Inspection apparatus for article storage facility

Patent metadata

Field	Value
Publication number	US-9541534-B2
Application number	US-201414308158-A
Country	US
Kind code	B2
Filing date	Jun 18, 2014
Priority date	Jun 26, 2013
Publication date	Jan 10, 2017
Grant date	Jan 10, 2017

Abstract

An inspection apparatus used for an article storage facility includes an inactive gas supply portion provided with a supply nozzle provided in a placement support portion. A transport container having a supply port for an inactive gas is formed at a bottom portion thereof for accommodating substrates in a sealed state. The nozzle is joined to the supply port by a self weight of the transport container supported on the placement support portion so as to inject the inactive gas to an interior of the transport container. An inspection supply port is joined to the supply nozzle by a self weight of the inspection apparatus supported on the placement support portion, and is configured such that a gravity center position is supported on the placement support portion and coincides with a gravity center position of the transport container, the supply port inspects a state of supply of the inactive gas in the state of being supported on the placement support portion.

First claim

The invention claimed is:

1. An article storage facility including an inspection apparatus, the article storage facility comprising:
a plurality of storage sections each including a placement support portion on which is placed and supported a transport container having a supply port for an inactive gas formed at a bottom portion thereof, the transport container provided for accommodating a number of substrates that is less than or equal to a predetermined number of substrates in a sealed state, the storage sections being capable of storing the transport containers in a state in which the transport containers are supported on the placement support portions;
an inactive gas supply portion including a supply nozzle that is a nozzle provided in the placement support portion, and that is joined to the supply port by a self weight of the transport container supported on the placement support portion so as to inject the inactive gas to an interior of the transport container, and
an inspection apparatus for inspecting a state of supply of the inactive gas by the inactive gas supply portion in a state in which the inspection apparatus is supported on the placement support portion,
wherein the placement support portion includes a plurality of support member-side connecting portions provided with the supply nozzle or a discharge nozzle for releasing the inactive gas from the interior of the transport container, and a plurality of engaging portions engageable with the bottom portion of the transport container, and
wherein the inspection apparatus comprises:
an inspection supply port that is joined to the supply nozzle by a self weight of the inspection apparatus supported on the placement support portion,
a plate-shaped element supported only by the plurality of support member-side connecting portions and the plurality of engaging portions with the inspection apparatus being supported on the placement support portion, and
a flowmeter, an inspection controller, and a battery mounted on the plate-shaped element, and
wherein the inspection apparatus is configured such that a gravity center position of the inspection apparatus in a direction along a horizontal plane in the state in which the inspection apparatus is supported on the placement support portion coincides with a gravity center position of the transport container in a direction along a horizontal plane in the state in which the transport container is supported on the placement support portion.

2. The article storage facility according to claim 1 , wherein a weight of the inspection apparatus is smaller than a maximum weight that is a weight of the transport container when a maximum number of substrates are accommodated in the transport container.

3. The article storage facility according to claim 1 , wherein a weight of the inspection apparatus is less than or equal to a minimum weight that is a weight of the transport container when the transport container is in an empty state.

4. The article storage facility according to claim 1 , wherein the inspection apparatus comprises a weight supporting portion that supports a weight-adjusting weight.

5. The article storage facility according to claim 4 , wherein a plurality of the weight supporting portions are disposed at positions different from the gravity center position of the inspection apparatus in a direction along the horizontal plane.

6. The article storage facility according to claim 4 , wherein a plurality of the weight supporting portions are arranged along peripheral edge portions of the plate-shaped element as viewed from the top.

Assignees

• Daifuku Kk

Inventors

• Otsuka Hiroshi
• Kawamura Shinsuke
• Yoshimoto Tadahiro

Classifications

• H10P72/1926

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/3404

  Storage means · CPC title

• G01N33/0009 Primary

  General constructional details of gas analysers, e.g. portable test equipment (devices for withdrawing samples in the gaseous state G01N1/22) · CPC title

• H01L21/67393

  Electricity · mapped topic