System and method for generating extreme ultraviolet light, and laser apparatus

Patent metadata

Field	Value
Publication number	US-9509115-B2
Application number	US-201514821442-A
Country	US
Kind code	B2
Filing date	Aug 7, 2015
Priority date	Mar 29, 2010
Publication date	Nov 29, 2016
Grant date	Nov 29, 2016

Abstract

An extreme ultraviolet light generation system used with a laser apparatus may be provided, and the extreme ultraviolet light generation system may include: a chamber including at least one window for at least one laser beam and a target supply unit for supplying a target material into the chamber; and at least one polarization control unit, provided on a laser beam path, for controlling a polarization state of the at least one laser beam.

First claim

The invention claimed is:

1. An extreme ultraviolet light generation system used with a laser apparatus, the extreme ultraviolet light generation system comprising:
a chamber including at least one window for at least one laser beam and a target supply unit for supplying a target material into the chamber;
at least one polarization control unit, provided on a laser beam path, for controlling a polarization state of the at least one laser beam;
a magnetic field generation unit, provided to the chamber, for generating a magnetic field in which a charged particle emitted from the target material that has been struck by the laser beam is trapped; and
a collection unit into which the trapped charged particle is collected,
wherein the at least one polarization control unit converts the laser beam into a linearly polarized laser beam.

2. The extreme ultraviolet light generation system of claim 1 , wherein
the at least one laser beam includes a first laser beam that strikes an unirradiated target material supplied into the chamber, and
the at least one polarization control unit includes a first polarization control unit for controlling a polarization state of the first laser beam.

3. The extreme ultraviolet light generation system of claim 1 , wherein
the at least one laser beam includes a first laser beam that strikes an unirradiated target material supplied into the chamber and a second laser beam that strikes the target material which the first laser beam has struck, and
the at least one polarization control unit includes a first polarization control unit that controls a polarization state of the first laser beam and a second polarization control unit that controls a polarization state of the second laser beam.

4. The extreme ultraviolet light generation system of claim 3 , wherein the first and second laser beams strike the target material in the same direction.

5. The extreme ultraviolet light generation system of claim 3 , wherein the first and second laser beams strike the target material respectively in different directions.

6. The extreme ultraviolet light generation system of claim 3 , wherein the first and second polarization control units respectively control the polarization states of the first and second laser beams such that the polarization states of the first and second laser beams are the same.

7. The extreme ultraviolet light generation system of claim 3 , wherein the first and second polarization control units respectively control the polarization states of the first and second laser beams such that the polarization states of the first and second laser beams differ from each other.

8. The extreme ultraviolet light generation system of claim 1 , wherein
the at least one laser beam includes a first laser beam that strikes an unirradiated target material supplied into the chamber and a second laser beam that strikes the target material that the first laser beam has struck, and
the at least one polarization control unit includes a third polarization control unit that controls the polarization states of both the first and second laser beams.

9. The extreme ultraviolet light generation system of claim 8 , wherein the third polarization control unit controls the polarization states of the first and second laser beams such that the polarization states of the first and second laser beams are the same.

10. The extreme ultraviolet light generation system of claim 8 , wherein the third polarization control unit controls the polarization states of the first and second laser beams such that the polarization states of the first and second laser beams differ from each other.

11. The extreme ultraviolet light generation system of claim 1 , wherein the target material is supplied into the chamber in the form of a droplet.

12. The extreme ultraviolet light generation system of claim 11 , wherein the droplet is a mass-limited droplet.

13. The extreme ultraviolet light generation system of claim 11 , further comprising a top-hat transformation mechanism that controls a beam profile of the laser beam such that, at a point where the laser beam strikes the droplet, the beam profile of the laser beam along a plane perpendicular to the beam axis of the laser beam is substantially flat in a region that is at least equal to the largest cross-section of the droplet.

14. A method for generating extreme ultraviolet light by using a system used with a laser apparatus, the system comprising:
a chamber including at least one window for at least one laser beam and a target supply unit for supplying a target material into the chamber;
at least one polarization control unit, provided on a laser beam path, for controlling a polarization state of the at least one laser beam;
a magnetic field generation unit, provided to the chamber, for generating a magnetic field in which a charged particle emitted from the target material that has been struck by the laser beam is trapped; and
a collection unit into which the trapped charged particle is collected,
wherein the at least one polarization control unit converts the laser beam into a linearly polarized laser beam.

Assignees

• Gigaphoton Inc
• Gigaphoton Inc

Inventors

• Yanagida Tatsuya
• Wakabayashi Osamu

Classifications

• H01S2301/20

  Lasers with a special output beam profile or cross-section, e.g. non-Gaussian · CPC title

• H01S3/2383

  Parallel arrangements · CPC title

• H01S3/2308

  Amplifier arrangements, e.g. MOPA · CPC title

• H01S3/10061 Primary

  Polarization control · CPC title

• H01S3/08059

  Constructional details of the reflector, e.g. shape (mirrors in general G02B5/08; mountings for mirrors G02B7/18) · CPC title