Substrate processing apparatus and control method for a substrate processing apparatus
US-2024120204-A1 · Apr 11, 2024 · US
US9539533B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9539533-B2 |
| Application number | US-201414484653-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 12, 2014 |
| Priority date | Sep 12, 2013 |
| Publication date | Jan 10, 2017 |
| Grant date | Jan 10, 2017 |
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A filter device for cleaning a gas flow has a hollow cylindrical pre-separator on whose outer side guide vanes are arranged. At least a portion of the guide vanes is provided with a rib that protrudes over the guide vane surface.
Opening claim text (preview).
We claim: 1. A cyclone filter device for cleaning a gas flow, the cyclone filter device comprising: a hollow annular filter element; an axially elongated cylindrical pre-separator having a hollow interior, an axial upper front side and axial lower front side at opposing axial ends of the pre-separator; guide vanes secured onto a radially outer circumferential surface of the cylindrical pre-separator, the guide vanes projecting radially outwardly away from the radially outer circumferential surface of the cylindrical pre-separator; wherein the guide vanes are spaced and distributed around circumference of the circumferential outer surface of the cylindrical pre-separator; wherein each guide vane of the guide vanes has a flow guiding surface on an axial side of the guide vain upon which incoming gas flow strikes the guide vane and is then deflected in a tangential direction, caused to rotate and accelerate on the guide surface; wherein the flow guiding surface extends from an incoming flow edge on an incoming flow side of the guide vane to an outgoing flow edge where deflected rotating gas flow leaves the guide vane; wherein at least a portion of the guide vanes are provided with an axially projecting rib formed on the flow guiding surface extending between the incoming flow edge and the outgoing flow edge, the rib extending at least approximately in the tangential direction on the flow guiding surface and projecting axially away from the guide vane towards the incoming gas flow, protruding over the flow guiding surface; wherein the rib is spaced apart from and arranged in a central region between radially inner and radially outer edges of the at least a portion of the guide vanes; wherein the rib extends in a straight line in tangential orientation or curved and in concentric orientation to pre-separator; wherein the axially elongated cylindrical pre-separator radially surrounds a radial outer side of the filter element and is spaced away from the radial outer side of the filter element forming an inner annular space between the pre-separator and the filter element, the inner annular space permitting flow to reach a portion of the filter element surrounded by the pre-separator; wherein the pre-separator and filter element are engaged together and installed together into the housing of the filter device. 2. The filter device as set forth in claim 1 , wherein the guide vanes are arranged adjacent to the axial upper front side or the axial lower front side of the pre-separator. 3. The filter device as set forth in claim 2 , wherein the rib and the flow guiding surface are arranged on a side of the guide vanes facing away from the nearest one of the upper front side and axial lower front side. 4. The filter device as set forth in claim 1 , wherein for the portion of the guide vanes provided with the rib, the rib of each guide vane are arranged in a same axial side of the guide vanes. 5. The filter device as set forth in claim 1 , wherein all guides vanes are provided with the rib. 6. The filter device as set forth in claim 1 , wherein the rib extend at least approximately over an entire length of the guide vanes from the incoming flow edge on an incoming flow side of the guide vane to the outgoing flow edge. 7. The filter device as set forth in claim 1 , wherein the pre-separator engages around a filter element that is received together with the pre-separator in a housing of the filter device. 8. The filter device as set forth in claim 1 , wherein only a portion of the guide vanes are provided with the rib. 9. The filter device as set forth in claim 1 , wherein the guide vanes are secured only on the radially inner edges of the guide vanes.
Particle separators, e.g. dust precipitators, using rigid hollow filter bodies · CPC title
by centrifugal forces (centrifuges B04B; cyclones B04C) · CPC title
Cyclonic chamber constructions · CPC title
Filter cartridges · CPC title
by using vanes · CPC title
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