Device for supplying voltage to the cathode of a mass spectrometer

Patent metadata

Field	Value
Publication number	US-9530634-B2
Application number	US-201314381171-A
Country	US
Kind code	B2
Filing date	Feb 22, 2013
Priority date	Feb 29, 2012
Publication date	Dec 27, 2016
Grant date	Dec 27, 2016

Abstract

A simplified device for voltage supply of the cathode of a mass spectrometer comprises a push-pull transformer, wherein, apart from the normal rectifier diodes ( 7, 9 ), a controlled rectifier ( 8, 10 ) is provided. The gate of the first transistor ( 8 ) is connected to the second output ( 30 ), and the gate of the second transistor ( 10 ) is connected to the first output ( 32 ) of the transformer. A voltage supply device, consisting of at least one voltage multiplier, is connected via capacitors ( 13, 14, 15 ) to the output of the transformer and feeds, amongst others, the emission current measurement device.

First claim

The invention claimed is:

1. A device for voltage supply of the cathode of a mass spectrometer, said device comprising
a transformer supplied by an input voltage, said transformer having at least one first output and a second output and an output-side intermediate connector,
at least two diodes being connected, via their mutually corresponding connectors, i.e. the cathodes or the anodes, to different ones of the outputs of the transformer, the connector of the first diode being connected to the first output and the connector of the second diode being connected to the second output, and there being provided, for each diode, a first and respectively second transistor connected parallel to the respective diode, and a source connector of each transistor being connected to that connector of the corresponding diode which is arranged opposite to the transformer,
wherein a gate of the first transistor is connected to the second output and a gate of the second transistor is connected to the first output of the transformer,
wherein a direct current (DC) voltage is generated by applying at least one voltage multiplier to an output voltage of one or more of the following: the first output and the second output of the transformer.

2. The device according to claim 1 , wherein a drain connector of the first transistor is connected to the first output and a drain connector of the second transistor is connected to the second output of the transformer.

3. The device according to claim 1 , wherein a low-pass consisting of a smoothing capacitor and a choke coil is provided between the output-side intermediate connector of the transformer and the source connectors of the transistors.

4. The device according to claim 1 , wherein the device, for feeding two cathodes, is provided with a respective output for each of said two cathodes, wherein a third and a fourth transistors for alternately driving the two cathode connectors are connected to the transformer.

5. The device according to claim 4 , wherein each cathode connector is connected to the source connector of at least one of the third or fourth transistors, wherein one of the third or fourth transistors drives the associated cathode connector exactly when the transistor voltage applied to the respective gate connector exceeds the cathode voltage applied to the source connector.

6. The device according to claim 1 , wherein said at least one voltage multiplier, consisting of at least two rectifiers, is connected via a separation capacitor to one of the two output connectors of the transformer, thus providing an active path, and is connected via a capacitor to the connectors of the diodes which are arranged opposite to the transformer, thus providing a reference path.

7. The device according to claim 1 , wherein said DC voltage serves for one or more of the following: feeding a voltage supply device generating the gate voltage of a third and fourth transistor, feeding a voltage supply device generating the anode voltage of the mass spectrometer, feeding a measurement circuit for measuring the emission current of the respective activated cathode, wherein the third and fourth transistors for alternately driving the two cathode connectors are connected to the transformer.

8. The device according to claim 1 , wherein a measurement circuit for measuring the emission current of the respective activated cathode is provided in the form of a pulse width modulator.

9. The device according to claim 8 , wherein the emission current is decreasing across two first resistors which are connected in series between the intermediate connector and those connectors of the two diodes which are arranged opposite to the transformer, and is provided to the measurement circuit via two resistors connected in series to each other and in parallel to the first resistors.

Assignees

• Inficon Gmbh

Inventors

• Rolff Norbert

Classifications

• H01J49/10

  Ion sources; Ion guns · CPC title

• H01J49/02

  Details · CPC title

• H01J49/022 Primary

  Circuit arrangements, e.g. for generating deviation currents or voltages (regulating electric or magnetic variables in general, e.g. current, magnetic field G05F); Components associated with high voltage supply (high voltage supply per se H02M) · CPC title