Method of fabricating a color filter array using a multilevel structure

Patent metadata

Field	Value
Publication number	US-9535315-B2
Application number	US-201114355507-A
Country	US
Kind code	B2
Filing date	Oct 31, 2011
Priority date	Oct 31, 2011
Publication date	Jan 3, 2017
Grant date	Jan 3, 2017

Abstract

A method of fabricating a color filter array including providing substrate, forming a multilevel structure that is attached to the substrate, etching the multilevel structure to expose first wells in the multilevel structure, filling at least the first wells in the multilevel structure with the first color component, curing the first color component, etching the multilevel structure to expose second wells in the multilevel structure, filling at least the second wells in the multilevel structure with a second color component, and curing the second color component.

First claim

What is claimed:

1. A method of fabricating a color filter array, comprising:
providing a substrate:
forming a multilevel structure that is attached to the substrate;
etching the multilevel structure to expose first wells in the multilevel structure;
filling at least the first wells in the multilevel structure with a first color component;
curing the first color component;
etching the multilevel structure to expose second wells in the multilevel structure;
filling at least the second wells in the multilevel structure with a second color component; and
curing the second color component, wherein the providing a substrate comprises providing a clear substrate, depositing a blocking layer on the clear substrate, etching the blocking layer in the first wells prior to the filling at least the first wells, and etching the blocking layer in the second wells prior to the filling at least the second wells, wherein the forming a multilevel structure comprises forming the multilevel structure on the blocking layer, which attaches the multilevel structure to the clear substrate, the curing the first color component comprises exposing the first color component to light through the clear substrate, and the curing the second color component comprises exposing the second color component to light through the clear substrate.

2. The method of claim 1 , comprising:
washing the first color component out of wells other than the first wells after curing the first color component.

3. The method of claim 1 , wherein curing the first color component comprises at least one of exposing the first color component to light and thermally curing the first color component.

4. A method of fabricating a color filter array, comprising:
providing a substrate:
forming a multilevel structure that is attached to the substrate;
etching the multilevel structure to expose first wells in the multilevel structure;
filling at least the first wells in the multilevel structure with a first color component;
curing the first color component;
etching the multilevel structure to expose second wells in the multilevel structure;
filling at least the second wells in the multilevel structure with a second color component; and
curing the second color component, wherein providing a substrate comprises providing a first substrate and a release layer and forming a multilevel structure comprises forming the multilevel structure on the release layer and the method further comprises:
transferring the multilevel structure to a second substrate.

5. A method of fabricating a color filter array, comprising:
providing a substrate:
forming a multilevel structure that is attached to the substrate;
etching the multilevel structure to expose first wells in the multilevel structure;
filling at least the first wells in the multilevel structure with a first color component;
curing the first color component;
etching the multilevel structure to expose second wells in the multilevel structure;
filling at least the second wells in the multilevel structure with a second color component; and
curing the second color component, wherein the providing a substrate comprises:
providing a first conductive layer;
applying a non-conductive layer on the first conductive layer; and
applying a second conductive layer on the non-conductive layer, wherein the forming a multilevel structure comprises forming the multilevel structure on the second conductive layer and the method further comprises:
etching the second conductive layer to fill the first wells after etching the multilevel structure to expose the first wells, wherein filling at least the first wells comprises:
applying an electric field to the first conductive layer, and
applying toner that is the first color component; and

etching the second conductive layer to fill the second wells after etching the multilevel structure to expose the second wells, wherein the filling at least the second wells comprises:
applying an electric field to the first conductive layer; and
applying toner that is the second color component.

6. The method of claim 5 , wherein curing the first color component comprises a low heat thermal curing of the first color component and curing the second color component comprises a low heat thermal curing of the second color component and the method further comprises one high heat thermal curing of all color components.

7. A method of fabricating a color filter array, comprising:
providing a substrate:
forming a multilevel structure that is attached to the substrate;
etching the multilevel structure to expose first wells in the multilevel structure;
filling at least the first wells in the multilevel structure with a first color component;
curing the first color component;
etching the multilevel structure to expose second wells in the multilevel structure;
filling at least the second wells in the multilevel structure with a second color component;
curing the second color component; and
forming a block pattern on the substrate, wherein forming a multilevel structure comprises coating the block pattern and the substrate and the method further comprises:
etching the block pattern after etching the multilevel structure to expose first wells; and
etching the block pattern after etching the multilevel structure to expose second wells.

8. A method of fabricating a color filter array, comprising:
imprinting a multilevel structure via roll-to-roll processing;
etching the multilevel structure to expose wells in the multilevel structure;
filling the wells in the multilevel structure with a color component;
curing the color component; and
depositing a blocking layer on a substrate, wherein the imprinting a multilevel structure comprises imprinting the multilevel structure on the blocking layer and the method further comprises etching the blocking layer after the etching the multilevel structure and prior to the filling the wells.

9. The method of claim 8 , wherein imprinting a multilevel structure comprises:
coating a substrate with a liquid polymer;
pressing the liquid polymer with a stamp; and
curing the liquid polymer to form the multilevel structure.

10. A method of fabricating a color filter array, comprising:
imprinting a multilevel structure via roll-to-roll processing;
etching the multilevel structure to expose wells in the multilevel structure;
filling the wells in the multilevel structure with a color component;
curing the color component; and
providing a first substrate that includes a release layer, wherein the imprinting a multilevel structure comprises imprinting the multilevel structure on the release layer and the method further comprises:
transferring the multilevel structure to a second substrate.

11. A method of fabricating a color filter array, comprising:
imprinting a multilevel structure via roll-to-roll processing;
etching the multilevel structure to expose wells in the multilevel structure;
filling the wells in the multilevel structure with a color component;
curing the color component;
providing a first conductive layer;
applying a non-conductive layer on the first conductive layer; and
applying a second conductive layer on the non-conductive layer, wherein the imprinting a multilevel structure comprises imprinting the multilevel structure on the second conductive layer and the method further comprises:
etching the second conductive layer to fill the wells after the etching the multilevel structure; and
applying an electric field to the first conductive layer to fill the wells.

Assignees

• Taussig Carl P
• Holland Edward Robert
• Mei Ping
• Elder Richard E
• Applied Materials Inc

Inventors

• Taussig Carl P
• Holland Edward Robert
• Mei Ping
• Elder Richard E

Classifications

• G03F7/0002

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title

• G03F7/0007 Primary

  Filters, e.g. additive colour filters; Components for display devices · CPC title

• G02F1/133516

  Methods for their manufacture, e.g. printing, electro-deposition or photolithography · CPC title

• B29D11/0073

  Optical laminates · CPC title

• G02B5/201

  in the form of arrays · CPC title