Method and device for polymerizing a composition comprising hydridosilanes and subsequently using the polymers to produce silicon-containing layers
US-2016297997-A1 · Oct 13, 2016 · US
US9528028B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9528028-B2 |
| Application number | US-201414264448-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 29, 2014 |
| Priority date | Apr 30, 2013 |
| Publication date | Dec 27, 2016 |
| Grant date | Dec 27, 2016 |
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A method for preparing a modified silica film includes preparing a reactive fluorine-containing polymer solution by dissolving a reactive fluorine-containing polymer including a bonding group bondable to polysilazane in a fluorine-containing solvent, preparing a polysilazane solution by dissolving polysilazane in a solvent for polysilazane, the solvent for polysilazane being immiscible with the fluorine-containing solvent and exhibiting a higher surface tension than the reactive fluorine-containing polymer and the fluorine-containing solvent, preparing a coating liquid by mixing the polysilazane solution with the reactive fluorine-containing polymer solution, forming a coating layer by coating the coating liquid onto a substrate, removing the solvent for polysilazane and the fluorine-containing solvent from the coating layer, and converting the polysilazane into silica while bonding the bonding group of the reactive fluorine-containing polymer to the polysilazane.
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What is claimed is: 1. A method for preparing a modified silica film, the method comprising: providing a reactive fluorine-containing polymer solution, the reactive fluorine-containing solution including a fluorine-containing solvent and a reactive fluorine-containing polymer including a bonding group bondable to polysilazane, the reactive fluorine-containing polymer being dissolved in the fluorine-containing solvent; providing a polysilazane solution, the polysilazane solution including a polysilazane and a solvent for polysilazane, the solvent for polysilazane being immiscible with the fluorine-containing solvent and exhibiting a higher surface tension than the reactive fluorine-containing polymer and a higher surface tension than the fluorine-containing solvent, the polysilazane being dissolved in the solvent for polysilazane; preparing a coating liquid by mixing the polysilazane solution with the reactive fluorine-containing polymer solution; forming a coating layer by coating the coating liquid onto a substrate; removing the solvent for polysilazane and the fluorine-containing solvent from the coating layer; and converting the polysilazane into silica while bonding the bonding group of the reactive fluorine-containing polymer to the polysilazane. 2. The method as claimed in claim 1 , wherein a difference in surface tension calculated by subtracting a larger surface tension of two surface tensions of the reactive fluorine-containing polymer and the fluorine-containing solvent from surface tension of the solvent for polysilazane is about 5 mN/m or more. 3. The method as claimed in claim 1 , wherein the solvent for polysilazane is a hydrophobic and non-polar organic solvent. 4. The method as claimed in claim 3 , wherein the solvent for polysilazane includes at least one selected from the group of dibutylether, xylene, mineral turpentine, petroleum hydrocarbons, and aromatic hydrocarbons with a high boiling point. 5. The method as claimed in claim 1 , wherein the fluorine-containing solvent includes a hydrofluoroether. 6. The method as claimed in claim 1 , wherein a weight ratio of the polysilazane to the reactive fluorine-containing polymer in the coating liquid ranges from about 99:1 to about 90:10. 7. The method as claimed in claim 1 , wherein the reactive fluorine-containing polymer solution includes about 1 wt % to about 30 wt % of the reactive fluorine-containing polymer based on a total weight of the reactive fluorine-containing polymer solution. 8. The method as claimed in claim 1 , wherein the fluorine-containing solvent has a boiling point of about 61° C. or more. 9. A coating liquid, comprising: polysilazane, a reactive fluorine-containing polymer, a solvent for polysilazane, and a fluorine-containing solvent, wherein a difference in surface tension calculated by subtracting a larger surface tension of the surface tension of the reactive fluorine-containing polymer and the surface tension of the fluorine-containing solvent from surface tension of the solvent for polysilazane is about 5 mN/m or more. 10. The coating liquid as claimed in claim 9 , wherein the solvent for polysilazane is a hydrophobic and non-polar organic solvent. 11. The coating liquid as claimed in claim 9 , wherein the solvent for polysilazane includes at least one selected from the group of dibutylether, xylene, mineral turpentine, petroleum hydrocarbons, and aromatic hydrocarbons with a high boiling point. 12. The coating liquid as claimed in claim 9 , wherein the fluorine-containing solvent includes a hydrofluoroether. 13. The coating liquid as claimed in claim 9 , wherein the fluorine-containing solvent has a surface tension of about 15 mN/m or less and a boiling point of about 61° C. or more. 14. The coating liquid as claimed in claim 9 , further comprising an amine catalyst. 15. The coating liquid as claimed in claim 9 , wherein a weight ratio of the polysilazane to the reactive fluorine-containing polymer in the coating liquid ranges from about 99:1 to about 90:10. 16. The coating liquid as claimed in claim 9 , wherein the reactive fluorine-containing polymer solution includes about 1 wt % to about 30 wt % of the reactive fluorine-containing polymer based on a total weight of the reactive fluorine-containing polymer solution. 17. A modified silica film prepared by the method for preparing a modified silica film as claimed in claim 1 . 18. The modified silica film as claimed in claim 17 , wherein a difference in surface tension calculated by subtracting a larger surface tension of two surface tensions of the reactive fluorine-containing polymer and the fluorine-containing solvent from surface tension of the solvent for polysilazane is about 5 mN/m or more. 19. The modified silica film as claimed in claim 17 , wherein the fluorine-containing solvent includes a hydrofluoroether. 20. The modified silica film as claimed in claim 17 , wherein the fluorine-containing solvent has a boiling point of 61° C. or more.
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