Piezoelectric material, piezoelectric element, multilayered piezoelectric element. Liquid discharge heard, liquid discharge apparatus, ultrasonic motor, optical apparatus, vibratory apparatus, dust removing device, image pickup apparatus, and electronic equipment

Patent metadata

Field	Value
Publication number	US-9525123-B2
Application number	US-201314439215-A
Country	US
Kind code	B2
Filing date	Oct 23, 2013
Priority date	Nov 2, 2012
Publication date	Dec 20, 2016
Grant date	Dec 20, 2016

Abstract

There is provided a lead-free piezoelectric material having a high and stable piezoelectric constant and mechanical quality factor in a wide operating temperature range.
A piezoelectric material mainly composed of a perovskite type metal oxide having the general formula (1), wherein manganese is incorporated in the metal oxide, and the Mn content is 0.12 parts by weight or more and 0.40 parts by weight or less on a metal basis per 100 parts by weight of the metal oxide.

(Ba 1-x Ca x ) a (Ti 1-y-z Sn y Zr z )O 3   (1)
(1.00≦a≦1.01, 0.125≦x≦0.300, 0<y≦0.020, and 0.041≦z≦0.069).

First claim

The invention claimed is:

1. A piezoelectric material comprising
a perovskite type metal oxide having the general formula (1); and
a Mn content,
wherein the Mn content is 0.12 parts by weight or more and 0.40 parts by weight or less on a metal basis per 100 parts by weight of the metal oxide
(Ba 1-x Ca x ) a (Ti 1-y-z Sn y Zr z )O 3   (1)

wherein 1.00≦a≦1.01, 0.125≦x≦0.300, 0<y≦0.020, and 0.041≦z≦0.069.

2. The piezoelectric material according to claim 1 , wherein z in the general formula (1) is equal to or less than −2y+0.100.

3. The piezoelectric material according to claim 1 , wherein the piezoelectric material has no structural phase transition temperature in the range of −25° C. to 100° C.

4. The piezoelectric material according to claim 1 , wherein the piezoelectric material contains crystal grains having an average equivalent circular diameter of 1 μm or more and 10 μm or less.

5. The piezoelectric material according to claim 1 , wherein the piezoelectric material has a relative density of 93% or more and 100% or less.

6. The piezoelectric material according to claim 1 , wherein 100 parts by weight of the piezoelectric material contains 0.10 parts by weight or less of Mg on a metal basis as an auxiliary component.

7. A piezoelectric element, comprising: a first electrode; a piezoelectric material; and a second electrode, wherein the piezoelectric material is the piezoelectric material according to claim 1 .

8. A multilayered piezoelectric element, comprising piezoelectric material layers and electrode layers alternately stacked on top of one another, the electrode layers including an internal electrode, wherein the piezoelectric material layers are formed of the piezoelectric material according to claim 1 .

9. A liquid discharge head, comprising: a liquid chamber; and a discharge port in communication with the liquid chamber, wherein the liquid chamber has a vibrating unit that includes the piezoelectric element according to claim 7 .

10. A liquid discharge apparatus, comprising: a mounting portion for a transfer medium; and the liquid discharge head according to claim 9 .

11. An ultrasonic motor, comprising: a vibrating member that includes the piezoelectric element according to claim 7 and a moving body in contact with the vibrating member.

12. An optical apparatus, comprising a drive unit that includes the ultrasonic motor according to claim 11 .

13. A vibratory apparatus, comprising a vibrating member that includes the piezoelectric element according to claim 7 .

14. A dust removing device, comprising a vibrating unit that includes the vibratory apparatus according to claim 13 disposed on a diaphragm.

15. An image pickup apparatus, comprising: the dust removing device according to claim 14 ; and an image pickup element unit, wherein the dust removing device includes a diaphragm on a light-receiving surface of the image pickup element unit.

16. Electronic equipment, comprising a piezoelectric acoustic component that includes the piezoelectric element according to claim 7 .

17. A liquid discharge head, comprising: a liquid chamber; and a discharge port in communication with the liquid chamber, wherein the liquid chamber has a vibrating unit that includes the multilayered piezoelectric element according to claim 8 .

18. A liquid discharge apparatus, comprising: a mounting portion for a transfer medium; and the liquid discharge head according to claim 17 .

19. An ultrasonic motor, comprising: a vibrating member that includes the multilayered piezoelectric element according to claim 8 ; and a moving body in contact with the vibrating member.

20. An optical apparatus, comprising a drive unit that includes the ultrasonic motor according to claim 19 .

21. A vibratory apparatus, comprising a vibrating member that includes the multilayered piezoelectric element according to claim 8 .

22. A dust removing device, comprising a vibrating unit that includes the vibratory apparatus according to claim 21 disposed on a diaphragm.

23. An image pickup apparatus, comprising: the dust removing device according to claim 22 ; and an image pickup element unit, wherein the dust removing device includes a diaphragm on a light-receiving surface of the image pickup element unit.

24. Electronic equipment, comprising a piezoelectric acoustic component that includes the multilayered piezoelectric element according to claim 8 .

25. A piezoelectric material comprising:
an oxide containing Ba, Ca, Ti, Sn, and Zr; and
a Mn content,
wherein a value x which is a molar ratio of Ca to the sum of the number of moles of Ba and Ca is 0.125≦x≦0.300,
wherein a value y which is a molar ratio of Sn to the sum of the number of moles of Ti, Sn, and Zr is 0<y≦0.020,
wherein a value z which is a molar ratio of Zr to the sum of the number of moles of Ti, Sn, and Zr is 0.041≦z≦0.069, and
wherein the Mn content is 0.12 parts by weight or more and 0.40 parts by weight or less on an oxide basis per 100 parts by weight of the oxide containing Ba, Ca, Ti, Sn, and Zr.

26. A piezoelectric element comprising:
a first electrode;
a piezoelectric material portion; and
a second electrode,
wherein the piezoelectric material portion comprises the piezoelectric material according to claim 25 .

27. A multilayered piezoelectric element comprising:
piezoelectric material layers; and
electrode layers including an internal electrode,
wherein the piezoelectric material layers and the electrode layers are alternately stacked, and
wherein the piezoelectric material layers comprise the piezoelectric material according to claim 25 .

28. An electronic apparatus comprising the piezoelectric element according to claim 26 .

29. An electronic apparatus comprising the multilayered piezoelectric element according to claim 27 .

Assignees

• Canon Kk

Inventors

• Uebayashi Akira
• Saito Hiroshi
• Oshima Kanako
• Hayashi Jumpei

Classifications

• C04B2235/79

  Non-stoichiometric products, e.g. perovskites (ABO3) with an A/B-ratio other than 1 · CPC title

• H01L41/273

  Electricity · mapped topic

• B32B18/00 Primary

  Layered products essentially comprising ceramics, e.g. refractory products · CPC title

• H01L41/0973

  Electricity · mapped topic

• C04B2235/444

  Halide containing anions, e.g. bromide, iodate, chlorite · CPC title