Ferroelectric thin film having superlattice structure, manufacturing method thereof, ferroelectric element, and manufacturing method thereof

Patent metadata

Field	Value
Publication number	US-9543500-B2
Application number	US-201113878571-A
Country	US
Kind code	B2
Filing date	Oct 4, 2011
Priority date	Oct 13, 2010
Publication date	Jan 10, 2017
Grant date	Jan 10, 2017

Abstract

At least two types of dielectric materials such as oxide nanosheets having a layered perovskite structure that differ from each other are laminated, and the nanosheets are bonded to each other via an ionic material, thereby producing a superlattice structure-having ferroelectric thin film. Having the layered structure, the film can exhibit ferroelectricity as a whole, though not using a ferroelectric material therein. Accordingly, there is provided a ferroelectric film based on a novel principle, which is favorable for ferroelectric memories and others and which is free from a size effect even though extremely thinned.

First claim

The invention claimed is:

1. A ferroelectric thin film having a superlattice structure and produced by alternatingly layering at least two different types of dielectric materials, in which the different dielectric materials are bonded with an ionic material, wherein each of the at least two different types of dielectric materials is an oxide having a nanosheet-like perovskite structure.

2. The ferroelectric thin film having a superlattice structure according to claim 1 , wherein each of the at least two dielectric materials has at least one of an NbO 6 octahedron, a TaO 6 octahedron and a TiO 6 octahedron enveloped in the unit lattice thereof.

3. The ferroelectric thin film having a superlattice structure according to claim 1 , wherein each of the at least two dielectric materials has a thickness of at most 5 nm and a lateral size of from 100 nm to 100 μm.

4. The ferroelectric thin film having a superlattice structure according to claim 1 , wherein each of the at least two dielectric materials is one obtained by peeling any of layered oxides represented by the following compositional formulae, or their hydrates:
Compositional formula A x M y Nb 2 O 7-d , A x M y M′ 2 O 7-d , A x Ca 2 Nb 3 O 10-d , A x Ca 2-y M y Nb 3-z M′ z O 10-d , A x M 2 M′ 3 O 10-d or A x [Ca n-1 Na n-3 Nb n O 3n+1-d ] (wherein A represents at least one selected from a group of H, Li, Na, K, Rb and Cs; 0≦x≦1; M represents at least one selected from a group of Sr, Ba, Pb, Bi, and rare earth elements La, Ce, Pr, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu; 0<y≦1; M′ represents at least one selected from a group of Ti, Mg, Mn, Cu, Zn, Nb and Ta; 0<z≦3; n=3 to 8; d=0 to 2).

5. The ferroelectric thin film having a superlattice structure according to claim 1 , wherein each of the at least two dielectric materials is a nanosheet-like perovskite oxide represented by the following compositional formula:
Compositional formula M y Nb 2 O 7-d , M y M′ 2 O 7-d , Ca 2 Nb 3 O 10-d , Ca 2-y M y Nb 3-z M′ z O 10-d , M 2 M 3 O 10-d or [Ca n-1 Na n-3 Nb n O 3n+1-d ] (wherein M represents at least one selected from a group of Sr, Ba, Pb, Bi and rare earth elements La, Ce, Pr, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu; 0<y≦1; M′ represents at least one selected from a group of Ti, Mg, Mn, Cu, Zn, Nb and Ta 0<z≦3; n=3 to 8; d=0 to 2).

6. The ferroelectric thin film having a superlattice structure according to claim 1 , of which the thickness is from 1 nm to 50 nm.

7. A ferroelectric element comprising the with any of ferroelectric thin film of claim 1 adhering to an electrode substrate.

8. A method for producing a ferroelectric element, which comprises adhering any of the ferroelectric thin films of claim 1 onto a first electrode substrate and arranging a second electrode on the side of the ferroelectric thin film opposite to the side thereof having the first electrode substrate adhering thereto.

9. The method for producing a ferroelectric element according to claim 8 , wherein the ferroelectric thin film having a superlattice structure is produced by repeating a step of densely and tightly coating the surface of the first electrode substrate with the dielectric material according to a Langmuir-Blodgett method to form a monolayer film on the surface, thereby adhering the monolayer film to the first electrode substrate.

10. The method for producing a ferroelectric element according to claim 8 , wherein the ferroelectric thin film is produced by immersing the first electrode substrate in a cationic organic polymer solution to thereby make the organic polymer adsorbed by the surface of the first electrode substrate or by the surface of the dielectric material already adsorbed by the first electrode substrate, and then further immersing it in a colloid solution with the dielectric material suspended therein so as to make the dielectric material adsorbed by the surface of the dielectric material through electrostatic interaction therebetween, thereby producing the ferroelectric thin film having a superlattice structure.

11. The method for producing a ferroelectric element according to claim 10 , wherein in the step of making the dielectric material adsorbed by the first substrate through electrostatic interaction therebetween, ultrasonic wave is imparted to the system to thereby remove the overlapping part of the dielectric materials.

12. The method for producing a ferroelectric element according to claim 10 , wherein the ferroelectric thin film having a superlattice structure is, after formed, irradiated with UV light to remove the organic polymer.

13. The method for producing a ferroelectric element according to claim 12 , wherein the ionic material is formed from the organic polymer through irradiation with UV light.

14. The method for producing a ferroelectric element according to claim 8 , wherein the ferroelectric thin film is formed by peeling the layered material with a peeling agent, and after formed, the ferroelectric thin film is irradiated with UV light to remove the peeling agent, and the ionic material is formed from the peeling agent through irradiation with UV light.

Assignees

• Osada Minoru
• Sasaki Takayoshi
• Nat Inst For Materials Science

Inventors

• Osada Minoru
• Sasaki Takayoshi

Classifications

• H10P14/69398

  the material having a perovskite structure, e.g. BaTiO3 · CPC title

• H01L21/02197

  Electricity · mapped topic

• H01L41/317

  Electricity · mapped topic

• H01L27/11507

  Electricity · mapped topic

• H01L41/183 Primary

  Electricity · mapped topic