Method for producing amorphous oxide thin film and thin film transistor

Patent metadata

Field	Value
Publication number	US-9543143-B2
Application number	US-201314104714-A
Country	US
Kind code	B2
Filing date	Dec 12, 2013
Priority date	Jun 14, 2011
Publication date	Jan 10, 2017
Grant date	Jan 10, 2017

Abstract

A method for producing an amorphous oxide thin film includes: a pre-treatment process of selectively changing a binding state of an organic component, at a temperature lower than a pyrolysis temperature of the organic component, in a first oxide precursor film containing the organic component and In, to obtain a second oxide precursor film in which, when an infrared wave number range of from 1380 cm −1 to 1520 cm −1 in an infrared absorption spectrum obtained by performing a measurement by Fourier transform infrared spectroscopy is divided into an infrared wave number range of from 1380 cm −1 to 1450 cm −1 and an infrared wave number range of from more than 1450 cm −1 to 1520 cm −1 , a peak positioned within the infrared wave number range of from 1380 cm −1 to 1450 cm −1 exhibits the maximum value in the infrared absorption spectrum within an infrared wave number range of from 1350 cm −1 to 1750 cm −1 ; and a post-treatment process of removing the organic component remaining in the second oxide precursor film, to transform the second oxide precursor film into an amorphous oxide thin film containing In.

First claim

The invention claimed is:

1. A method for producing an amorphous oxide thin film, the method comprising:
a pre-treatment process of selectively changing a binding state of an organic component, at a temperature lower than a pyrolysis temperature of the organic component, in a first oxide precursor film containing the organic component and In, to obtain a second oxide precursor film in which, when an infrared wave number range of from 1380 cm −1 to 1520 cm −1 in an infrared absorption spectrum obtained by performing a measurement by Fourier transform infrared spectroscopy is divided into an infrared wave number range of from 1380 cm −1 to 1450 cm −1 and an infrared wave number range of from more than 1450 cm −1 to 1520 cm −1 , a peak positioned within the infrared wave number range of from 1380 cm −1 to 1450 cm −1 exhibits the maximum value in the infrared absorption spectrum within an infrared wave number range of from 1350 cm −1 to 1750 cm 1 ; and
a post-treatment process of removing the organic component remaining in the second oxide precursor film, to transform the second oxide precursor film into an amorphous oxide thin film containing In,
wherein the pre-treatment process is a photo treatment process, wherein the first oxide precursor film comprises an inorganic component including In and at least one selected from the group consisting of Ga, Zn, and Sn, and wherein a composition of the inorganic component is In:Ga:Zn =2-x:x:1 (in which, x represents a number of from 0.8 to 1.05), and
further comprising, before the pre-treatment process, a formation process of forming the first oxide precursor film by a liquid phase method using a solution containing a metal alkoxide or an organic acid salt.

2. The method for producing an amorphous oxide thin film according to claim 1 , wherein the selectively changing a binding state of the organic component in the pre-treatment process comprises a change corresponding to a lowering of a peak which is derived from the organic component and is positioned within an infrared wave number range of from 1500 cm −1 to 1600 cm −1 , in an infrared absorption spectrum obtained when the second oxide precursor film is analyzed by Fourier transform infrared spectroscopy.

3. The method for producing an amorphous oxide thin film according to claim 2 , wherein, in the infrared absorption spectrum obtained when the second oxide precursor film is analyzed by Fourier transform infrared spectroscopy, a rate of the absorbance value of the peak positioned within the infrared wave number range of from 1500 cm −1 to 1600 cm −1 , with respect to the absorbance value of the peak positioned within the infrared wave number range of from 1500 cm −1 to 1600 cm −1 before the pre-treatment process, is 0.37 or less.

4. The method for producing an amorphous oxide thin film according to claim 3 , wherein, in the infrared absorption spectrum obtained when the second oxide precursor film is analyzed by Fourier transform infrared spectroscopy, a rate of the absorbance value of the peak positioned within the infrared wave number range of from 1500 cm −1 to 1600 cm −1 , with respect to the absorbance value of the peak positioned within the infrared wave number range of from 1500 cm −1 to 1600 cm −1 before the pre-treatment process, is 0.11 or less.

5. The method for producing an amorphous oxide thin film according to claim 1 , wherein the selectively changing a binding state of the organic component in the pre-treatment process comprises a change corresponding to a lowering of a peak which is derived from the organic component and is positioned within an infrared wave number range of from 2750 cm −1 to 3050 cm −1 , in an infrared absorption spectrum obtained when the second oxide precursor film is analyzed by Fourier transform infrared spectroscopy.

6. The method for producing an amorphous oxide thin film according to claim 1 , wherein the photo treatment process comprises irradiating the first oxide precursor film with ultraviolet rays.

7. The method for producing an amorphous oxide thin film according to claim 1 , wherein, in the pre-treatment process, the photo treatment is performed using a total amount of energy of 6.0 J/cm 2 or more, when a peak positioned within the infrared wave number range of from 1380 cm −1 to 1520 cm 1 , in the infrared absorption spectrum obtained when the second oxide precursor film is analyzed by Fourier transform infrared spectroscopy, begins to exhibit the maximum value in the infrared absorption spectrum within the infrared wave number range of from 1350 cm −1 to 1750 cm −1 , along with a lapse of time of the photo treatment.

8. The method for producing an amorphous oxide thin film according to claim 7 , wherein, in the pre-treatment process, the photo treatment is performed using a total amount of energy of 9.0 J/cm 2 or less, when a peak positioned within the infrared wave number range of from 1380 cm −1 to 1520 cm −1 , in the infrared absorption spectrum obtained when the second oxide precursor film is analyzed by Fourier transform infrared spectroscopy, begins to exhibit the maximum value in the infrared absorption spectrum within the infrared wave number range of from 1350 cm −1 to 1750 cm −1 , along with a lapse of time of the photo treatment.

9. The method for producing an amorphous oxide thin film according to claim 1 , wherein the post-treatment process is a heat treatment process of performing heat treatment at a temperature equal to or higher than 425° C.

10. The method for producing an amorphous oxide thin film according to claim 1 , wherein a composition of the inorganic component is a composition such that InGaZnO 4−δ (in which, δ represents an oxygen nonstoichiometric amount) appears in a single phase as a crystalline phase, resulting from a heat treatment process at a temperature equal to or higher than a crystallization temperature.

11. A thin film transistor comprising, as an active layer, an amorphous oxide thin film produced by the method for producing an amorphous oxide thin film according to claim 1 .

12. The thin film transistor according to claim 11 , wherein a thickness of the active layer is from 1 nm to 100 nm.

13. A thin film transistor comprising, as an insulating layer, an amorphous oxide thin film produced by the method for producing an amorphous oxide thin film according to claim 1 .

14. A thin film transistor comprising, as a conductive layer, an amorphous oxide thin film produced by the method for producing an amorphous oxide thin film according to claim 1 .

Assignees

• Fujifilm Corp

Inventors

• Umeda Kenichi
• Tanaka Atsushi
• Suzuki Masayuki
• Shimoda Tatsuya

Classifications

• H10P74/20

  characterised by the properties tested or measured, e.g. structural or electrical properties · CPC title

• H10P14/3454

  Amorphous · CPC title

• H10P14/3426 Primary

  Oxides · CPC title

• H10P14/265

  using solutions · CPC title

• H10P14/3434 Primary

  being oxide semiconductor materials (Group IIB-VIA semiconductor materials H10P14/3424) · CPC title