Open plasma lamp for forming a light-sustained plasma
US-9263238-B2 · Feb 16, 2016 · US
Laser-sustained plasma light source
US9516733B1 · US · B1
| Field | Value |
|---|---|
| Publication number | US-9516733-B1 |
| Application number | US-201514814636-A |
| Country | US |
| Kind code | B1 |
| Filing date | Jul 31, 2015 |
| Priority date | May 28, 2009 |
| Publication date | Dec 6, 2016 |
| Grant date | Dec 6, 2016 |
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- Title
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Abstract
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A method for producing a laser sustained plasma light by directing at least one laser into a gas volume and igniting a plasma that produces a light. Heated portions of the gas volume are removed from the plasma and cooled. The cooled portions of the gas volume are returned to the plasma in a laminar flow. The light is collected with a reflector and provided to a desired location.
First claim
Opening claim text (preview).
What is claimed is: 1. A method for producing a laser sustained plasma light, the method comprising the steps of: directing at least one laser into a gas volume, igniting a plasma in the gas volume, the plasma producing a light, removing heated portions of the gas volume from the plasma, cooling the heated portions of the gas volume, returning the cooled portions of the gas volume to the plasma in a laminar flow, and collecting the light with a reflector and providing the light to a desired location. 2. The method of claim 1 , wherein the gas volume is removed and returned via passive convection. 3. The method of claim 1 , wherein the gas volume is removed and returned via active pumping. 4. The method of claim 1 , wherein the gas volume is cooled using a cooling jacket disposed around a cell that contains the gas volume. 5. The method of claim 1 , further comprising receiving the heated portions of the gas volume with a hollow upper electrode, wherein the hollow upper electrode maintains a unidirectional flow of the heated gas volume leaving the plasma. 6. The method of claim 5 , further comprising cooling the heated portions of the gas volume at least in part using passive cooling means disposed in the hollow upper electrode. 7. The method of claim 5 , further comprising cooling the heated portions of the gas volume at least in part using active cooling means disposed in the hollow upper electrode. 8. The method of claim 1 , further comprising returning the cooled portions of the gas volume to the plasma using a hollow lower electrode. 9. A method for producing a laser sustained plasma light, the method comprising the steps of: directing at least one laser into a gas volume, igniting a plasma in the gas volume, the plasma producing a light, removing heated portions of the gas volume with a hollow upper electrode, wherein the hollow upper electrode maintains a unidirectional flow of the heated gas volume leaving the plasma, cooling the heated portions of the gas volume, returning the cooled portions of the gas volume to the plasma using a hollow lower electrode in a laminar flow, and collecting the light with a reflector and providing the light to a desired location. 10. The method of claim 9 , wherein the gas volume is removed and returned via passive convection. 11. The method of claim 9 , wherein the gas volume is removed and returned via active pumping. 12. The method of claim 9 , wherein the gas volume is cooled using a cooling jacket disposed around a cell that contains the gas volume. 13. The method of claim 9 , further comprising cooling the heated portions of the gas volume at least in part using passive cooling means disposed in the hollow upper electrode. 14. The method of claim 9 , further comprising cooling the heated portions of the gas volume at least in part using active cooling means disposed in the hollow upper electrode.
Assignees
Inventors
Classifications
- H01J61/28Primary
Means for producing, introducing, or replenishing gas or vapour during operation of the lamp · CPC title
- H05H1/4697Primary
using glow discharges · CPC title
- H05H1/24Primary
Generating plasma {(nuclear fusion reactors G21B1/00; gas-filled discharge reactors H01J37/32)} · CPC title
Collector cooling devices · CPC title
Hollow cathodes · CPC title
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Frequently asked questions
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- What does patent US9516733B1 cover?
- A method for producing a laser sustained plasma light by directing at least one laser into a gas volume and igniting a plasma that produces a light. Heated portions of the gas volume are removed from the plasma and cooled. The cooled portions of the gas volume are returned to the plasma in a laminar flow. The light is collected with a reflector and provided to a desired location.
- Who is the assignee on this patent?
- Kla Tencor Corp
- What technology area does this patent fall under?
- Primary CPC classification H01J61/28. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Dec 06 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 3 related publications on this page (citations in our corpus or others sharing the same primary CPC).