Semiconductor memory device
US-2024334693-A1 · Oct 3, 2024 · US
Nanocrystal memory and methods for forming same
US9514945B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9514945-B2 |
| Application number | US-201414568155-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 12, 2014 |
| Priority date | Dec 12, 2014 |
| Publication date | Dec 6, 2016 |
| Grant date | Dec 6, 2016 |
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Abstract
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A charge-storing device includes a charge-storing layer including nanocrystals. The nanocrystals are formed by a deposition technique incorporating deuterated hydrides. The deuterated hydride can be used to form an amorphous semiconductor material that is annealed to form nanoparticles to be incorporated into the charge-storing layer.
First claim
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What is claimed is: 1. A method of making a charge storage device, the method comprising: depositing an amorphous semiconductor material over a dielectric layer using a deuterated hydride; annealing, in an inert atmosphere, the amorphous semiconductor material to form particles; and forming a dielectric material around the particles. 2. The method of claim 1 , wherein depositing includes depositing at a temperature in a range of 300° C. to 650° C.…
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Classifications
Electricity · mapped topic
Electricity · mapped topic
- H10D30/6892Primary
Electricity · mapped topic
Electricity · mapped topic
- H10D64/037Primary
Electricity · mapped topic
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- What does patent US9514945B2 cover?
- A charge-storing device includes a charge-storing layer including nanocrystals. The nanocrystals are formed by a deposition technique incorporating deuterated hydrides. The deuterated hydride can be used to form an amorphous semiconductor material that is annealed to form nanoparticles to be incorporated into the charge-storing layer.
- Who is the assignee on this patent?
- Hong Cheong Min, Lee Euhngi, Freescale Semiconductor Inc
- What technology area does this patent fall under?
- Primary CPC classification H10D30/6892. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Dec 06 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).