Minimizing grazing incidence reflections for reliable EUV power measurements having a light source comprising plural tubes with centerlines disposed between a radiation region and corresponding photodetector modules

Patent metadata

Field	Value
Publication number	US-9546901-B2
Application number	US-201414463605-A
Country	US
Kind code	B2
Filing date	Aug 19, 2014
Priority date	Aug 19, 2014
Publication date	Jan 17, 2017
Grant date	Jan 17, 2017

Abstract

A light source includes a light generating chamber and a collector disposed in the light generating chamber. A target material generator configured to propel a quantity of target material toward an irradiation region is disposed in front of a reflective surface of the collector. A plurality of photodetector modules is disposed external to the light generating chamber, with each of the photodetector modules being directed toward the irradiation region. A plurality of tubes is disposed between a corresponding photodetector module and the irradiation region. Each tube has a centerline directed toward the irradiation region, and each tube has a roughened inner surface. The surface roughness of the roughened inner surface is sufficient to cause grazing incidences of light to be eliminated rather than to be reflected off the roughened inner surface. A method of generating light and a method of measuring light energy also are described.

First claim

What is claimed is:

1. A light source, comprising:
a light generating chamber;
a collector having a reflective surface disposed in the light generating chamber;
a target material generator configured to propel a quantity of target material toward an irradiation region disposed in front of the reflective surface of the collector;
a plurality of photodetector modules disposed external to the light generating chamber, each of the plurality of photodetector modules being directed toward the irradiation region; and
a plurality of tubes each having a centerline directed toward the irradiation region, each of the tubes being disposed between a corresponding photodetector module and the irradiation region, and each of the plurality of tubes has a roughened inner surface.

2. The light source of claim 1 , wherein the light generating chamber is configured to generate extreme ultraviolet (EUV) light.

3. The light source of claim 1 , wherein the roughened inner surface of each of the plurality of tubes has a surface roughness sufficient to cause grazing incidences of light to be eliminated rather than to be reflected off the roughened inner surface.

4. The light source of claim 1 , wherein the inner surface of each of the plurality of tubes is roughened by bead blasting the inner surface of each of the plurality of tubes, and threading the bead-blasted inner surface of each of the plurality of tubes.

5. The light source of claim 1 , wherein the roughened inner surface of each of the plurality of tubes has a surface roughness in a range from about 20 microns to about 1 millimeter.

6. The light source of claim 1 , wherein the roughened inner surface of each of the plurality of tubes has a surface roughness in a range from about 100 microns to about 0.5 millimeter.

7. The light source of claim 1 , wherein the roughened inner surface of each of the plurality of tubes has a surface roughness in a range from about 200 microns to about 0.1 millimeter.

8. The light source of claim 1 , wherein the inner surface of each of the plurality of tubes is roughened by bead blasting the inner surface of each of the plurality of tubes, and threading the bead-blasted inner surface of each of the plurality of tubes, and wherein the roughened inner surface of each of the plurality of tubes has a surface roughness in a range from about 20 microns to about 1 millimeter.

9. The light source of claim 1 , wherein the inner surface of each of the plurality of tubes is roughened by bead blasting the inner surface of each of the plurality of tubes, and threading the bead-blasted inner surface of each of the plurality of tubes, and wherein the roughened inner surface of each of the plurality of tubes has a surface roughness in a range from about 100 microns to about 0.5 millimeter.

10. The light source of claim 1 , wherein the inner surface of each of the plurality of tubes is roughened by bead blasting the inner surface of each of the plurality of tubes, and threading the bead-blasted inner surface of each of the plurality of tubes, and wherein the roughened inner surface of each of the plurality of tubes has a surface roughness in a range from about 20 microns to about 0.1 millimeter.

11. A light source, comprising:
a light generating chamber configured to generate extreme ultraviolet (EUV) light;
a collector having a reflective surface disposed in the light generating chamber;
a target material generator configured to propel a quantity of target material toward an irradiation region disposed in front of the reflective surface of the collector;
a plurality of photodetector modules disposed external to the light generating chamber, each of the plurality of photodetector modules being directed toward the irradiation region; and
a plurality of tubes each having a centerline directed toward the irradiation region, each of the tubes being disposed between a corresponding photodetector module and the irradiation region, each of the plurality of tubes has a roughened inner surface, and the roughened inner surface of each of the plurality of tubes has a surface roughness in a range from about 20 microns to about 1 millimeter.

12. The light source of claim 11 , wherein the roughened inner surface of each of the plurality of tubes has a surface roughness in a range from about 100 microns to about 0.5 millimeter.

13. The light source of claim 11 , wherein the roughened inner surface of each of the plurality of tubes has a surface roughness in a range from about 200 microns to about 0.1 millimeter.

14. The light source of claim 11 , wherein the inner surface of each of the plurality of tubes is roughened by bead blasting the inner surface of each of the plurality of tubes, and threading the bead-blasted inner surface of each of the plurality of tubes.

15. The light source of claim 12 , wherein the inner surface of each of the plurality of tubes is roughened by bead blasting the inner surface of each of the plurality of tubes, and threading the bead-blasted inner surface of each of the plurality of tubes.

16. The light source of claim 13 , wherein the inner surface of each of the plurality of tubes is roughened by bead blasting the inner surface of each of the plurality of tubes, and threading the bead-blasted inner surface of each of the plurality of tubes.

17. A light source, comprising:
a light generating chamber configured to generate extreme ultraviolet (EUV) light;
a collector having a reflective surface disposed in the light generating chamber;
a target material generator configured to propel a quantity of target material toward an irradiation region disposed in front of the reflective surface of the collector;
a plurality of photodetector modules disposed external to the light generating chamber, each of the plurality of photodetector modules being directed toward the irradiation region; and
a plurality of tubes each having a centerline directed toward the irradiation region, each of the tubes being disposed between a corresponding photodetector module and the irradiation region, each of the plurality of tubes has a roughened inner surface, and the inner surface of each of the plurality of tubes being roughened by bead blasting the inner surface of each of the plurality of tubes, and threading the bead-blasted inner surface of each of the plurality of tubes.

18. The light source of claim 17 , wherein the roughened inner surface of each of the plurality of tubes has a surface roughness sufficient to cause grazing incidences of light to be eliminated rather than to be reflected off the roughened inner surface.

19. The light source of claim 17 , wherein the roughened inner surface of each of the plurality of tubes has a surface roughness in a range from about 20 microns to about 1 millimeter.

20. The light source of claim 17 , wherein the roughened inner surface of each of the plurality of tubes has a surface roughness in a range from about 100 microns to about 0.5 millimeter.

21. The light source of claim 17 , wherein the roughened inner surface of each of the plurality of tubes has a surface roughness in a range from about 200 microns to about 0.1 millimeter.

Assignees

• Asml Netherlands Bv

Inventors

• Senekerimyan Vahan A
• Purvis Michael A
• Ding Jie L

Classifications

• G01J1/429

  applied to measurement of ultraviolet light (using counting tubes G01T) · CPC title

• G01J1/42 Primary

  using electric radiation detectors (optical or mechanical part G01J1/04; by comparison with a reference light or electric value G01J1/10) · CPC title

• G03F7/70033 Primary

  by plasma extreme ultraviolet [EUV] sources · CPC title

• G01J1/0214

  Constructional arrangements for removing stray light · CPC title

• G01J1/4257

  applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam (monitoring arrangements for lasers in general H01S3/0014) · CPC title