Gas sensor
US-2015020577-A1 · Jan 22, 2015 · US
US9546887B1 · US · B1
| Field | Value |
|---|---|
| Publication number | US-9546887-B1 |
| Application number | US-201414573990-A |
| Country | US |
| Kind code | B1 |
| Filing date | Dec 17, 2014 |
| Priority date | Dec 19, 2013 |
| Publication date | Jan 17, 2017 |
| Grant date | Jan 17, 2017 |
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A sensor device including a sensor substrate; and a thin film comprising a porous metal organic framework (MOF) on the substrate that presents more than one transduction mechanism when exposed to an analyte. A method including exposing a porous metal organic framework (MOF) on a substrate to an analyte; and identifying more than one transduction mechanism in response to the exposure to the analyte.
Opening claim text (preview).
What is claimed is: 1. A sensor device comprising: a sensor substrate; and a thin film comprising a porous organic metal framework (MOF) on the sensor substrate that is configured to present more than one transduction mechanism when exposed to an analyte, which thereby enables multi-axis sensing. 2. The sensor device of claim 1 , wherein the more than one transduction mechanism comprises more than one of electrical conductivity, strain, acoustic modification, optical absorption or optical emission. 3. The sensor device of claim 1 , wherein the device comprises a surface acoustic wave sensor device and the sensor substrate is a piezoelectric substrate. 4. The sensor device of claim 3 , wherein a first of the more than one transduction mechanism is an acoustic modification and a second of the more than one transduction mechanism is optical absorption. 5. The sensor device of claim 1 , wherein the sensor substrate is a cantilever beam. 6. The sensor device of claim 5 , wherein one of the more than one transduction mechanism is strain on a material of the cantilever beam. 7. The sensor device of claim 6 , wherein one of the more than one transduction mechanism is optical absorption. 8. The sensor device of claim 1 , wherein one of the more than one transduction mechanism is a change in an electrical property. 9. The sensor device of claim 1 , wherein the MOF is modified with a guest species. 10. A method comprising: exposing a porous metal organic framework (MOF) on a substrate to an analyte; and identifying more than one transduction mechanism in response to the exposure to the analyte, thereby enabling multi-axis sensing. 11. The method of claim 10 , wherein the more than one transduction mechanism comprises more than one of electrical conductivity, strain, acoustic modification, optical absorption or optical emission. 12. The method of claim 10 , wherein the substrate is a piezoelectric substrate of a surface acoustic wave sensor. 13. The method of claim 12 , wherein a first of the more than one transduction mechanism is an acoustic modification and a second of the more than one transduction mechanism is optical absorption. 14. The method of claim 10 , wherein the substrate is a cantilever beam. 15. The method of claim 14 , wherein one of the more than one transduction mechanism is strain on a material of the cantilever beam. 16. The method of claim 10 , wherein one of the more than one transduction mechanism is optical absorption. 17. The method of claim 10 , wherein one of the more than one transduction mechanism is a change in an electrical property. 18. The method of claim 10 , wherein the MOF is modified with a guest species.
Metal organic frameworks (MOF's) · CPC title
Concentration of a compound, e.g. measured by a surface mass change · CPC title
Composition of the body, e.g. the composition of its sensitive layer · CPC title
concerning the detector · CPC title
Coordination polymers, e.g. metal-organic frameworks [MOF], zeolitic imidazolate frameworks [ZIF] (preparation of metal complexes containing carboxylic acid moieties C07C51/418; MOF's per se C07F) · CPC title
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