Multiple-patterning photolithographic mask and method

Patent metadata

Field	Value
Publication number	US-9513552-B2
Application number	US-201514665961-A
Country	US
Kind code	B2
Filing date	Mar 23, 2015
Priority date	Dec 20, 2012
Publication date	Dec 6, 2016
Grant date	Dec 6, 2016

Abstract

A composite mask suitable for multiple-patterning lithographic processes and a multiple-patterning photolithographic process utilizing the mask are disclosed. An exemplary embodiment includes receiving a mask having a plurality of sub-reticles and a substrate having one or more regions. A first sub-reticle of the plurality of sub-reticles is aligned with a first region of the one or more regions. A movement pattern is designated relative to the substrate. A first photolithographic process is performed including exposing the substrate using the mask to form a first exposed area on the substrate. An alignment of the mask relative to the substrate is shifted according to a first direction determined by the movement pattern. A second photolithographic process is performed including exposing the substrate using the mask to form a second exposed area on the substrate such that the second exposed area overlaps the first.

First claim

What is claimed is:

1. A method of forming a semiconductor device, the method comprising:
exposing a region of a substrate to radiation in a first lithographic procedure using a mask in a first alignment;
thereafter realigning the substrate relative to the mask according to a spiral movement pattern into a second alignment; and
exposing the region of the substrate to radiation in a second lithographic procedure using the mask in the second alignment, wherein at least a portion of the region is exposed to radiation in both the first lithographic procedure and the second lithographic procedure.

2. The method of claim 1 , wherein the spiral pattern is configured to spiral outward from a central location of the substrate.

3. The method of claim 1 , wherein the spiral pattern is configured to spiral inward from a location on a perimeter of the substrate.

4. The method of claim 1 , wherein a first sub-reticle of the mask is used to expose the portion during the first lithographic procedure and a second sub-reticle of the mask is used to expose the portion during the second lithographic procedure, and wherein a pattern of the first sub-reticle is different from a pattern of the second sub-reticle.

5. The method of claim 1 , wherein the mask has a reticle defined thereupon, and wherein a portion of the reticle is bladed off during one of the first lithographic procedure and the second lithographic procedure without being bladed off during the other of the first lithographic procedure and the second lithographic procedure.

6. The method of claim 1 , wherein an amount by which an alignment of the substrate relative to the mask is adjusted during the realignment is determined by an arrangement of sub-reticles of the mask.

7. The method of claim 1 , wherein, during the realigning, an alignment of the substrate relative to the mask is adjusted by a non-zero amount that is less than one pitch.

8. The method of claim 1 , wherein, during the realigning, an alignment of the substrate relative to the mask is changed by a first non-zero amount less than one pitch in a first direction, and by a second non-zero amount less than one pitch in a second direction perpendicular to the first direction.

9. A method comprising:
aligning a lithographic mask with a substrate such that a first region of the substrate will be exposed to radiation according to the lithographic mask during an exposure process;
exposing the first region of the substrate using the lithographic mask;
modifying an alignment of the lithographic mask relative to the substrate according to a spiral pattern; and
thereafter exposing a second region of the substrate using the lithographic mask.

10. The method of claim 9 , wherein the first region is at a central location of the substrate, and wherein the spiral pattern is configured to spiral outward.

11. The method of claim 9 , wherein the first region is at a perimeter of the substrate, and wherein the spiral pattern is configured to spiral inward.

12. The method of claim 9 ,
wherein the mask includes a plurality of sub-reticles,
wherein at least one sub-reticle of the plurality of sub-reticles has a pattern different from that of another of the plurality of sub-reticles, and
wherein at least one of the exposing of the first region and the exposing of the second region includes blading off at least one of the plurality of sub-reticles.

13. The method of claim 9 , wherein the modifying of the alignment changes the alignment by an amount greater than zero and less than one pitch.

14. The method of claim 9 , wherein at least a portion of the first region of the substrate and a second region of the substrate overlap.

15. A lithographic method comprising:
receiving a substrate having a lithographically-sensitive resist disposed thereupon;
performing a sequence of lithographic exposures of the substrate to expose the resist to lithographic radiation, wherein each exposure of the sequence of lithographic exposures exposes a portion of the resist; and
between exposures of the sequence of lithographic exposures, modifying an alignment of the substrate according to a spiral exposure pattern.

16. The lithographic method of claim 15 , wherein the spiral exposure pattern is configured such that the sequence of lithographic exposures spirals outward relative to the substrate.

17. The lithographic method of claim 15 , wherein the spiral exposure pattern is configured such that the sequence of lithographic exposures spirals inward relative to the substrate.

18. The lithographic method of claim 15 , wherein the spiral exposure pattern shifts the alignment of the substrate by a step increment determined by an arrangement of a plurality of sub-reticles upon a mask.

19. The lithographic method of claim 18 , wherein the arrangement is a 2×2 configuration.

20. The lithographic method of claim 15 , wherein the modifying of the alignment according to the spiral exposure pattern includes determining whether a proposed alignment would result in a portion of the substrate being exposed by a sub-reticle of a mask by which it has already been exposed.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Yoo Chue San
• Hsieh Chang-Jyh
• Kung Li-Wei
• Chen Yung-Cheng

Classifications

• G03F7/20

  Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) · CPC title

• H10P76/2041

  Photolithographic processes · CPC title

• G03F7/70475

  Stitching, i.e. connecting image fields to produce a device field, the field occupied by a device such as a memory chip, processor chip, CCD, flat panel display · CPC title

• G03F7/70466

  Multiple exposures, e.g. combination of fine and coarse exposures, double patterning or multiple exposures for printing a single feature (stitching G03F7/70475) · CPC title

• G03F7/2022 Primary

  Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure · CPC title