Sensor with movable part and biasing

Patent metadata

Field	Value
Publication number	US-9525925-B2
Application number	US-201113035896-A
Country	US
Kind code	B2
Filing date	Feb 25, 2011
Priority date	Feb 25, 2011
Publication date	Dec 20, 2016
Grant date	Dec 20, 2016

Abstract

Methods and apparatuses are provided wherein a sensor which comprises at least two electrodes and a movable part is alternately biased with at least two different voltages.

First claim

What is claimed is:

1. An apparatus, comprising:
a sensor comprising a movable part and at least two electrodes; and
biasing circuitry configured to alternately apply at least one first voltage and at least one second voltage to the at least two electrodes, the first voltage having a magnitude being different than a magnitude of the second voltage.

2. The apparatus of claim 1 , wherein applying said at least one first voltage is associated with a stable state of said movable part and applying said at least one second voltage is associated with an unstable state of said movable part.

3. The apparatus of claim 1 , further comprising a feedback path from an output of said sensor to said biasing circuitry, said biasing circuitry being configured to provide said at least one first voltage and said at least one second voltage depending on a signal received via said feedback path.

4. The apparatus of claim 1 , wherein said sensor comprises at least one of a microphone, an accelerometer, or a gyroscope.

5. The apparatus of claim 1 , wherein said sensor is implemented as a microelectromechanical system.

6. The apparatus of claim 1 , wherein said at least two electrodes comprise a first plate and a second plate, and wherein said movable part comprises a membrane suspended between said first plate and said second plate.

7. A method, comprising:
providing a sensor comprising a movable part arranged between at least two electrodes, and
alternately switching a first biasing voltage, applied directly to said movable part, between at least two different values, or alternately switching a second biasing voltage, applied to at least one electrode, of the at least two electrodes associated with said movable part, between at least two different values.

8. The method of claim 7 , wherein said switching of said first biasing voltage or said second biasing voltage comprises switching said sensor between a stable state and an unstable state.

9. The method of claim 7 , further comprising providing said first biasing voltage or said second biasing voltage based on an output of said sensor.

10. The method of claim 7 , further comprising,
generating a first feedback signal based on a first amplification of an output of said sensor; and
generating a second feedback signal based on a second amplification of said output of said sensor,
said second amplification being different from said first amplification.

11. The method of claim 7 , wherein said sensor comprises at least one of a microphone, an accelerometer, or a gyroscope.

Assignees

• Wurzinger Christoph Bernhard
• Ceballos Jose Luis
• Infineon Technologies Ag

Inventors

• Wurzinger Christoph Bernhard
• Ceballos Jose Luis

Classifications

• H04R19/04 Primary

  Microphones (H04R19/01 takes precedence) · CPC title

• H04R19/005

  using semiconductor materials · CPC title

• G01C19/5776

  Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719 · CPC title

• H04R1/04 Primary

  Structural association of microphone with electric circuitry therefor (in electric hearing aids H04R25/00) · CPC title

• H04R3/00

  Circuits for transducers (arrangements for producing a reverberation or echo sound G10K15/08; amplifiers H03F) · CPC title