System and method for generation of extreme ultraviolet light

Patent metadata

Field	Value
Publication number	US-9544984-B2
Application number	US-201414335442-A
Country	US
Kind code	B2
Filing date	Jul 18, 2014
Priority date	Jul 22, 2013
Publication date	Jan 10, 2017
Grant date	Jan 10, 2017

Abstract

An EUV light source includes a rotatable, cylindrically-symmetric element having a surface coated with a plasma-forming target material, a drive laser source configured to generate one or more laser pulses sufficient to generate EUV light via formation of a plasma by excitation of the plasma-forming target material, a set of focusing optics configured to focus the one or more laser pulses onto the surface of the rotatable, cylindrically-symmetric element, a set of collection optics configured to receive EUV light emanated from the generated plasma and further configured to direct the illumination to an intermediate focal point, and a gas management system including a gas supply subsystem configured to supply plasma-forming target material to the surface of the rotatable, cylindrically-symmetric element.

First claim

What is claimed is:

1. An apparatus for generating extreme ultra-violet (EUV) light comprising:
a vacuum chamber;
a rotatable, cylindrically-symmetric element having a surface at least partially coated with a plasma-forming target material and disposed within the vacuum chamber;
one or more actuation devices configured to control at least one of an axial position or a tilt of the rotatable, cylindrically-symmetric element;
a drive laser source configured to generate one or more laser pulses sufficient to generate EUV light via formation of a plasma by excitation of the plasma-forming target material;
a set of focusing optics configured to focus the one or more laser pulses onto a portion of the surface of the rotatable, cylindrically-symmetric element;
a set of collection optics configured to receive EUV light emanated from the plasma generated in response to the excitation of the plasma-forming target material and further configured to direct the illumination to an intermediate focal point; and
a gas management system including a gas supply subsystem configured to supply plasma-forming target material to the surface of the rotatable, cylindrically-symmetric element.

2. The apparatus of claim 1 , wherein the rotatable, cylindrically-symmetric element comprises:
a cylinder.

3. The apparatus of claim 1 , wherein the one or more laser pulses comprises:
a series of laser pulses sufficient to generate EUV light via excitation of a portion of the plasma-forming target material.

4. The apparatus of claim 3 , wherein the series of laser pulses sufficient to generate EUV light via excitation of a portion of the plasma-forming target material includes:
one or more pre-pulses sufficient to non-thermally ablate a portion of the plasma-forming target material; and
one or more main pulses sufficient to generate EUV light via excitation of a portion of the non-thermally ablated portion of the plasma-forming target material.

5. The apparatus of claim 1 , wherein the one or more laser pulses have a duration in the rage of 5 to 50 ns.

6. The apparatus of claim 1 , wherein the one or more laser pulses are repeatedly produced at a frequency in the range of 1 to 50 kHz.

7. The apparatus of claim 1 , wherein the drive laser source comprises:
one or more drive lasers.

8. The apparatus of claim 7 , wherein the drive laser source comprises:
a first drive laser;
at least one additional drive laser; and
a beam combiner to combine a series of pulses generated by the first drive laser with a series of pulses generated by the at least one additional drive laser into a series of combined laser pulses.

9. The apparatus of claim 1 , wherein the one or more actuation devices is configured to control a rotational state of the rotatable, cylindrically-symmetric element.

10. The apparatus of claim 9 , further comprising:
a control system in communication with the one or more actuation devices, the control system configured to cause the one or more actuation devices to perform a pulsed axial translation process.

11. The apparatus of claim 10 , wherein the pulsed axial translation process comprises:
aligning the drive laser source at a first axial position of the rotatable, cylindrically-symmetric element;
rotating the rotatable, cylindrically-symmetric element to cause the one or more laser pulses of the drive laser source to traverse the circumference of the rotatable, cylindrically-symmetric element along the first axial position; and
axially translating the rotatable, cylindrically-symmetric element relative to the drive laser source following a full rotation of the rotatable, cylindrically-symmetric element so to align the drive laser source at a second axial position of the rotatable, cylindrically-symmetric element; and
rotating the rotatable, cylindrically-symmetric element to cause the one or more laser pulses of the drive laser source to traverse the circumference of the rotatable, cylindrically-symmetric element along the second axial position.

12. The apparatus of claim 10 , wherein the pulsed axial translation process comprises:
performing a series of pulsed axial translations on a downward stroke of the rotatable, cylindrically-symmetric element; and
performing a series of pulsed axial translations on an upward stroke of rotatable, cylindrically-symmetric element, wherein the axial positions associated with the series of pulsed axial translations on the downward stroke are interlaced with the axial positions associated with the series of pulsed axial translations on the upward stroke.

13. The apparatus of claim 1 , further comprising:
a beam diagnostic subsystem configured to monitor one or more characteristics of the one or more laser pulses generated by the drive laser source; and
a control system configured to receive the one or more monitored parameters from the beam diagnostic subsystem, the control system further configured to adjust at least one of one or more parameters of the drive laser source, one or more parameters of the rotatable, cylindrically-symmetric element, one or more parameters of the vacuum chamber, one or more parameters of the set of focusing optics and one or more parameters of the gas supply subsystem.

14. The apparatus of claim 1 , further comprising:
one or more focusing optics configured to actively focus the one or more laser pulses from the drive laser source onto a plasma generation region of the rotatable, cylindrically-symmetric element; and
a control system communicatively coupled to the one or more focusing optics and configured to adjust the focus of the one or more laser pulses from the drive laser source.

15. The apparatus of claim 1 , wherein the gas management system further includes:
a plasma-forming material recycling subsystem.

16. The apparatus of claim 1 , wherein the rotatable, cylindrically-symmetric element comprises:
a conductive rotatable, cylindrically-symmetric element having a reflective surface being substantially reflective to the one or more pulses of the drive laser source.

17. The apparatus of claim 1 , wherein the rotatable, cylindrically-symmetric element comprises:
a conductive rotatable, cylindrically-symmetric element being substantially transparent to the one or more laser pulses of the drive laser source.

18. The apparatus of claim 1 , wherein the rotatable, cylindrically-symmetric element includes a plurality of mass-limited targets embedded within the surface of the rotatable, cylindrically-symmetric element.

19. The apparatus of claim 1 , wherein the rotatable, cylindrically-symmetric element includes a plurality of adhesion structures within the surface of the rotatable, cylindrically-symmetric element.

20. The apparatus of claim 1 , further comprising:
one or more cryogenic panels disposed within the vacuum chamber and configured to shield one or more metal surfaces within the vacuum chamber from energetic ionic or neutral species of the plasma-forming material.

21. The apparatus of claim 1 , further comprising:
one or more EUV diagnostic tools configured to monitor one or more characteristics of generated EUV light; and
a control system configured to receive the one or more monitored parameters from the one or more EUV diagnostic tools, the control system further configured to adjust at least one of plasma position on rotatable, cylindrically-symmetric element and the primary focus of the collection optics.

22. An inspection system comprising:
an illumination sub-system includ

Assignees

• Kla Tencor Corp

Inventors

• Bykanov Alexander
• Khodykin Oleg
• Wack Daniel C
• Tsigutkin Konstantin
• Hale Layton
• Walsh Joseph
• Chilese Frank
• Garcia Rudy F
• Ahr Brian

Classifications

• G03F7/70891

  Temperature · CPC title

• G03F1/84

  Inspecting · CPC title

• G01N2201/061

  Sources · CPC title

• H05H2240/00

  Testing · CPC title

• G03F7/70033

  by plasma extreme ultraviolet [EUV] sources · CPC title