Eddy current sensor, eddy current sensor assembly, and polishing apparatus
US-2024399536-A1 · Dec 5, 2024 · US
US9534932B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9534932-B2 |
| Application number | US-201414200926-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 7, 2014 |
| Priority date | Mar 7, 2014 |
| Publication date | Jan 3, 2017 |
| Grant date | Jan 3, 2017 |
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An XMR angle sensor arrangement with a safety mechanism comprises an XMR angle sensor having a sensing area for sensing an in-plane magnetic field and for outputting a sensor signal based on the in-plane magnetic field component sensed in the sensing area; a permanent magnet, which is rotatably arranged with respect to the XMR angle sensor to generate a first in-plane magnetic field component in the sensing area of the XMR angle sensor; an excitation current rail path, which is arranged proximate to the sensing area of the XMR angle sensor; and an excitation current provider configured to provide the excitation current rail path with an excitation signal having a excitation signal strength, wherein the excitation signal strength of the excitation signal is chosen to generate a second in-plane magnetic field component in the sensing area of the XMR angle sensor which results, due to a super position of the first and second in-plane magnetic field components, in an expected change of the direction of the resulting in-plane magnetic field component, wherein the XMR angle sensor arrangement is correctly functioning when the sensed change of direction of the resulting in-plane magnetic field component due to the excitation signal corresponds to the expected change of direction of the resulting in-plane magnetic field component.
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The invention claimed is: 1. XMR angle sensor arrangement comprising: an XMR angle sensor having a sensing area for sensing an in-plane magnetic field and for outputting a sensor signal based on the in-plane magnetic field component sensed in the sensing area, a permanent magnet, which is rotatably arranged with respect to the XMR angle sensor to generate a first in-plane magnetic field component in the sensing area of the XMR angle sensor, an excitation current rail path, which is arranged proximate to the sensing area of the XMR angle sensor, an excitation current provider configured to provide the excitation current rail path with an excitation signal having an excitation signal strength, wherein the excitation signal strength of the excitation signal is chosen to generate a second in-plane magnetic field component in the sensing area of the XMR angle sensor which results, due to a super-position of the first and second in-plane magnetic field components, in an expected change of the direction of the resulting in-plane magnetic field component, wherein the XMR angle sensor arrangement is correctly functioning when the sensed change of direction of the resulting in-plane magnetic field component due to the excitation signal corresponds to the expected change of direction of the resulting in-plane magnetic field component. 2. The sensor arrangement of claim 1 , further comprising: a processing circuit configured to evaluate the correct functioning of the XMR angle sensor arrangement based on the output signal of the XMR angle sensor. 3. The sensor arrangement of claim 2 , wherein the processing circuit is configured to compare the sensed change of direction of the resulting in-plane magnetic field component due to the excitation signal with the expected change of direction of the resulting in-plane magnetic field component, and to provide a comparison result having an indication of the correct functioning or of a malfunction of the XMR angle sensor arrangement. 4. The sensor arrangement of claim 2 , wherein the excitation current provider comprises a control circuit which is configured to activate the supply of the excitation current pulse to the excitation current rail path, the sensor arrangement further comprising: a microprocessor for controlling and monitoring the operation of the XMR angle sensor, wherein the processing circuit and the control circuit are part of the microprocessor. 5. The sensor arrangement of claim 1 , wherein excitation current provider comprises a control circuit which is configured to activate the supply of the excitation current pulse to the excitation current rail path. 6. The sensor arrangement of claim 1 , wherein the excitation current rail path extends between an input contact and an output contact of the rail path, and wherein the excitation current rail path runs through a rail path position which is vertically offset to the sensing area of the XMR angle sensor. 7. The sensor arrangement of claim 6 , wherein the excitation current rail path is electrically isolated from the sensor elements in the sensing area of the XMR angle sensor. 8. The sensor arrangement of claim 1 , wherein the excitation current rail path comprises a first rail path section and a second rail path section, wherein the first rail path section extends between a first input contact and a first output contact, and the second rail path section extends between a second input contact and a second output contact, wherein the first and second rail path sections cross the rail path position in an orthogonal direction to each other. 9. The sensor arrangement of claim 8 , wherein the first and the second rail path sections are electrically coupled. 10. The sensor arrangement of claim 1 , wherein the excitation current rail path comprises a conductor trace on a printed circuit board (PCB), and wherein the XMR angle sensor is a chip package device mounted on the printed circuit board. 11. The sensor arrangement of claim 10 , wherein the XMR angle sensor is a surface mount device (SMD). 12. The sensor arrangement of claim 1 , wherein the XMR angle sensor is a chip package device with a conducting lead frame structure, wherein the excitation current rail path is formed by a conducting portion of the lead frame structure. 13. The sensor arrangement of claim 1 , wherein the excitation current rail path comprises a conductor trace in a first plane on a semiconductor chip, wherein the XMR sensor elements in the sensing area are formed in a second plane on the semiconductor chip vertically offset to the first plane, wherein the XMR sensor elements and the excitation current rail path are vertically stacked on the semiconductor chip in an at least partially overlaying configuration. 14. The sensor arrangement of claim 13 , wherein the XMR sensor elements in the sensing area form a half-bridge circuit with a first magnetoresistive sensor element MR 1 and a second magnetoresistive sensor element MR 2 , the first and second magnetoresistive sensor elements MR 1 , MR 2 have opposing reference magnetizations, wherein the first and second magnetoresistive sensor elements have a meander structure with longitudinal meander portions, wherein the current direction in the excitation current rail path is concordantly orthogonal to the respective reference magnetization of the first and second magnetoresistive elements MR 1 , MR 2 . 15. The sensor arrangement of claim 14 , wherein the sensor elements of the XMR angle sensor form a further half bridge circuit with a third magnetoresistive sensor element MR 3 and a fourth magnetoresistive sensor element MR 4 , the third and fourth magnetoresistive sensor elements MR 3 , MR 4 have opposing reference magnetizations, wherein the third and fourth magnetoresistive sensor elements have a meander structure with longitudinal meander portions, wherein the current direction in the excitation current rail path is concordantly orthogonal to the respective reference magnetization of the third and fourth magnetoresistive elements MR 3 , MR 4 . 16. The sensor arrangement of claim 1 , wherein the current provider comprises a plurality of switches to connect the input contact during an excitation current pulse with an excitation potential and the output contact with a reference potential. 17. The sensor arrangement of claim 16 , wherein the switches comprise CMOS transistors. 18. The sensor arrangement of claim 16 , wherein the control circuit is configured to control the switches and to activate the excitation signal provided to the excitation current rail path. 19. The sensor arrangement of claim 1 , wherein the excitation current rail path utilizes the magnetic line coupling principle for the current path selection. 20. Method for monitoring the functionality of an XMR angle sensor arrangement, the method comprising: generating a first in-plane magnetic field component with a permanent magnet in the sensing area of the XMR angle sensor, generating a second in-plane magnetic field component in the sensing area of the XMR angle sensor by providing an excitation current rail path with an excitation signal having an excitation signal strength, wherein the excitation signal strength of the excitation signal is chosen to generate the second in-plane magnetic field component in the sensing area of the XMR angle sensor which results, due to a super-position of the first and second in-plane magnetic field components, in an expected change of the direction of the resulting in-plane magnetic field component, sensing
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