Scanning ion beam deposition and etch
US-12176178-B2 · Dec 24, 2024 · US
US9543127B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9543127-B2 |
| Application number | US-201214378103-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 16, 2012 |
| Priority date | Apr 16, 2012 |
| Publication date | Jan 10, 2017 |
| Grant date | Jan 10, 2017 |
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A method of coating spherical components with a coating process in which the spherical components have a surface area includes positioning the spherical components within a containment boundary on a moving member and positioning the moving member within a chamber. The method includes reducing the pressure within the chamber to less than one atmosphere. The method also includes revolving the moving member about a longitudinal axis. The method further includes oscillating the moving member in a direction of the longitudinal axis and commencing the coating process. The oscillating and revolving produce motion of the spherical components within the containment boundary such that an entirety of the surface area of each component is exposed to the coating process.
Opening claim text (preview).
What is claimed is: 1. A table assembly for use in coating spherical components at sub-atmospheric pressures, the table assembly including: a moving member defining a surface and operable to revolve about a longitudinal axis, wherein the moving member includes a containment boundary on the surface; and an oscillation member configured to impart oscillatory motion to the moving member upon revolving of the moving member; wherein the surface is a first surface, and wherein the moving member further defines a second surface, and further wherein the moving member includes one of a cam element or a rolling element coupled to the second surface, and wherein the oscillation member further includes the other one of the cam element or the rolling element in operational contact with the one of the cam element or the rolling element coupled to the second surface to impart the oscillatory motion to the moving member upon rotation of the oscillation member. 2. The table assembly of claim 1 , further including a supporting member that rotates about the longitudinal axis, and wherein the moving member is coupled to the supporting member. 3. The table assembly of claim 2 , wherein the moving member is hingedly coupled to the supporting member for pivoting movement. 4. The table assembly of claim 2 , further including a driving member disposed in proximity to a portion of the supporting member and configured to revolve about the longitudinal axis, wherein the driving member rotates the supporting member about the longitudinal axis. 5. The table assembly of claim 1 , wherein the cam element presents to the rolling element a cam surface angled at a non-zero angle relative to the second surface. 6. The table assembly of claim 1 , wherein the cam element presents to the rolling element a cam surface angled at a non-zero angle relative to the second surface and a ledge defining a surface parallel to the second surface. 7. The table assembly of claim 1 , wherein the containment boundary is integrally formed as part of the surface. 8. The table assembly of claim 7 , wherein the containment boundary forms a pocket in the moving member. 9. The table assembly of claim 1 , wherein the containment boundary forms a circle. 10. The table assembly of claim 1 , wherein the containment boundary is substantially nephroidal in shape. 11. The table assembly of claim 1 , wherein the containment boundary is a surface feature fixedly attached to the first surface. 12. The table assembly of claim 1 , wherein the moving member includes a plurality of moving members, each moving member having a respective first surface and an opposing second surface, and wherein each moving member includes a containment boundary formed on the first surface. 13. The table assembly of claim 12 , wherein each moving member further includes one of a cam element or a rolling element coupled to the second surface. 14. The table assembly of claim 1 , wherein the moving member is a first moving member, and further including a second moving member coupled to the first moving member and spaced apart therefrom along the longitudinal axis. 15. The table assembly of claim 14 , wherein the second moving member is spaced between about 2″ and about 6 41 from the first moving member. 16. The table assembly of claim 1 , wherein the containment boundary defines a perimeter of length P, and is sized to receive a number N of spherical components, each having a diameter D, within the containment boundary such that N×D is less than or equal to P. 17. The table assembly of claim 1 , wherein the containment boundary defines an edge having a height H orthogonal to the surface, and further wherein the containment boundary is sized to receive a number N of spherical components, each having a diameter D, within the containment boundary, wherein D is greater than or equal to 4H.
for rotation of the substrates · CPC title
characterised by the method used for supporting substrates in the reaction chamber · CPC title
by application of a magnetic field, e.g. magnetron sputtering {(C23C14/3457 takes precedence)} · CPC title
using reactive gases other than O2, H2O, N2, NH3 or CH4 · CPC title
the substrate being rotated · CPC title
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