System and method for a MEMS transducer

Patent metadata

Field	Value
Publication number	US-9540226-B2
Application number	US-201514717556-A
Country	US
Kind code	B2
Filing date	May 20, 2015
Priority date	May 20, 2015
Publication date	Jan 10, 2017
Grant date	Jan 10, 2017

Abstract

According to an embodiment, a microelectromechanical systems (MEMS) transducer includes a first electrode, a second electrode fixed to an anchor at a perimeter of the second electrode, and a mechanical support separate from the anchor at the perimeter of the second electrode and mechanically connected to the first electrode and the second electrode. The mechanical support is fixed to a portion of the second electrode such that, during operation, a maximum deflection of the second electrode occurs between the mechanical structure and the perimeter of the second electrode.

First claim

What is claimed is:

1. A microelectromechanical systems (MEMS) transducer comprising:
a first electrode;
a second electrode fixed to an anchor around a perimeter of the second electrode; and
a mechanical support separate from, and surrounded by, the anchor at the perimeter of the second electrode and mechanically connected to the first electrode and the second electrode, wherein the mechanical support is fixed to a portion of the second electrode such that, during operation, a maximum deflection of the second electrode occurs between the mechanical support and the perimeter of the second electrode.

2. The MEMS transducer of claim 1 , wherein the first electrode is a perforated backplate and the second electrode is a deflectable membrane.

3. The MEMS transducer of claim 2 , wherein the deflectable membrane has a diameter and a thickness, and wherein the diameter is at least 1000 times larger than the thickness.

4. The MEMS transducer of claim 1 , further comprising a third electrode.

5. The MEMS transducer of claim 4 , further comprising an additional mechanical support connected to the third electrode and the second electrode.

6. The MEMS transducer of claim 4 , wherein the first electrode is a perforated first backplate, the second electrode is a deflectable membrane, and the third electrode is a perforated second backplate.

7. The MEMS transducer of claim 1 , wherein the mechanical support comprises a post fixed to a central portion of the second electrode.

8. The MEMS transducer of claim 1 , wherein the mechanical support comprises a partitioning structure connected between the first electrode and the second electrode, wherein the partitioning structure is configured to partition the second electrode into a plurality of deflectable regions, each region having a maximum deflection point.

9. The MEMS transducer of claim 8 , wherein
the partitioning structure is configured to partition the second electrode into four deflectable regions; and
the second electrode comprises a quad-membrane partitioned into four deflectable quadrants by the partitioning structure.

10. A microelectromechanical systems (MEMS) transducer comprising:
a backplate having a clamped portion and a released portion;
a membrane spaced from the backplate, the membrane having a clamped portion and a released portion; and
a post connected to a central region of the released portion of the backplate and a central region of the released portion of the membrane.

11. The MEMS transducer of claim 10 , wherein the post comprises a single insulating material formed between the backplate and the membrane.

12. The MEMS transducer of claim 11 , further comprising a ventilation hole formed in a center of the post and in a center of the membrane.

13. The MEMS transducer of claim 10 , further comprising a plurality of ventilation holes formed in the membrane around the post.

14. The MEMS transducer of claim 10 , further comprising a ventilation hole formed in the membrane.

15. The MEMS transducer of claim 10 , wherein the backplate comprises a rigid and perforated structure overlying the membrane.

16. The MEMS transducer of claim 10 , further comprising an additional backplate having a clamped portion and a released portion, wherein the additional backplate is arranged on an opposite side of the membrane as the backplate.

17. The MEMS transducer of claim 10 , further comprising a structural support connected to the clamped portion of the backplate and the clamped portion of the membrane.

18. The MEMS transducer of claim 17 , wherein the post is formed of a same material as the structural support.

19. The MEMS transducer of claim 18 , wherein the structural support and the post are formed of silicon oxide.

20. A method of forming a microelectromechanical systems (MEMS) transducer, the method comprising:
forming a first perforated backplate;
forming a structural layer;
forming a first mechanical support in a portion of the first perforated backplate; and
forming a deflectable membrane, wherein
the deflectable membrane is fixed to the structural layer around a perimeter of the deflectable membrane,
the deflectable membrane is spaced apart from the first perforated backplate by the structural layer and the first mechanical support,
the first mechanical support is connected to the portion of the first perforated backplate and a portion of the deflectable membrane, and
the first mechanical support is connected to the portion of the first perforated backplate within the perimeter of the deflectable membrane, and is encircled by the structural layer.

21. The method of claim 20 , further comprising forming a second perforated backplate.

22. The method of claim 21 , further comprising forming a second mechanical support in a portion of the second perforated backplate, wherein the second mechanical support is connected to the portion of the second perforated backplate and the portion of the deflectable membrane.

23. The method of claim 20 , wherein the first perforated backplate is formed below the deflectable membrane and overlying a cavity in a substrate.

24. The method of claim 20 , wherein the first perforated backplate is formed above the deflectable membrane and overlying a cavity in a substrate.

25. The method of claim 20 , further comprising forming segmentation in the first perforated backplate.

26. The method of claim 20 , further comprising forming a ventilation hole in the deflectable membrane.

27. The method of claim 26 , wherein the ventilation hole is formed in the membrane and in the first mechanical support.

28. The method of claim 26 , wherein the ventilation hole is formed in the membrane around the first mechanical support.

29. The method of claim 20 , wherein forming the structural layer and forming the first mechanical support comprises:
disposing a single structural material; and
patterning the single structural material to form the first mechanical support and the structural layer.

30. The method of claim 29 , wherein the single structural material comprises silicon oxide.

31. The method of claim 20 , wherein forming the first mechanical support comprises forming a post fixed to a central portion of the first perforated backplate and fixed to a central portion of the deflectable membrane.

32. The method of claim 20 , wherein forming the first mechanical support comprises forming a partitioning structure connected between the first perforated backplate and the deflectable membrane, wherein forming the partitioning structure comprises partitioning the deflectable membrane into a plurality of deflectable regions, each region having a maximum deflection point.

33. The method of claim 32 , wherein partitioning the deflectable membrane comprises forming a quad-membrane by partitioning the deflectable membrane into four deflectable quadrants using the partitioning structure.

34. A microelectromechanical systems (MEMS) acoustic transducer comprising:
a variable capacitance sensor comprising a deflectable membrane and a mechanical support coupled to the deflectable membrane; and
wherein a first harmonic of the deflectable membrane produces a maximum deflection of the deflectable membrane in a first region between a perimeter of the deflectable membrane and

Assignees

• Infineon Technologies Ag

Inventors

• Klein Wolfgang
• Wurzer Martin
• Barzen Stefan
• Dehe Alfons

Classifications

• B81B2201/0257

  Microphones or microspeakers · CPC title

• H04R31/006

  Interconnection of transducer parts (of diaphragm and outer suspension by moulding H04R31/003) · CPC title

• B81B2203/04

  Electrodes · CPC title

• B81B3/007 Primary

  For controlling stiffness, e.g. ribs · CPC title

• B81B2203/0127

  Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function · CPC title