Thermally conductive silicone composition, production method thereof, and semiconductor device
US-12104113-B2 · Oct 1, 2024 · US
US9533919B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9533919-B2 |
| Application number | US-201113271294-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 12, 2011 |
| Priority date | Oct 12, 2011 |
| Publication date | Jan 3, 2017 |
| Grant date | Jan 3, 2017 |
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A method for fabricating a ceramic material includes impregnating a porous structure with a mixture that includes a preceramic polymer and a filler. The filler includes at least one free metal. The preceramic polymer material is then rigidized to form a green body. The green body is then thermally treated to convert the rigidized preceramic polymer material into a ceramic matrix located within pores of the porous structure. The same thermal treatment or a second, further thermal treatment is used to cause the at least one free metal to move to internal porosity defined by the ceramic matrix or pores of the porous structure.
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What is claimed is: 1. A ceramic component comprising: a porous structure; a polymer-derived ceramic matrix within pores of the porous structure, the polymer-derived ceramic matrix defining closed internal pores from a conversion of polymer to ceramic to form the polymer-derived ceramic matrix; and at least one of a free metal and a free metal-derived compound within the closed internal pores of the polymer-derived ceramic matrix. 2. The ceramic component as recited in claim 1 , wherein the porous structure comprises a fibrous structure. 3. The ceramic component as recited in claim 1 , wherein the at least one free metal comprises silicon. 4. The ceramic component as recited in claim 1 , wherein the at least one free metal is selected from a group consisting of boron, titanium, vanadium, chromium, zirconium, niobium, molybdenum, ruthenium, rhodium, hafnium, tantalum, tungsten, rhenium, osmium, iridium and combinations thereof. 5. The ceramic component as recited in claim 1 , including ceramic particles within the polymer-derived ceramic matrix, and the free metal or the free metal-derived compound coats the ceramic particles. 6. The ceramic component as recited in claim 1 , including the free metal-derived compound, and the free metal-derived compound includes a metal silicide. 7. The ceramic component as recited in claim 6 , wherein the metal silicide is selected from a group consisting of titanium silicide, chromium silicide, zirconium silicide, hafnium silicide, niobium silicide, tantalum silicide, tungsten silicide, molybdenum silicide and combinations thereof. 8. The ceramic component as recited in claim 1 , wherein the closed internal pores are not surface connected. 9. The ceramic component as recited in claim 1 , wherein the closed internal pores are not interconnected. 10. The ceramic component as recited in claim 1 , wherein the closed internal pores are micro-cracks. 11. The ceramic component as recited in claim 1 , including the free metal within the internal pores of the polymer-derived ceramic matrix, and the free metal includes titanium. 12. The ceramic component as recited in claim 1 , including the free metal within the internal pores of the polymer-derived ceramic matrix, and the free metal is selected from the group consisting of vanadium, zirconium, niobium, and combinations thereof. 13. The ceramic component as recited in claim 1 , including the free metal within the internal pores of the polymer-derived ceramic matrix, and the free metal includes molybdenum. 14. The ceramic component as recited in claim 1 , including the free metal within the internal pores of the polymer-derived ceramic matrix, and the free metal is selected from the group consisting of ruthenium, rhodium, and combinations thereof. 15. The ceramic component as recited in claim 1 , including the free metal within the internal pores of the polymer-derived ceramic matrix, and the free metal includes hafnium. 16. The ceramic component as recited in claim 1 , including the free metal within the internal pores of the polymer-derived ceramic matrix, and the free metal includes tungsten. 17. The ceramic component as recited in claim 1 , including the free metal within the internal pores of the polymer-derived ceramic matrix, and the free metal is selected from the group consisting of tantalum, rhenium, osmium, iridium, and combination thereof. 18. A ceramic component a porous structure; a polymer-derived ceramic matrix within pores of the porous structure, the polymer-derived ceramic matrix defining internal pores from a conversion of polymer to ceramic to form the polymer-derived ceramic matrix; and at least one of a free metal and a free metal-derived compound within the internal pores of the polymer-derived ceramic matrix, wherein the ceramic component has a composition, by volume percentage, of: 20-70 of the porous structure, 1-12 of a coating on the porous structure, and 1-40 of a remainder portion, different from the coating, including the at least one of the free metal and the free-metal derived compound, the polymer-derived ceramic matrix and any residual void volume, wherein on a fractional basis 10-100% of the 1-40 volume percent is the at least one of the free metal and the free-metal derived compound and the balance of the 1-40 volume percent is the polymer-derived ceramic matrix and residual void volume, wherein the residual void volume is less than 20. 19. The ceramic component as recited in claim 18 having the composition, by volume percentage, of: 30-50 of the porous structure, 2-5 of the coating, and 2-26 of the remainder portion.
Carbon, e.g. graphite · CPC title
Inorganic · CPC title
Metallic constituents or additives not added as binding phase · CPC title
Silicon · CPC title
Phases present in the sintered or melt-cast ceramic products other than the main phase · CPC title
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