Magnetic sensor

Patent metadata

Field	Value
Publication number	US-9535139-B2
Application number	US-201214353551-A
Country	US
Kind code	B2
Filing date	Oct 25, 2012
Priority date	Oct 31, 2011
Publication date	Jan 3, 2017
Grant date	Jan 3, 2017

Abstract

A magnetic sensor of the present invention includes a Hall-effect sensor configured to detect magnetism and an IC being configured to drive the Hall-effect sensor and perform signal processing therefor and having two or more metal interconnection layers. The Hall-effect sensor and the IC are electrically connected to each other via wire interconnections and sealed in one package. Metal interconnections on the IC to input output voltage of the Hall-effect sensor to a signal processing unit of the IC have a grade-separation junction portion in order to suppress an induced electromotive force which a change in the magnetic flux density externally applied generates at output terminals of the Hall-effect sensor, the wire interconnections connected to output electrode pads of the Hall-effect sensor, and the metal interconnections to input the output voltage of the Hall-effect sensor to the signal processing unit of the IC.

First claim

The invention claimed is:

1. A magnetic sensor, comprising:
a Hall-effect sensor including a first output electrode pad and a second output electrode pad;
an IC including a first Hall output electrode pad, a second Hall output electrode pad, a signal processing unit, a first metal interconnection connecting the first Hall output electrode pad and the signal processing unit, and a second metal interconnection connecting the second Hall output electrode pad and the signal processing unit;
a first wire interconnection connecting the first output electrode pad of the Hall-effect sensor and the first Hall output electrode pad of the IC; and
a second wire interconnection connecting the second output electrode pad of the Hall-effect sensor and the second Hall output electrode pad of the IC, wherein
the first metal interconnection and the second metal interconnection are formed on the IC such that when the first and second metal interconnections are projected on a plane parallel to a magneto-sensitive surface of the Hall-effect sensor, (1) at least one of the projected first metal interconnection and the projected second metal interconnection crosses itself on the plane, or (2) the projected first metal interconnection and the projected second metal interconnection cross each other on the plane.

2. The magnetic sensor according to claim 1 , wherein a plurality of loops are formed when the first and second output electrode pads of the Hall-effect sensor, the first and second wire interconnections, the first and second Hall output electrode pads of the IC, the signal processing unit of the IC, and the first and second metal interconnections of the IC are projected on a plane parallel to a magneto-sensitive surface of the Hall-effect sensor, at least one loop from the plurality of loops generating an induced electromotive force of the same polarity as that of an output voltage of the Hall-effect sensor, and at least one loop from the plurality of loops generating an induced electromotive force of an opposite polarity as that of the output voltage of the Hall-effect sensor.

3. The magnetic sensor according to claim 2 , wherein a total area of a loop from the plurality of loops that generates an induced electromotive force of the same polarity as that of the output voltage of the Hall-effect sensor is equal to a total area of a loop from the plurality of loops that generates an induced electromotive force of an opposite polarity as that of the output voltage of the Hall-effect sensor.

4. The magnetic sensor according to claim 2 , wherein an absolute value of a difference [unit: m 2 ] between a total area of any loop from the plurality of loops that generates an induced electromotive force of the same polarity as that of the output voltage of the Hall-effect sensor and a total area of any loop from the plurality of loops that generates an induced electromotive force of an opposite polarity as that of the output voltage of the Hall-effect sensor is not larger than a value [unit: m 2 ] obtained by dividing a product of (1) 0.1, (2) a sensitivity of a Hall-effect element [unit: V·m 2 /Wb], and (3) a maximum magnetic flux density applied [unit: Wb/m 2 ], by a time derivative [unit: Wb/m 2 ·s] of a magnetic flux density applied.

5. The magnetic sensor according to claim 1 , wherein at least one of the first metal interconnection and the second metal interconnection is formed by use of two or more metal interconnection layers.

6. The magnetic sensor according to claim 1 , wherein a polarity total induced electromotive force generated by a change in a magnetic flux density externally applied is the same as a polarity of an output voltage of the Hall-effect sensor.

7. The magnetic sensor according to claim 1 , wherein it takes 2 μs or less for an output voltage of the Hall-effect sensor to stabilize after a magnetic flux density applied to the magnetic sensor stabilizes.

8. The magnetic sensor according to claim 1 , wherein the Hall-effect sensor is made of a compound semiconductor.

9. The magnetic sensor according to claim 1 , wherein the first metal interconnection is formed by use of an uppermost metal interconnection layer from a plurality of metal interconnection layers on the IC, and the second metal interconnection is formed by use of a lowermost metal interconnection layer from the plurality of metal interconnection layers on the IC.

Assignees

• Asahi Kasei Microdevices Corp

Inventors

• Nishida Sosuke
• Takatsuka Toshinori

Classifications

• H01L43/06

  Electricity · mapped topic

• G01R33/07 Primary

  Hall effect devices · CPC title

• H01L43/04

  Electricity · mapped topic

• G01R33/072

  Constructional adaptation of the sensor to specific applications · CPC title

• G01R15/202

  using Hall-effect devices (Hall elements in arrangements for measuring electrical power G01R21/08) · CPC title