Surface-enhanced raman scattering substrate and manufacturing method thereof

Patent metadata

Field	Value
Publication number	US-9518927-B2
Application number	US-201414548286-A
Country	US
Kind code	B2
Filing date	Nov 20, 2014
Priority date	Aug 29, 2014
Publication date	Dec 13, 2016
Grant date	Dec 13, 2016

Abstract

In a Surface-Enhanced Raman Scattering (SERS) substrate and the manufacturing method thereof, the SERS substrate includes a low thermal conductivity base and a plurality of metal nanoparticles (NPs). The surface of the low thermal conductivity substrate has a first surface, and the first surface has a plurality of ripple micro/nano structures. The plurality of metal NPs are non-continuously densely arranged on the ripple micro/nano structures of the first surface. The metal NPs have a height difference along the ripple micro/nano structures, and form a 3D electric field enhanced region. The manufacturing methods includes sputtering a metal nano-thin film on a surface of a low thermal conductivity base, and the surface of the low thermal conductivity base has a plurality of ripple micro/nano structures; using laser to ablate the metal nano-thin film; and forming a plurality of metal NPs, which are non-continuously densely arranged.

First claim

What is claimed is:

1. A surface-enhanced Raman scattering substrate, comprising:
a low thermal conductivity substrate having a first surface and a second surface, and the first surface having a plurality of ripple micro/nano structures; and
a plurality of metal nanoparticles non-continuously and densely arranged on the ripple micro/nano structures of the first surface,
wherein the metal nanoparticles have a height difference along the ripple micro/nano structures, and the metal nanoparticles form a 3D electric field enhanced region,
wherein the 3D electric field enhanced region decreases from the first surface toward the second surface.

2. The surface-enhanced Raman scattering substrate as claimed in claim 1 , wherein the space density distribution of the plurality of metal nanoparticles decreases from the first surface toward the second surface, and an electric field enhanced intensity of the 3D electric field enhanced region decreases toward the second surface.

3. The surface-enhanced Raman scattering substrate as claimed in claim 1 , wherein the height difference of the ripple micro/nano structures is 100 nm-10 um.

4. The surface-enhanced Raman scattering substrate as claimed in claim 1 , wherein a thermal conductivity of the low thermal conductivity substrate is 0.15 W/mK.

5. The surface-enhanced Raman scattering substrate as claimed in claim 4 , wherein the low thermal conductivity substrate is paper or oxide substrate.

6. The surface-enhanced Raman scattering substrate as claimed in claim 4 , wherein the low thermal conductivity substrate is paper and has a plurality of fiber structures.

7. The surface-enhanced Raman scattering substrate as claimed in claim 1 , further comprising a plurality of non-enhanced metal nanoparticles not distributed in the 3D electric field enhanced region, the amount of a plurality of enhanced metal nanoparticles distributed in the 3D electric field enhanced region is larger than the non-enhanced metal nanoparticles.

8. The surface-enhanced Raman scattering substrate as claimed in claim 1 , wherein the plurality of metal nanoparticles distributed in the 3D electric field enhanced region has the effect of localized surface plasmon resonance.

9. The surface-enhanced Raman scattering substrate as claimed in claim 8 , wherein the plurality of metal nanoparticles comprise metal oxides and combinations thereof, wherein the metals of the metal oxides is selected from a group consisting of gold, silver, platinum, aluminum, and copper.

Assignees

• Univ Nat Taiwan

Inventors

• Chen Hsuen-Li
• Chou Sin-Yi
• Yu Chen-Chieh
• Yen Yu-Ting

Classifications

• C23C14/5873

  Removal of material · CPC title

• C23C14/205

  by cathodic sputtering · CPC title

• C22F1/14

  of noble metals or alloys based thereon · CPC title

• G01N21/658 Primary

  enhancement Raman, e.g. surface plasmons · CPC title

• C23C14/5813

  using lasers · CPC title