Polymerizable oligomer and photoresist composition comprising the same

Patent metadata

Field	Value
Publication number	US-9512242-B2
Application number	US-201314348662-A
Country	US
Kind code	B2
Filing date	Jun 27, 2013
Priority date	Mar 7, 2013
Publication date	Dec 6, 2016
Grant date	Dec 6, 2016

Abstract

The embodiments of the invention provide a polymerizable oligomer and a photoresist composition including the polymerizable oligomer, wherein the polymerizable oligomer contains a polymerizable double bond and a hydrophilic group.

First claim

The invention claimed is:

1. A polymerizable oligomer comprising a polymerizable double bond and a hydrophilic group, wherein the monomers or compounds for the synthesis of the polymerizable oligomer are: one or more of a polymerizable double bond-containing organic ester monomer, a polymerizable double bond-containing organic acid monomer, and a polymerizable double bond-containing organic acyl chloride monomer; a compound containing a polymerizable double bond and a hydroxyl group; and a hydrophilic group-containing compound,
wherein the polymerizable oligomer is prepared from an oligomer (a), the compound containing a polymerizable double bond and a hydroxyl group, and a the hydrophilic group-containing compound;
wherein the oligomer (a) is polymerized from the polymerizable double bond-containing organic ester monomer, the polymerizable double bond-containing organic acid monomer and the polymerizable double bond-containing organic acyl chloride monomer, in which parts by weight of each monomer are
the organic ester monomer: 6;
the organic acid monomer: 1-3; and
the organic acyl chloride monomer: 3-1.

2. The polymerizable oligomer according to claim 1 , wherein the compound containing a polymerizable double bond and a hydroxyl group is selected from allyl alcohol, hydroxyethyl acrylate, hydroxyethyl methacrylate, hydroxypropyl acrylate or hydroxypropyl methacrylate.

3. The polymerizable oligomer according to claim 1 , wherein the hydrophilic group-containing compound is one or more of a methoxy-containing compound, an ethoxy-containing compound and a hydroxyl-containing compound.

4. The polymerizable oligomer according to claim 3 , wherein the methoxy-containing compound is one or more of N,N-diethyl-3-aminopropyltriethoxysilane, 3-aminopropyltrimethoxysilane and bis(3-trimethoxysilylpropyl)amine.

5. The polymerizable oligomer according to claim 3 , wherein the ethoxy-containing compound is one or more of dimethyldiethoxysilane, o-ethoxybenzoyl chloride, diethoxymethane, ethoxydiglycol, tetraethoxypropane, aminopropyltriethoxysilane, 3-aminopropylmethyldiethoxysilane, and N,N-bis(3-chloro-2-hydroxypropyl)aminopropyltriethoxysilane.

6. The polymerizable oligomer, according to claim 3 , wherein the hydroxyl-containing compound is selected from pentaerythritol, hexylene glycol, or and the combination thereof.

7. The polymerizable oligomer according to claim 1 , wherein the polymerizable double bond-containing organic ester monomer includes an acrylate monomer.

8. The polymerizable oligomer according to claim 7 , wherein the acrylate monomer is one or more of methyl acrylate, methyl methacrylate, ethyl methacrylate, propyl methacrylate, butyl methacrylate, isobutyl methacrylate, and isopentyl acrylate.

9. The polymerizable oligomer according to claim 1 , wherein the polymerizable double bond-containing organic acid monomer includes an acrylic acid monomer.

10. The polymerizable oligomer according to claim 9 , wherein the acrylic acid monomer is one or more of acrylic acid, methacrylic acid, crotonic acid, cinnamic acid and α-methylcinnamic acid.

11. The polymerizable oligomer according to claim 1 , wherein the polymerizable double bond-containing organic acyl chloride monomer includes an acroloyl chloride monomer.

12. The polymerizable oligomer according to claim 11 , wherein the acroloyl chloride monomer is one or more of methacroloyl chloride, 2-ethylacroloyl chloride, acroloyl chloride and isobutylacroloyl chloride.

13. A photoresist composition comprising the polymerizable oligomer according to claim 1 .

14. The photoresist composition according to claim 13 , wherein the photoresist composition further comprises an alkaline soluble resin, a photoinitiator, and a solvent; wherein parts by weight of each component are
the polymerizable oligomer: 4-10;
the alkaline soluble resin: 5-14.5;
the photoinitiator: 1-5.5; and
the solvent: 30-70.

15. The photoresist composition according to claim 14 , wherein the photoresist composition further comprises, by weight of the photoresist composition, 0.2%-5% of an adjuvant, which includes one or more of a dispersing agent, a leveling agent and an anti-foaming agent.

16. A process for preparing the polymerizable oligomer according to claim 1 comprising:
synthesizing a polymerizable double bond-containing oligomer; and
reacting the polymerizable double bond-containing oligomer with a hydrophilic group-containing compound to produce the polymerizable oligomer,
wherein the polymerizable oligomer comprises a polymerizable double bond and a hydrophilic group.

17. The process according to claim 16 , wherein the synthesizing a polymerizable double bond-containing oligomer comprises:
polymerizing one or more of a polymerizable double bond-containing organic ester monomer, a polymerizable double bond-containing organic acid monomer, and a polymerizable double bond-containing organic acyl chloride monomer to form an oligomer (a); and
reacting the oligomer (a) with a compound containing a polymerizable double bond and a hydroxyl group to produce the polymerizable double bond-containing oligomer.

18. The process according to claim 16 , wherein the synthesizing a polymerizable double bond-containing oligomer comprises:
polymerizing one or more of a polymerizable double bond-containing organic ester monomer, a polymerizable double bond-containing organic acid monomer, and a polymerizable double bond-containing organic acyl chloride monomer to form a polymerizable double bond-containing oligomer, wherein at least one of the monomers participating in the polymerization contains two or more polymerizable double bonds, and at least one polymerizable double bond in the monomer that contains two or more polymerizable double bonds participates in the polymerization and at least one polymerizable double bond in the monomer does not participate in the polymerization.

19. A polymerizable oligomer comprising a polymerizable double bond and a hydrophilic group, wherein the monomers or compounds for the synthesis of the polymerizable oligomer are one or more of a polymerizable double bond-containing organic ester monomer, a polymerizable double bond-containing organic acid monomer, and a polymerizable double bond-containing organic acyl chloride monomer; and a hydrophilic group-containing compound,
wherein the polymerizable oligomer is prepared from a polymerizable double bond-containing oligomer (c) and the hydrophilic group-containing compound;
wherein the polymerizable double bond-containing oligomer (c) is polymerized from one or more of the polymerizable double bond-containing organic ester monomer, the polymerizable double bond-containing organic add monomer and the polymerizable double bond-containing organic acyl chloride monomer, wherein at least one of the monomers participating in the polymerization contains two or more polymerizable double bonds, and at least one polymerizable double bond in the monomer that contains two or more polymerizable double bonds participates in the polymerization and at least one polymerizable double bond in the monomer does not participate in the polymerization.

Assignees

• Boe Technology Group Co Ltd

Inventors

• Sun Wenwen
• Li Lin

Classifications

• C08F220/20

  of polyhydric alcohols or phenols {, e.g. 2-hydroxyethyl (meth)acrylate or glycerol mono-(meth)acrylate} · CPC title

• G03F7/0382

  the macromolecular compound being present in a chemically amplified negative photoresist composition · CPC title

• G03F7/0007

  Filters, e.g. additive colour filters; Components for display devices · CPC title

• C08F8/14

  Esterification · CPC title

• C08F2810/30

  leading to the formation or introduction of aliphatic or alicyclic unsaturated groups · CPC title