Manufacturing method of organic EL element

Patent metadata

Field	Value
Publication number	US-9515292-B2
Application number	US-201214009367-A
Country	US
Kind code	B2
Filing date	Nov 6, 2012
Priority date	Dec 28, 2011
Publication date	Dec 6, 2016
Grant date	Dec 6, 2016

Abstract

A method of manufacturing an organic EL element having a pair of electrodes and an organic functional layer disposed therebetween, the pair of electrodes consisting of an upper electrode and a lower electrode, comprising: forming the upper electrode on the organic functional layer by a magnetron sputtering method with a film-forming power density no less than 4.5 W/cm 2 and no greater than 9.0 W/cm 2 .

First claim

The invention claimed is:

1. A method of manufacturing an organic EL element having a pair of electrodes and an organic functional layer disposed therebetween, the pair of electrodes consisting of an upper electrode and a lower electrode, comprising:
forming the upper electrode on the organic functional layer by a magnetron sputtering method with a film-forming power density no less than 4.5 W/cm 2 and no greater than 9.0W/cm 2 ,
wherein the organic functional layer includes an electron transport layer,
the upper electrode directly contacts the electron transport layer, and
an ion current density per unit dynamic rate during the formation of the upper electrode is no less than 0.2 mA/cm 2 and no greater than 0.4 mA/cm 2 .

2. The method of claim 1 ,
wherein an atmospheric gas pressure during the formation of the upper electrode is no less than 0.4 Pa and no greater than 1.6 Pa.

3. The method of claim 1 ,
wherein the upper electrode is formed of transparent conductive material.

4. The method of claim 1 , wherein the upper electrode is formed of indium tin oxide.

5. The method of claim 1 ,
wherein the upper electrode is a cathode, and
the lower electrode is an anode.

6. The method of claim 5 ,
wherein the organic functional layer is composed of a plurality of layers including an electron transport layer, and
the cathode is formed on the electron transport layer.

7. The method of claim 1 ,
wherein the electron transport layer is not a composite electron injecting and electron transport layer.

Assignees

• Joled Inc

Inventors

• Aonuma Masaki

Classifications

• C23C14/086

  of zinc, germanium, cadmium, indium, tin, thallium or bismuth · CPC title

• H05B33/28

  of translucent electrodes · CPC title

• H10K71/811

  Controlling the atmosphere during processing (H10K71/40 takes precedence) · CPC title

• H10K50/828

  Transparent cathodes, e.g. comprising thin metal layers · CPC title

• H10K71/60 Primary

  Forming conductive regions or layers, e.g. electrodes · CPC title