Semiconductor device and method of fabricating the same

Patent metadata

Field	Value
Publication number	US-9536897-B2
Application number	US-201514695249-A
Country	US
Kind code	B2
Filing date	Apr 24, 2015
Priority date	Aug 12, 2014
Publication date	Jan 3, 2017
Grant date	Jan 3, 2017

Abstract

A three-dimensional semiconductor device may include a substrate including a cell array region, a word line contact region, and a peripheral circuit region, gate electrodes stacked on the substrate to extend from the cell array region to the word line contact region, a channel hole penetrating the gate electrodes on the cell array region and exposing an active region of the substrate, a dummy hole penetrating the gate electrodes on the word line contact region and exposing a device isolation layer provided on the substrate, and a semiconductor pattern provided in the channel hole but not in the dummy hole.

First claim

What is claimed is:

1. A three-dimensional semiconductor device, comprising:
a substrate including a cell array region, a word line contact region, and a peripheral circuit region;
gate electrodes stacked on the substrate to extend from the cell array region to the word line contact region;
a vertical channel structure penetrating the gate electrodes on the cell array region and being electrically connected to the substrate;
a semiconductor pattern disposed between the vertical channel structure and the substrate; and
a dummy pillar penetrating the gate electrodes on the word line contact region and being electrically separated from the substrate, the dummy pillar penetrating a lowermost one of the gate electrodes,
wherein the semiconductor pattern penetrates the lowermost one of the gate electrodes and is in contact with the substrate.

2. The device of claim 1 , wherein the substrate comprises a first substrate and a second substrate, and the first substrate is disposed below the second substrate.

3. The device of claim 2 , wherein the first substrate comprises the peripheral circuit region, and the second substrate comprises the cell array region and the word line contact region.

4. The device of claim 1 , wherein the peripheral circuit region comprises a horizontal transistor.

5. The device of claim 1 , wherein horizontal lengths of the gate electrodes decrease with increasing distance from the substrate.

6. The device of claim 1 , wherein the vertical channel structure comprises a gate dielectric pattern, a vertical channel pattern, and an insulating gap-fill pattern.

7. The device of claim 6 , wherein the gate dielectric pattern has a pipe-shaped structure.

8. The device of claim 6 , wherein the gate dielectric pattern comprises a charge blocking layer, a charge storing layer, and a tunnel insulating layer.

9. The device of claim 6 , wherein the vertical channel pattern has a hollow cylindrical shape or a cup shape.

10. The device of claim 6 , wherein the vertical channel pattern is in direct contact with the semiconductor pattern.

11. The device of claim 1 , wherein the dummy pillar is in contact with a device isolation layer, which is on the word line contact region.

12. The device of claim 1 , wherein the dummy pillar comprises a gate dielectric pattern, a vertical channel pattern, and an insulating gap-fill pattern.

13. The device of claim 1 , wherein the vertical channel structure has a bottom surface positioned at a higher level than a bottom surface of the dummy pillar.

14. The device of claim 1 , further comprising:
interconnection plugs electrically connected to the gate electrodes.

15. The device of claim 14 , wherein the interconnection plugs have different vertical lengths from each other.

16. A three-dimensional semiconductor device, comprising:
a substrate including a cell array region, a word line contact region, and a peripheral circuit region;
gate electrodes stacked on the substrate to extend from the cell array region to the word line contact region;
the gate electrodes including a channel hole, the channel hole penetrating the gate electrodes on the cell array region and exposing an active region of the substrate;
the gate electrodes including a dummy hole, the dummy hole penetrating the gate electrodes on the word line contact region and exposing a device isolation layer on the substrate, the dummy hole penetrating a lowermost one of the gate electrodes; and
a semiconductor pattern in the channel hole but not in the dummy hole,
wherein the semiconductor pattern penetrates the lowermost one of the gate electrodes and is in contact with the substrate.

17. The device of claim 16 , wherein the substrate comprises a first substrate and a second substrate, and the first substrate is provided below the second substrate.

18. The device of claim 17 , wherein the first substrate comprises the peripheral circuit region, and the second substrate comprises the cell array region and the word line contact region.

19. A three-dimensional semiconductor device, comprising:
a substrate including a cell array region and a word line contact region;
gate electrodes stacked on the substrate to extend from the cell array region to the word line contact region;
the gate electrodes including a channel hole, the channel hole penetrating the gate electrodes on the cell array region and exposing an active region of the substrate;
the gate electrodes including a dummy hole, the dummy hole penetrating the gate electrodes on the word line contact region and exposing a device isolation layer on the substrate;
a semiconductor pattern and a vertical channel structure in the channel hole; and
a dummy pillar in the dummy hole, the dummy pillar having a bottom surface positioned at a lower level than a bottom surface of the vertical channel structure, the dummy pillar penetrating a lowermost one of the gate electrodes,
wherein the semiconductor pattern penetrates the lowermost one of the gate electrodes and is in contact with the substrate.

Assignees

• Yoo Dongchul
• Kim Chaeho
• Ahn Jaeyoung
• Lee Woong
• Samsung Electronics Co Ltd

Inventors

• Yoo Dongchul
• Kim Chaeho
• Ahn Jaeyoung
• Lee Woong

Classifications

• H01L27/11565

  Electricity · mapped topic

• H01L27/1157

  Electricity · mapped topic

• H01L27/11575

  Electricity · mapped topic

• H01L27/11582 Primary

  Electricity · mapped topic

• H01L27/11573

  Electricity · mapped topic