Apparatus for fixing metal mask

Patent metadata

Field	Value
Publication number	US-9524891-B2
Application number	US-201414199061-A
Country	US
Kind code	B2
Filing date	Mar 6, 2014
Priority date	Jul 9, 2013
Publication date	Dec 20, 2016
Grant date	Dec 20, 2016

Abstract

An apparatus for fixing a metal mask includes a first substrate, a magnet array structure, a second substrate, and a metal mask. The magnet array structure includes a plurality of magnets. The magnet array structure is disposed on the first substrate. The plurality of magnets includes their respective magnetic axes. The magnetic axes cross each other. The second substrate is disposed on the magnet array structure. The metal mask is disposed on the second substrate.

First claim

What is claimed is:

1. A system including an apparatus configured to fix
a metal mask between an evaporation source and a substrate, the apparatus comprising:
a first substrate;
a magnet array structure including a plurality of magnets disposed on the first substrate, the plurality of magnets including a plurality of magnetic axes, respectively, the plurality of magnetic axes crossing each other;
a second substrate disposed on the magnet array structure; and
a metal mask disposed on the second substrate, said metal mask comprises a patterned region having a plurality of openings and a frame region contacting the second substrate,
wherein an upper surface of the magnet array structure is in direct contact with the first substrate, and the second substrate is disposed between a lower surface of the magnet array structure and the metal mask,
wherein the magnet array structure comprises a first magnet, a second magnet, a third magnet, a fourth magnet, and a fifth magnet sequentially arranged on the first substrate,
wherein a positive pole direction of the first magnet is defined as a first direction, a positive pole direction of the second magnet is defined as a second direction which intersects the first direction, a positive pole direction of the third magnet is defined as a third direction which intersects the second direction, a positive pole direction of the fourth magnet is defined as a fourth direction which intersects the first direction and the second direction, and a positive pole direction of the fifth magnet is defined as the first direction,
wherein the first, third, and fifth magnets each have a magnetic axis perpendicular to a planar surface of the first substrate, the planar surface of the first substrate facing the first, second, third, fourth and fifth magnets, and wherein the second and fourth magnets having a magnetic axis parallel to the planar surface of the first substrate,
and said system is configured to form a thin film on a patterned region of the second substrate.

2. The apparatus of claim 1 , wherein the second magnet is spaced apart from the first magnet in the fourth direction, the third magnet is spaced apart from the second magnet in the fourth direction, the fourth magnet is spaced apart from the third magnet in the fourth direction, and the fifth magnet is spaced apart from the fourth magnet in the fourth direction.

3. The apparatus of claim 1 , wherein a distance between adjacent magnets is constant.

4. The apparatus of claim 1 , wherein a direction of first magnetic force lines generated by the first, second and third magnets is opposite to a direction of second magnetic force lines generated by the second and fourth magnets, and wherein the first magnetic fields are destructively interfered by the second magnetic force lines.

5. The apparatus of claim 1 , wherein a direction of magnetic force lines generated by the first, second and third magnets is the same as a direction of magnetic force lines generated by the second and fourth magnets.

6. The apparatus of claim 1 , wherein the plurality of magnets is positioned so that a combination of magnetic fields generated by the first, third, and fifth magnets provide a largest strength in the first direction.

7. The apparatus of claim 1 , wherein the magnet array structure comprises more than five magnets.

8. The apparatus of claim 1 , wherein the second substrate and the metal mask are attached on the magnet array structure by magnetic fields generated by the magnet array structure.

9. The apparatus of claim 1 , wherein the first substrate and the metal mask comprise a magnetic substance.

10. The apparatus of claim 1 , wherein the plurality of magnets has first magnets with magnetic axes perpendicular to the first substrate and second magnets with magnetic axes parallel to the first substrate.

11. The apparatus of claim 10 , wherein the first magnets and the second magnets are disposed on the first substrate alternately with respect to each other.

Assignees

• Samsung Display Co Ltd
• Samsung Display Co Ltd

Inventors

• You Suk-Beom
• Lee Joo-Hwa

Classifications

• H10P72/10

  using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] · CPC title

• H01F7/0252

  PM holding devices (H01F7/021, H01F7/0215, H01F7/0226 take precedence) · CPC title

• C23C14/042

  using masks · CPC title

• B05C21/005

  Masking devices (stencils B05C17/06; masking devices for which the means for applying liquids or other fluent material is spraying or is not important B05B12/20) · CPC title

• B05B12/20 Primary

  Masking elements, i.e. elements defining uncoated areas on an object to be coated · CPC title