Coil structure for generating plasma and semiconductor equipment
US-2024339296-A1 · Oct 10, 2024 · US
US9538631B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9538631-B2 |
| Application number | US-201414578758-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 22, 2014 |
| Priority date | Jun 22, 2012 |
| Publication date | Jan 3, 2017 |
| Grant date | Jan 3, 2017 |
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The antenna structure has a high frequency wave transmission line that transmits a high frequency wave and an emission antenna part for emitting the high frequency wave supplied via the high frequency wave transmission line. The emission antenna part includes a metal antenna having a rod-like shape and a ceramic layer that covers at least a part of the metal antenna.
Opening claim text (preview).
What is claimed is: 1. An internal combustion engine comprising: an ignition device disposed in a combustion chamber of the internal combustion engine; and at least one antenna structure disposed in the combustion chamber of the internal combustion engine and provided with a high frequency wave transmission line that transmits a high frequency wave and an emission antenna part for emitting the high frequency wave supplied via the high frequency wave transmission line; wherein the emission antenna part is configured of a metal antenna having a rod-like shape and a ceramic layer that covers at least a part of the metal antenna; and wherein the emission antenna part is disposed so that a tip end of the emission antenna part is placed in the vicinity of the ignition device. 2. The internal combustion engine according to claim 1 , wherein the ignition device comprises an ignition plug, and the emission antenna part of the antenna structure is arranged in the vicinity the ignition plug. 3. The internal combustion engine according to claim 1 , wherein the emission antenna part of the antenna structure is arranged between intake valves and/or between exhaust valves. 4. The internal combustion engine according to claim 1 , wherein the emission antenna part is provided with a brim part.
one of the spark electrodes being mounted on the engine working piston · CPC title
by supplementary electrical discharge in the pre-ionised electrode interspace of the sparking plug, e.g. plasma jet ignition · CPC title
using applied electromagnetic fields, e.g. high frequency or microwave energy (H05H1/26 takes precedence) · CPC title
with feed to end of elongated active element, e.g. unipole (H01Q9/44 takes precedence) · CPC title
using electromagnetic microwaves · CPC title
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