Transistors, methods of manufacturing the same, and electronic devices including transistors

Patent metadata

Field	Value
Publication number	US-9508865-B2
Application number	US-201514664298-A
Country	US
Kind code	B2
Filing date	Mar 20, 2015
Priority date	Mar 25, 2014
Publication date	Nov 29, 2016
Grant date	Nov 29, 2016

Abstract

According to example embodiments, a transistor includes a gate, a channel layer that is separate from the gate, a gate insulating layer between the gate and the channel layer, and a source electrode and a drain electrode respectively contacting a first region and a second region of the channel layer. The gate insulating layer includes an impurity metal containing region that includes an impurity metal and contacts the channel layer. The gate insulating layer includes an impurity metal non-containing region contacting the gate that is not doped with the impurity metal.

First claim

What is claimed is:

1. A transistor comprising:
a gate;
a channel layer that is separate from the gate;
a gate insulating layer between the gate and the channel layer,
the gate insulating layer including an impurity metal containing region that includes an impurity metal and contacts the channel layer,
the gate insulating layer including an impurity metal non-containing region that contacts the gate and is not doped with the impurity metal; and
a source electrode and a drain electrode respectively contacting a first region and a second region of the channel layer,
wherein at least a portion of the impurity metal containing region is between the impurity metal non-containing region and a portion of the channel layer between the source electrode and the drain electrode, the portion of the channel layer not overlapping the source electrode and the drain electrode.

2. The transistor of claim 1 , wherein the impurity metal containing region includes iron (Fe) as the impurity metal.

3. The transistor of claim 1 , wherein
the impurity metal containing region is in a surface portion of the gate insulating layer that contacts the channel layer, and
a remaining portion of the gate insulating layer, which is separate from the surface portion, does not contain the impurity metal.

4. The transistor of claim 1 , wherein the impurity metal containing region has a thickness of about 5 nm or less.

5. The transistor of claim 1 , wherein the channel layer includes at least one of the group of an oxide semiconductor, an oxynitride semiconductor, an oxynitride semiconductor containing fluorine, a nitride semiconductor, and a nitride semiconductor containing fluorine.

6. The transistor of claim 1 , wherein the channel layer comprises at least one of the group of a ZnO-based semiconductor, a SnO-based semiconductor, an InO-based semiconductor, a ZnON-based semiconductor, a ZnONF-based semiconductor, a ZnN-based semiconductor, and a ZnNF-based semiconductor.

7. The transistor of claim 6 , wherein
the channel layer further includes at least one of the group of Li, K, Mg, Ca, Sr, Ba, Ga, Al, In, B, Si, Sn, Ge, Sb, Y, Ti, Zr, V, Nb, Ta, Sc, Hf, Mo, Mn, Fe, Co, Ni, Cu, W, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, F, Cl, Br, I, S, and Se.

8. The transistor of claim 1 , wherein
the gate insulating layer includes at least one of the group of a silicon oxide layer and a silicon nitride layer, and the gate insulating layer is one of the group of a monolayer structure and a multilayer structure.

9. The transistor of claim 1 , wherein the channel layer is on top of the gate.

10. The transistor of claim 9 , further comprising:
an etch stop layer on the channel layer.

11. The transistor of claim 1 , wherein a threshold voltage of the transistor is increased in a positive (+) direction due to the impurity metal containing region.

12. A display apparatus comprising:
the transistor of claim 1 .

13. The transistor of claim 1 , wherein
the impurity metal containing region includes a first portion between the source electrode and the drain electrode, and
the first portion has a first surface directly contacting the impurity metal non-containing region and a second surface directly contacting the channel layer.

14. The transistor of claim 1 , wherein the impurity metal containing region directly contacts an entire region of a lower surface of the channel layer.

15. The transistor of claim 1 , wherein the impurity metal containing region comprises the same base material as the impurity metal non-containing region.

16. A transistor comprising:
a gate;
a channel layer that is separate from the gate;
a gate insulating layer between the gate and the channel layer,
the gate insulating layer including an impurity metal containing region that includes an impurity metal and contacts the channel layer,
the gate insulating layer including an impurity metal non-containing region that contacts the gate and is not doped with the impurity metal; and

a source electrode and a drain electrode respectively contacting a first region and a second region of the channel layer,
wherein the gate insulating layer includes at least one of the group of a silicon oxide layer and a silicon nitride layer, and the gate insulating layer is one of the group of a monolayer structure and a multilayer structure, and
wherein the gate insulating layer includes a silicon nitride layer and a silicon oxide layer that are sequentially stacked, and
the impurity metal containing region is in a surface portion of the silicon oxide layer.

17. A transistor comprising:
a gate;
a channel layer that is separate from the gate, the channel layer including an inorganic semiconductor, the channel layer including an iron (Fe) containing region at a surface portion thereof;
a source electrode and a drain electrode respectively contacting a first region and a second region of the channel layer; and
a gate insulating layer between the channel layer and the gate,
wherein the gate insulating layer includes an impurity metal containing region that includes an impurity metal at a surface portion of the gate insulating layer,
wherein the gate insulating layer includes an impurity metal non-containing region that contacts the gate and is not doped with the impurity metal, and
wherein at least a portion of the impurity metal containing region is between the impurity metal non-containing region and a portion of the channel layer between the source electrode and the drain electrode, the portion of the channel layer not overlapping the source electrode and the drain electrode.

18. The transistor of claim 17 , wherein the channel layer includes at least one of the group of an oxide semiconductor, an oxynitride semiconductor, an oxynitride semiconductor containing fluorine, a nitride semiconductor, and a nitride semiconductor containing fluorine.

19. The transistor of claim 17 , wherein the channel layer includes at least one of the group of a ZnO-based semiconductor, a SnO-based semiconductor, an InO-based semiconductor, a ZnON-based semiconductor, a ZnONF-based semiconductor, a ZnN-based semiconductor, and a ZnNF-based semiconductor.

20. The transistor of claim 17 , wherein the iron (Fe) containing region has a thickness of about 5 nm or less.

21. The transistor of claim 17 , wherein the gate is on top of the channel layer.

22. The transistor of claim 17 , wherein the channel layer is on top of the gate.

23. The transistor of claim 17 , wherein the impurity metal containing region includes iron (Fe) as the impurity metal.

24. A display apparatus comprising:
the transistor of claim 17 .

Assignees

• Samsung Electronics Co Ltd

Inventors

• Seon Jongbaek
• Seo Seokjun
• Kim Taesang
• Ryu Myungkwan
• Cho Seongho

Classifications

• H10D30/6757

  characterised by the structure of the channel, e.g. transverse or longitudinal shape or doping profile (TFTs having channel structures for preventing kink or snapback effects H10D30/6708; TFTs having lightly-doped source or drain extensions H10D30/6715) · CPC title

• H10D30/663

  having both source contacts and drain contacts on the same surface, i.e. up-drain VDMOS · CPC title

• H10D30/667 Primary

  having substrates comprising insulating layers, e.g. SOI-VDMOS transistors · CPC title

• H10D64/693

  the insulator comprising nitrogen, e.g. nitrides, oxynitrides or nitrogen-doped materials · CPC title

• H10D64/691

  comprising metallic compounds, e.g. metal oxides or metal silicates  (insulators comprising nitrogen H10D64/693) · CPC title