Fluorine-containing silicon compound, method for producing same, and method for producing fluorine-containing silicon resin

Patent metadata

Field	Value
Publication number	US-9522979-B2
Application number	US-201514981474-A
Country	US
Kind code	B2
Filing date	Dec 28, 2015
Priority date	Feb 6, 2015
Publication date	Dec 20, 2016
Grant date	Dec 20, 2016

Abstract

The present invention provides a fluorine-containing silicon compound represented by the general formula (1),

wherein each R 1 independently represents a hydrocarbon group having 1 to 6 carbon atoms; each R 2 independently represents a hydrogen atom or a hydrocarbon group having 1 to 6 carbon atoms; and n is an integer satisfying 0≦n≦2. There can be provided a fluorine-containing silicon compound having good storage stability and useful as a raw material of a composition for forming a silicon-containing intermediate film and a silicon-containing photoresist composition used for a fine processing in the manufacturing process of a semiconductor device.

First claim

What is claimed is:

1. A fluorine-containing silicon compound represented by the general formula (1),

wherein each R 1 independently represents a hydrocarbon group having 1 to 6 carbon atoms; each R 2 independently represents a hydrogen atom or a hydrocarbon group having 1 to 6 carbon atoms; and n is an integer satisfying 0≦n≦2.

2. The fluorine-containing silicon compound according to claim 1 , wherein the fluorine-containing silicon compound is used as a raw material of a resin contained in a composition for forming a silicon-containing intermediate film or a silicon-containing photoresist composition.

3. A method for producing a fluorine-containing silicon compound according to claim 1 , comprising subjecting a fluorine-containing silicon compound represented by the general formula (2) to intramolecular condensation,

wherein each R 1 independently represents a hydrocarbon group having 1 to 6 carbon atoms; each R 2 independently represents a hydrogen atom or a hydrocarbon groups having 1 to 6 carbon atoms; and n is an integer satisfying 0≦n≦2.

4. A method for producing a fluorine-containing silicon compound according to claim 2 , comprising subjecting a fluorine-containing silicon compound represented by the general formula (2) to intramolecular condensation,

wherein each R 1 independently represents a hydrocarbon group having 1 to 6 carbon atoms; each R 2 independently represents a hydrogen atom or a hydrocarbon groups having 1 to 6 carbon atoms; and n is an integer satisfying 0≦n≦2.

5. A method for producing a fluorine-containing silicon compound according to claim 1 , comprising reacting a fluorine-containing compound represented by the formula (3) with a silicon compound represented by the general formula (4),

wherein each R 1 independently represents a hydrocarbon group having 1 to 6 carbon atoms; each R 2 independently represents a hydrogen atom or a hydrocarbon groups having 1 to 6 carbon atoms; and n is an integer satisfying 0≦n≦2.

6. A method for producing a fluorine-containing silicon compound according to claim 2 , comprising reacting a fluorine-containing compound represented by the formula (3) with a silicon compound represented by the general formula (4),

wherein each R 1 independently represents a hydrocarbon group having 1 to 6 carbon atoms; each R 2 independently represents a hydrogen atom or a hydrocarbon groups having 1 to 6 carbon atoms; and n is an integer satisfying 0≦n≦2.

7. A method for producing a fluorine-containing silicon resin, comprising hydrolysis condensation of one or more compounds selected from the group consisting of a hydrolysable silicon compound represented by the general formula (5-1) and a reactive compound represented by the general formula (5-2) with one or more fluorine-containing silicon compounds according to claim 1 ,
R 3 m1 Si(OR 4 ) (4-m1)   (5-1)

U(OR 5 ) m2 (OR 6 ) m3 (O) m4/2   (5-2)

wherein each R 3 independently represents a hydrogen atom or a monovalent organic group having 1 to 30 carbon atoms; each R 4 independently represents a hydrocarbon group having 1 to 6 carbon atoms; m1 is an integer satisfying 0≦m1≦3; R 5 and R 6 independently represent a hydrogen atom or an organic group having 1 to 30 carbon atoms; U represents any element belonging to the group of III, IV, or V in the periodic table, except for carbon and silicon; m2+m3+m4 is a number of valency determined by U; and each of m2, m3, and m4 is an integer of 0 or more.

8. A method for producing a fluorine-containing silicon resin, comprising hydrolysis condensation of one or more compounds selected from the group consisting of a hydrolysable silicon compound represented by the general formula (5-1) and a reactive compound represented by the general formula (5-2) with one or more fluorine-containing silicon compounds according to claim 2 ,
R 3 m1 Si(OR 4 ) (4-m1)   (5-1)

U(OR 5 ) m2 (OR 6 ) m3 (O) m4/2   (5-2)

wherein each R 3 independently represents a hydrogen atom or a monovalent organic group having 1 to 30 carbon atoms; each R 4 independently represents a hydrocarbon group having 1 to 6 carbon atoms; m1 is an integer satisfying 0≦m1≦3; R 5 and R 6 independently represent a hydrogen atom or an organic group having 1 to 30 carbon atoms; U represents any element belonging to the group of III, IV, or V in the periodic table, except for carbon and silicon; m2+m3+m4 is a number of valency determined by U; and each of m2, m3, and m4 is an integer of 0 or more.

Assignees

• Shinetsu Chemical Co

Inventors

• Watanabe Takeru
• Taneda Yoshinori
• Ogihara Tsutomu
• Tachibana Seiichiro

Classifications

• C08G79/08

  a linkage containing boron · CPC title

• C07F7/184

  Chemistry & Metallurgy · mapped topic

• C07F7/188

  by reactions involving the formation of Si-O linkages · CPC title

• C07F7/1836

  Chemistry & Metallurgy · mapped topic

• C08G77/80

  Siloxanes having aromatic substituents, e.g. phenyl side groups · CPC title