Magnetic sensor and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-9523745-B2
Application number	US-201615040767-A
Country	US
Kind code	B2
Filing date	Feb 10, 2016
Priority date	Feb 19, 2015
Publication date	Dec 20, 2016
Grant date	Dec 20, 2016

Abstract

Provided are a magnetic sensor and a method of manufacturing the same capable of arranging a magnetic converging plate on a substrate on which Hall elements and a circuit are formed, with a small variation in position while suppressing an increase in number of work processes, the magnetic converging plate having high magnetic permeability and low coercive force. In the magnetic sensor and the method of manufacturing the same, in forming Hall elements and a circuit on a silicon substrate, a magnetic converging plate holder having a pattern recessed to have the same shape and size as those of a magnetic converging plate is formed, and, into the magnetic converging plate holder, the magnetic converging plate manufactured through processes different from those of the silicon substrate on which the Hall elements and the circuit are formed is inserted.

First claim

What is claimed is:

1. A method of manufacturing a magnetic sensor,
the magnetic sensor comprising:
Hall elements formed on a surface of a semiconductor substrate; and
a magnetic converging plate formed above the Hall elements through an intermediation of a protective film,

the method comprising:
forming the protective film on the Hall elements;
partially removing the protective film, to thereby form a magnetic converging plate holder having a recessed shape;
forming the magnetic converging plate separately from and independent of the semiconductor substrate in which the magnetic converging plate holder is formed, and then performing high-temperature annealing to the magnetic converging plate; and
inserting and fixing the magnetic converging plate subjected to the high-temperature annealing to the magnetic converging plate holder.

2. A method of manufacturing a magnetic sensor according to claim 1 , wherein the high-temperature annealing is performed at a process temperature of from 800° C. to 1,000° C.

3. A method of manufacturing a magnetic sensor according to claim 1 , wherein the magnetic converging plate subjected to the high-temperature annealing is processed into one of a circle, square, and cross shape having a four-fold rotational axis in a plan view, and has, at at least one point of an outer periphery of the magnetic converging plate, one of a recessed portion and a protruded portion for magnetic converging plate rotation direction position adjustment.

4. A method of manufacturing a magnetic sensor according to claim 1 , wherein the magnetic converging plate subjected to the high-temperature annealing is formed into the same planar shape as a planar Shape of the magnetic converging plate holder.

5. A magnetic sensor, comprising:
a semiconductor substrate;
a pair of Hall elements formed on a surface of the semiconductor substrate so as to be separated from each other by a separation region;
a protective film formed on the semiconductor substrate so as to cover the pair of Hall elements;
a magnetic converging plate holder that has a recessed shape and is formed in the protective film in a region from the separation region to each of the pair of Hall elements; and
a magnetic converging plate arranged so as to fit the recessed shape of the magnetic converging plate holder.

6. A magnetic sensor according to claim 5 , wherein the magnetic converging plate has, at at least one point of an outer periphery of the magnetic converging plate, one of a recessed portion and a protruded portion for magnetic converging plate rotation direction position adjustment.

7. A magnetic sensor according to claim 6 , wherein the magnetic converging plate holder has one of a protruded portion and a recessed portion formed into the same shape as a shape of the one of the recessed portion and the protruded portion for magnetic converging plate rotation direction position adjustment formed in the magnetic converging plate.

8. A magnetic sensor according to claim 6 , wherein the one of the recessed portion and the protruded portion for magnetic converging plate rotation direction position adjustment represents a direction of magnetic anisotropy of the magnetic converging plate.

Assignees

• Sii Semiconductor Corp

Inventors

• Hioka Takaaki
• Ebihara Mika

Classifications

• G01R33/077 Primary

  Vertical Hall-effect devices · CPC title

• G01R33/0052

  Manufacturing aspects; Manufacturing of single devices, i.e. of semiconductor magnetic sensor chips (devices based on galvano-magnetic effect or the like H10N50/85) · CPC title

• H01L43/065

  Electricity · mapped topic

• H01L43/14

  Electricity · mapped topic

• H01L43/04

  Electricity · mapped topic