Patterned structures of graphene and graphitic carbon and methods for their manufacture

Patent metadata

Field	Value
Publication number	US-9533887-B1
Application number	US-201313790524-A
Country	US
Kind code	B1
Filing date	Mar 8, 2013
Priority date	Mar 8, 2013
Publication date	Jan 3, 2017
Grant date	Jan 3, 2017

Abstract

A patterned graphene or graphitic body is produced by providing a three-dimensionally patterned carbonaceous body; coating the body with a catalytic metal whereby is formed a coating having an inner surface proximal the body and an outer surface distal the body; and annealing the coated body under time and temperature conditions effective to form a graphene or graphitic layer on the outer surface of the catalytic metal coating.

First claim

The invention claimed is:

1. A method, comprising:
providing a three-dimensionally patterned carbonaceous body;
coating the body with a catalytic metal whereby is formed a coating having an inner surface proximal the body and an outer surface distal the body; and
annealing the coated body to form a graphene or graphitic layer on the outer surface of the catalytic metal coating.

2. The method of claim 1 , wherein the providing step comprises patterning a precursor body and pyrolyzing the patterned precursor body.

3. The method of claim 2 , wherein the precursor body comprises a photoresist or photopatternable material and the patterning step is performed lithographically.

4. The method of claim 3 , wherein the patterning step is performed by interference lithography so as to create an interconnected three-dimensional pattern in the photoresist.

5. The method of claim 3 , wherein the patterning step is performed by direct laser writing.

6. The method of claim 1 , further comprising etching away at least a portion of the catalytic metal coating.

7. The method of claim 1 , wherein the catalytic metal comprises at least one of copper, nickel, and ruthenium.

8. A method for forming a three-dimensional graphene or graphitic structure, comprising:
three-dimensionally patterning a source of sacrificial carbon to correspond to a desired shape of the graphene or graphitic structure; and
diffusing carbon from the source through a coating of catalytic metal deposited on a surface of the source.

Assignees

• Sandia Corp

Inventors

• Polsky Ronen
• Xiao Xiaoyin
• Burckel David Bruce
• Wheeler David R
• Brozik Susan M
• Beechem Thomas Edwin

Classifications

• C01B32/184 Primary

  Preparation · CPC title

• C01B32/205

  Preparation · CPC title

• C01P2004/30

  extending in three dimensions · CPC title

• C01B31/0446

  Chemistry & Metallurgy · mapped topic

• C01B31/04 Primary

  Chemistry & Metallurgy · mapped topic