Microwave device using magnetic material nano wire array and manufacturing method thereof

Patent metadata

Field	Value
Publication number	US-9543627-B2
Application number	US-201414518889-A
Country	US
Kind code	B2
Filing date	Oct 20, 2014
Priority date	Nov 19, 2013
Publication date	Jan 10, 2017
Grant date	Jan 10, 2017

Abstract

Provided herein is a microwave device using a magnetic material nano wire array and a manufacturing method thereof, the device including a template having a nano hole array filled with a metal magnetic material.

First claim

What is claimed is:

1. A microwave device having a magnetic material nano wire array, the device comprising:
a template having an array of nano holes, each of the nano holes extending from a first surface of the template to a second surface of the template opposite the first surface,
wherein the nano holes are filled with a metal magnetic material to form an array of magnetic material nano wires, at least one end of each of the magnetic material nano wires extending to the second surface of the template; and
a magnetic material layer formed on the second surface of the template and that is in contact with the ends of the magnetic material nano wires that extends to the second surface of the template.

2. The device according to claim 1 ,
wherein geometric structure of a nano hole included in the array of nano holes includes a cylindrical shape or polygonal column shape.

3. The device according to claim 1 ,
wherein distances between nano holes included in the array of nano holes are uniform or partially different from one another.

4. The device according to claim 1 ,
wherein at least one of a geometric structure of a nano hole included in the array of nano holes, distance between the nano holes, type of metal magnetic material filled in the array of nano holes, and amount of metal magnetic material filled in the nano holes of the array of nano holes is determined depending on the frequency of an electromagnetic wave that is designed to be applied to the microwave device using the array of nano wires.

5. The device according to claim 1 ,
wherein the metal magnetic material that forms each of the nano wires of the array of nano wires has the same spin direction.

6. The device according to claim 1 ,
wherein each nano hole of the array of nano holes is only partially filled with the metal magnetic material.

7. The device according to claim 6 ,
further comprising:
a first electrode formed on the first surface of the template; and
a second electrode formed on a first surface of the metal magnetic material layer that is opposite to a second surface of the metal magnetic material layer, where the second surface of the metal magnetic material layer is disposed on the second surface of the template and on the ends of the magnetic material nano wires that extends to the second surface of the template.

8. A method for manufacturing a microwave device having a magnetic material nano wire array, the method comprising:
forming a template having an array of nano holes, each of the nano holes extending from a first surface of the template to a second surface of the template opposite the first surface;
filling the nano holes with a metal magnetic material to form an array of magnetic material nano wires, at least one end of each magnetic material nano wire extending to the second surface of the template; and
forming a magnetic material layer on the second surface of the template and on the ends of the nano wires that extends to the second surface of the template.

9. The method according to claim 8 ,
wherein the template is an alumina template, and
the forming a template having an array of nano holes involves forming the alumina template by applying an aluminum substrate to an anodizing process.

10. The method according to claim 8 ,
wherein the forming a template having an array of nano holes involves determining the geometric structure of a nano hole being included in the array of nano holes or the distance between the nano holes depending on the frequency of an electromagnetic wave that is designed to be applied to the microwave device using the nano wire array.

11. The method according to claim 10 ,
wherein the filling nano holes of the array of nano holes with a metal magnetic material involves determining the type of metal magnetic material to be used to fill the nano holes or determining amount of metal magnetic material to be used to fill the nano holes based on the frequency of an electromagnetic wave to be applied to the microwave device using the nano wire array.

12. The method according to claim 10 ,
wherein the forming a template having an array of nano holes is performed through a sputtering process, or
filling the nano holes with a metal magnetic material is performed through an electroplating process.

13. The method according to claim 8 ,
wherein the filling the nano holes with a metal magnetic material involves filling only a portion of each of the nano holes with the metal magnetic material.

14. The method according to claim 13 ,
further comprising:
forming a first electrode on the first surface of the template; and
forming a second electrode on a first surface of the metal magnetic material layer that is opposite to a second surface of the metal magnetic material layer, where the second surface of the metal magnetic material layer is disposed on the second surface of the template and on the ends of the magnetic material nano wires that extends to the second surface of the template.

Assignees

• Electronics & Telecommunications Res Inst

Inventors

• Kim Yark Yeon
• Yu Han Young
• Yoon Yong Sun
• Jang Won Ick

Classifications

• H01P1/387

  Strip line circulators · CPC title

• H01P1/38 Primary

  Circulators · CPC title

• C25D11/20

  Electrolytic after-treatment · CPC title

• C25D11/045

  for forming AAO templates · CPC title

• C25D1/006

  Nanostructures, e.g. using aluminium anodic oxidation templates [AAO] · CPC title