Spatially chirped pulses for femtosecond laser ablation through transparent materials

Patent metadata

Field	Value
Publication number	US-9545689-B2
Application number	US-201313998805-A
Country	US
Kind code	B2
Filing date	Dec 9, 2013
Priority date	Mar 31, 2010
Publication date	Jan 17, 2017
Grant date	Jan 17, 2017

Abstract

Temporal focusing of spatially chirped femtosecond laser pulses overcomes previous limitations for ablating high aspect ratio features with low numerical aperture (NA) beams. Simultaneous spatial and temporal focusing reduces nonlinear interactions, such as self-focusing, prior to the focal plane so that deep (˜1 mm) features with parallel sidewalls are ablated at high material removal rates.

First claim

What is claimed is:

1. An optical system, comprising:
a first optical element or set of optical elements that receives and then spatially chirps a light beam comprising temporally chirped pulses of light; and
a second optical element or set of optical elements that focuses the spatially chirped light beam to create a focused light beam having a focal spot that remains stationary independent of an energy level of the light beam.

2. The optical system of claim 1 , wherein the spatially chirped pulses of light are also collimated to overlap in time but not overlap spatially and wherein the second optical element or set of optical elements focuses the collimated and spatially chirped light through an object onto a back surface of the object.

3. The optical system of claim 2 , wherein the focused light beam ablates the back surface of the object.

4. The optical system of claim 3 , wherein the object comprises an optically transparent material.

5. The optical system of claim 1 , the spatially chirped pulses of light mitigate average power effects of focusing the light beam.

6. The optical system of claim 1 , wherein the object comprises a biological material.

7. The optical system of claim 1 , wherein the light beam is focused on an object.

8. The optical system of claim 7 , wherein the object comprises an eye.

9. The optical system of claim 7 , wherein the light beam is focused on a front surface of the object.

10. The optical system of claim 1 , wherein the temporally chirped pulses of light comprise femtosecond laser pulses.

11. The optical system of claim 10 , wherein the femtosecond laser pulses are positively chirped to avoid pulse front tilt prior to reaching the second optical element or set of optical elements.

12. The optical system of claim 1 , wherein the second optical element or set of optical elements comprises at least one of a lens and parabolic mirror.

13. The optical system of claim 1 , further comprising an optical conduit which includes a plurality of optical fibers, wherein each of the optical fibers are configured to carry different wavelengths of the spatially chirped and collimated light from the first optical element or set of optical elements to the second optical element or set of optical elements.

14. A method, comprising:
receiving temporally chirped pulses of a light beam;
spatially chirping and collimating the temporally chirped pulses of the light beam such that different frequencies of the spatially chirped and collimated light overlap in time; and
focusing the different frequencies of the spatially chirped and collimated light at a focal plane to create a focused light beam having a focal spot that remains stationary independent of an energy level of the light beam.

15. The method of claim 14 , wherein the focal plane coincides with the back plane of an object.

16. The method of claim 15 , wherein the back plane of the object is ablated with the focused light.

17. The method of claim 14 , wherein the temporally chirped pulses of light comprise stretched laser pulses.

18. The method of claim 14 , wherein the temporally chirped pulses of light are focused at a low numerical aperture.

19. The optical system of claim 1 , wherein distortion levels of intensity profiles of the focal spot remain constant independent of the energy level of the light beam.

20. The method of claim 14 , wherein distortion levels of intensity profiles of the focal spot remain constant independent of the energy level of the light beam.

Assignees

• Colorado School Of Mines

Inventors

• Squier Jeffrey
• Vitek Dawn
• Durfee Charles
• Adams Daniel
• Kleinfeld David

Classifications

• H01S3/0057

  Temporal shaping, e.g. pulse compression, frequency chirping (soliton generation and propagation G02F1/3513, H01S3/063 and H01S3/108) · CPC title

• B23K26/0624

  using ultrashort pulses, i.e. pulses of 1 ns or less · CPC title

• B23K26/36 Primary

  Removing material (B23K26/55, B23K26/57 take precedence) · CPC title

• B23K26/57 Primary

  the laser beam entering a face of the workpiece from which it is transmitted through the workpiece material to work on a different workpiece face, e.g. for effecting removal, fusion splicing, modifying or reforming · CPC title

• H01S3/005

  Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping (shaping laser beam for working metal or other materials B23K26/06; optical elements, systems or apparatus in general G02B) · CPC title