for conformation of the UT to a surface, and obviate the need for couplings or backings. Furthermore, a method of fabricating an UT having these advantages as well as better bonding between the piezoelectric film and electrodes involves controlling porosity within the piezoelectric film.

First claim

The invention claimed is:

1. An ultrasonic transducer (UT) comprising a piezoelectric film sandwiched between two electrodes, wherein the film:
is 2 microns to 2 mm thick;
has a controlled porosity of 15-40% with micron-scale or sub-micron scale pores; and
comprises piezoelectric powders having micron or submicron sizes mixed with a residue of a binder, wherein the binder residue comprises residue of a liquid or gel oxidizing agent that forms an intermediate oxidation layer on at least one of the electrodes, said at least one electrode formed of an electrically conductive material so that the UT is endowed with an ultrasonic bandwidth of at least 30%.

2. The UT of claim 1 wherein the binder residue is:
a residue deposited after thermal treatment that is piezoelectric; or
a residue deposited after thermal treatment that is chemically and thermally stable at a desired operating temperature of the UT, and having a high dielectric constant.

3. The UT of claim 1 wherein the binder residue is:
a residue deposited after thermal treatment that is piezoelectric; and
a residue deposited after thermal treatment that is chemically and thermally stable at a desired operating temperature of the UT, and having a high dielectric constant.

4. The UT of claim 1 wherein the film consists of the powders and the binder residue.

5. The UT of claim 1 wherein the −6 dB bandwidth of the UT is greater than 30%.

6. A combination comprising:
a part of an apparatus, the part having a first surface and a second surface opposite the first surface; and
a high-temperature ultrasonic transducer (UT) comprising a piezoelectric film sandwiched between two electrodes, and control circuitry for the film, wherein the film:
is 2 microns to 2 mm thick;
has a controlled porosity of 15-40% with micron-scale or sub-micron scale pores; and
comprises piezoelectric powders having micron or submicron sizes mixed with a residue of a binder, wherein the binder residue comprises residue of a liquid or gel oxidizing agent that forms an intermediate oxidation layer on at least one of the electrodes, said at least one of the electrodes being formed of an electrically conductive material; and

wherein one of the electrodes is directly coupled to the first surface for emitting or detecting ultrasonic waves in the part at the second surface, opposite the film, without an impedance matching layer, and the UT does not include a backing.

7. The high-temperature UT of claim 6 wherein the binder residue is:
a residue deposited after thermal treatment that is piezoelectric; or
a residue deposited after thermal treatment that is chemically and thermally stable at a desired operating temperature of the UT, and having a high dielectric constant, preferably higher than that of the powders.

8. The high-temperature UT of claim 6 wherein the binder residue is:
a residue deposited after thermal treatment that is piezoelectric; and
a residue deposited after thermal treatment that is chemically and thermally stable at a desired operating temperature of the UT, and having a high dielectric constant, preferably higher than that of the powders.

9. The high-temperature UT of claim 6 wherein the film consists of the powders and the binder residue.

10. The high-temperature UT of claim 6 wherein the −6 dB bandwidth of the UT is greater than 30%.

Assignees

• Kobayashi Makiko
• Jen Cheng-Kuei
• Nat Res Council Canada

Inventors

• Kobayashi Makiko
• Jen Cheng-Kuei

Classifications

• B06B1/06 Primary

  operating with piezoelectric effect or with electrostriction (piezoelectric or electrostrictive devices per se H10N30/00) · CPC title

• Y10T29/42

  Piezoelectric device making · CPC title

• H01L41/0477 Primary

  Electricity · mapped topic

• G01N29/34

  Generating the ultrasonic, sonic or infrasonic waves {, e.g. electronic circuits specially adapted therefor} · CPC title

• H01L41/318

  Electricity · mapped topic