Carousel carrier for a vacuum treatment installation

Patent metadata

Field	Value
Publication number	US-9527179-B2
Application number	US-201214345492-A
Country	US
Kind code	B2
Filing date	Aug 29, 2012
Priority date	Sep 19, 2011
Publication date	Dec 27, 2016
Grant date	Dec 27, 2016

Abstract

A vacuum treatment installation having carousel carriers, in which the carousel drive is arranged on the wall that is located opposite the door of the vacuum treatment installation. In this way, the coupling of the carousel of the carousel carrier to the carousel drive is ensured without any further mechanism.

First claim

What is claimed is:

1. Vacuum treatment installation with a vacuum chamber ( 303 ) and a carousel carrier ( 201 ) with a carousel ( 205 ), wherein the vacuum chamber ( 303 ) has a door ( 305 ) and a carousel drive ( 101 ),
characterized in that the carousel drive ( 101 ) is a peripheral drive which is provided on an inner wall of the vacuum chamber ( 303 ) opposite the door ( 305 ),
characterized in that in the vacuum chamber ( 303 ) at least one rear stopper ( 309 ) and at least one front stopper ( 311 ) are provided which ensure that when the carousel carrier ( 201 ) is fully inserted into the vacuum chamber ( 303 ) and the door ( 305 ) is closed, the carousel drive ( 101 ) is operably connected with the carousel ( 205 ) and ready for operation, and
characterized in that the carousel drive ( 101 ) has a gear rim ( 103 ) and the carousel ( 205 ) has an outer gear rim ( 207 ) so that when the carousel carrier ( 201 ) is fully inserted into the vacuum chamber ( 303 ) and the door ( 205 ) is closed, the gear rim ( 103 ) of the carousel drive engages in the outer gear rim ( 207 ) of the carousel ( 205 ).

2. Vacuum treatment installation with a vacuum chamber ( 303 ) and a carousel carrier ( 201 ) with a carousel ( 205 ), wherein the vacuum chamber ( 303 ) has a door ( 305 ) and a carousel drive ( 101 ),
characterized in that the carousel drive ( 101 ) is a peripheral drive which is provided on an inner wall of the vacuum chamber ( 303 ) opposite the door ( 305 ),
characterized in that in the vacuum chamber ( 303 ) at least one rear stopper ( 309 ) and at least one front stopper ( 311 ) are provided which ensure that when the carousel carrier ( 201 ) is fully inserted into the vacuum chamber ( 303 ) and the door ( 305 ) is closed, the carousel drive ( 101 ) is operably connected with the carousel ( 205 ) and ready for operation, and
characterized in that the at least one front stopper ( 311 ) is designed in a movable, preferably swiveling fashion so that the at least one front stopper ( 311 ) can be swiveled out of the way when the carousel carrier ( 201 ) is inserted and at least one front stopper ( 311 ) can be placed between the door ( 305 ) and the carousel carrier ( 201 ) when the door ( 205 ) is closed, so that the carousel carrier ( 201 ) is fastened in the vacuum chamber ( 303 ).

Assignees

• Gwehenberger Juergen
• Oerlikon Surface Solutions Ag Pfaffikon

Inventors

• Gwehenberger Juergen

Classifications

• C23C16/4584

  the substrate being rotated · CPC title

• C23C16/4585

  Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds · CPC title

• C23C14/505 Primary

  for rotation of the substrates · CPC title

• C23C16/458

  characterised by the method used for supporting substrates in the reaction chamber · CPC title

• B23Q3/00

  Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine (work-tables or other parts, e.g. faceplates, normally not incorporating means for securing work B23Q1/00; automatic position control B23Q15/00 {; food cutting boards A47J47/00; workpiece support for dies B21D37/02}; rotary tool heads for turning-machines B23B3/24, B23B3/26; non-driven tool holders B23B29/00; general features of turrets B23B29/24 {; drawbars in spindles B23B31/261; for electrical discharge machining B23H11/003; for welding B23K37/04; means for securing grinding wheels B24B45/00; mountings for abrasive wheels B24D5/16}; tools or bench devices for fastening, connecting, disengaging or holding B25B {; chucks for percussive tools B25D17/084; work benches for manual work B25H1/00; devices for securing circular saw blades B27B5/32; for assembling or manufacturing aircrafts B64F5/10; devices for holding circuit boards H05K13/0061; for holding semiconductors or wafers H10P72/00}) · CPC title