Laser beam irradiation apparatus and manufacturing method of organic light emitting display apparatus using the same

Patent metadata

Field	Value
Publication number	US-9515294-B2
Application number	US-201414510322-A
Country	US
Kind code	B2
Filing date	Oct 9, 2014
Priority date	Feb 27, 2014
Publication date	Dec 6, 2016
Grant date	Dec 6, 2016

Abstract

A laser beam irradiation apparatus includes a laser light source, a controller for controlling energy of light generated by the laser source, a first optical system for adjusting a shape of light that has passed through the controller, a scanner for adjusting the direction of light that has passed through the first optical system, and an F-theta lens for reducing a beam that has passed through the scanner.

First claim

What is claimed is:

1. A method of manufacturing an organic light-emitting display apparatus, the method comprising:
forming an auxiliary electrode;
forming a pixel defining layer having an opening which exposes some of the auxiliary electrode;
forming an intermediate layer on the auxiliary electrode;
irradiating a laser beam toward the intermediate layer by using a laser beam irradiation apparatus, such that a contact hole is formed through the intermediate layer; and
forming a cathode electrode on the intermediate layer and in the contact hole, such that the cathode electrode contacts the auxiliary electrode through the contact hole,
wherein the laser beam irradiation apparatus includes a laser light source, a controller for controlling energy of light generated by the laser light source, a first optical system for adjusting a shape of light emitted from the controller, a scanner that adjusts a direction of light emitted from the first optical system, and an F-theta lens for reducing a beam emitted from the scanner.

2. The method as claimed in claim 1 , wherein irradiating the laser beam toward the intermediate layer includes generating particles in the form of gas.

3. The method as claimed in claim 2 , wherein irradiating the laser beam toward the intermediate layer includes generating particles having a size smaller than about 20 nm.

4. The method as claimed in claim 1 , wherein irradiating the laser beam toward the intermediate layer includes using an acusto-optic modulator (AOM).

5. The method as claimed in claim 1 , wherein irradiating the laser beam toward the intermediate layer includes splitting a single input beam of laser light source into a plurality of output beams, each output beam being incident on a different region of the intermediate layer to form separate contact holes.

6. The method as claimed in claim 1 , wherein the cathode electrode is formed of lithium (Li), calcium (Ca), lithium fluoride (LiF)/calcium (Ca), lithium fluoride (LiF)/aluminum (Al), aluminum (Al), silver (Ag), magnesium (Mg), ytterbium (Yb), or a compound thereof.

7. The method as claimed in claim 1 , wherein the cathode is formed to have a thickness of about 1 angstrom to about 200 angstroms.

8. The method as claimed in claim 1 , wherein irradiating the laser beam is performed in vacuum.

9. A method of manufacturing an organic light-emitting display apparatus, the method comprising:
forming an auxiliary electrode;
forming a pixel defining layer having an opening which exposes some of the auxiliary electrode;
forming an intermediate layer on the auxiliary electrode;
irradiating a laser beam toward the intermediate layer to form a contact hole through the intermediate layer; and
forming a cathode electrode on the intermediate layer and in the contact hole, such that the cathode electrode contacts the auxiliary electrode through the contact hole,
wherein irradiating the laser beam is performed in vacuum and includes:
irradiating a laser light source toward the intermediate layer,
controlling energy of light generated by the laser light source,
adjusting a shape and a direction of light generated by the laser light source, and
diminishing the adjusted light beam.

10. A method of manufacturing an organic light-emitting display apparatus, the method comprising:
forming an auxiliary electrode;
forming a pixel defining layer having an opening which exposes some of the auxiliary electrode;
forming an intermediate layer on the auxiliary electrode;
irradiating a laser beam toward the intermediate layer to form a contact hole through the intermediate layer; and
forming a cathode electrode on the intermediate layer and in the contact hole, such that the cathode electrode contacts the auxiliary electrode through the contact hole.

Assignees

• Samsung Display Co Ltd

Inventors

• Han Gyoo-Wan
• Kang Ku-Hyun
• Lee Hae-Sook
• Jeun Jin-Hong
• Cho Kyoung-Seok

Classifications

• G02B27/0988

  Diaphragms, spatial filters, masks for removing or filtering a part of the beam · CPC title

• G02B13/0005

  having F-Theta characteristic (scanning systems employing movable or deformable optical elements G02B26/10) · CPC title

• G02F1/113

  Circuit or control arrangements · CPC title

• B23K26/067 Primary

  Dividing the beam into multiple beams, e.g. multi-focusing · CPC title

• G02B27/144

  using partially transparent surfaces without spectral selectivity (G02B27/147 takes precedence) · CPC title