Hardmask composition, hardmask layer, and method of forming patterns
US-2024377746-A1 · Nov 14, 2024 · US
US9537101B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9537101-B2 |
| Application number | US-201514972225-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 17, 2015 |
| Priority date | Sep 26, 2011 |
| Publication date | Jan 3, 2017 |
| Grant date | Jan 3, 2017 |
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An embodiment of the present invention relates to a composition containing a polymer oroligomer (A) having a repeating unit with hole transport properties and also having a thienylgroup which may have a substituent, and an initiator (B), wherein the solubility of the composition is capable of being changed by applying heat, light, or both heat and light.
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The invention claimed is: 1. A composition comprising a polymer or oligomer (A) having a unit with hole transport properties and also having a thienyl group which may have a substituent, and an initiator (B), wherein solubility of the composition is capable of being changed by applying heat, light, or both heat and light, and wherein the polymer or oligomer (A) has at least one type of structure selected from the group consisting of a structure represented by formula (Ia) shown below, and a structure represented by formula (Ib) shown below: wherein, in formulas (Ia) and (Ib), each of R 1 to R 3 independently represents a hydrogen atom or an alkyl group, provided that at least one of R 1 to R 3 represents a hydrogen atom. 2. The composition according to claim 1 , wherein the unit with hole transport properties comprises at least one type of unit selected from the group consisting of a unit containing an aromatic amine structure and a unit containing a carbazole structure. 3. The composition according to claim 1 , wherein the polymer or oligomer (A) has a thienyl group at a terminal thereof. 4. The composition according to claim 1 , wherein the polymer or oligomer (A) has a branched structure and 3 or more terminals, and has a thienyl group at each of 3 or more of all of the terminals. 5. A composition comprising a polymer or oligomer (A) having a unit with hole transport properties and also having a thienyl group which may have a substituent, and an initiator (B), wherein solubility of the composition is capable of being changed by applying heat, light, or both heat and light, and wherein the polymer or oligomer (A) has at least one type of structure selected from the group consisting of a structure represented by formula (IIa), a structure represented by formula (IIb), a structure represented by formula (IIIa), and a structure represented by formula (IIIb), all of which are shown below: wherein, in formulas (IIa) and (IIb), each of R 1 to R 3 independently represents a hydrogen atom or an alkyl group, provided that at least one of R 1 to R 3 represents a hydrogen atom, and Ar a represents an arenediyl group or a heteroarenediyl group, wherein, in formulas (IIIa) and (IIIb), each of R 1 to R 3 independently represents a hydrogen atom or an alkyl group, provided that at least one of R 1 to R 3 represents a hydrogen atom, and Ar b represents an arenetriyl group or a heteroarenetriyl group. 6. The composition according to claim 1 , wherein the initiator (B) is an oxidizing agent. 7. A composition comprising a polymer or oligomer (A) having a unit with hole transport properties and also having a thienyl group which may have a substituent, and an initiator (B), wherein solubility of the composition is capable of being changed by applying heat, light, or both heat and light, and wherein the initiator (B) is an onium salt. 8. The composition according to claim 1 , wherein a weight-average molecular weight of the polymer or oligomer (A) is from 1,000 to 1,000,000. 9. The composition according to claim 1 , further comprising a solvent (C). 10. A hole transport material composition comprising the composition according to claim 1 . 11. An ink composition comprising the composition according to claim 1 . 12. The composition according to claim 7 , wherein the unit with hole transport properties comprises at least one type of unit selected from the group consisting of a unit containing an aromatic amine structure and a unit containing a carbazole structure. 13. The composition according to claim 7 , wherein the polymer or oligomer (A) has at least one type of structure selected from the group consisting of a structure represented by formula (Ia) shown below, and a structure represented by formula (Ib) shown below: wherein, in formulas (Ia) and (Ib), each of R 1 to R 3 independently represents a hydrogen atom or an alkyl group, provided that at least one of R 1 to R 3 represents a hydrogen atom. 14. The composition according to claim 7 , wherein the polymer or oligomer (A) has a thienyl group at a terminal thereof. 15. The composition according to claim 7 , wherein the polymer or oligomer (A) has a branched structure and 3 or more terminals, and has a thienyl group at each of 3 or more of all of the terminals. 16. The composition according to claim 7 , wherein the polymer or oligomer (A) has at least one type of structure selected from the group consisting of a structure represented by formula (IIa), a structure represented by formula (IIb), a structure represented by formula (IIIa), and a structure represented by formula (IIIb), all of which are shown below: wherein, in formulas (IIa) and (IIb), each of R 1 to R 3 independently represents a hydrogen atom or an alkyl group, provided that at least one of R 1 to R 3 represents a hydrogen atom, and Ar a represents an arenediyl group or a heteroarenediyl group, wherein, in formulas (IIIa) and (IIIb), each of R 1 to R 3 independently represents a hydrogen atom or an alkyl group, provided that at least one of R 1 to R 3 represents a hydrogen atom, and Ar b represents an arenetriyl group or a heteroarenetriyl group. 17. The composition according to claim 7 , wherein a weight-average molecular weight of the polymer or oligomer (A) is from 1,000 to 1,000,000. 18. The composition according to claim 7 , further comprising a solvent (C). 19. A hole transport material composition comprising the composition according to claim 7 . 20. An ink composition comprising the composition according to claim 7 .
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