Sonos device

US9508734B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-9508734-B2
Application numberUS-201615077892-A
CountryUS
Kind codeB2
Filing dateMar 22, 2016
Priority dateJun 11, 2013
Publication dateNov 29, 2016
Grant dateNov 29, 2016

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  2. Abstract

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Abstract

Official abstract text for this publication.

A silicon-oxide-nitride-oxide-silicon (SONOS) device is disclosed. The SONOS device includes a substrate; a first oxide layer on the substrate; a silicon-rich trapping layer on the first oxide layer; a nitrogen-containing layer on the silicon-rich trapping layer; a silicon-rich oxide layer on the nitrogen-containing layer; and a polysilicon layer on the silicon-rich oxide layer.

First claim

Opening claim text (preview).

What is claimed is: 1. A silicon-oxide-nitride-oxide-silicon (SONOS) device, comprising: a substrate; a first oxide layer on the substrate; a silicon-rich trapping layer on the first oxide layer, wherein the silicon-rich trapping layer comprises a silicon nitride (SiN) layer and a silicon-rich SiN layer; a nitrogen-containing layer on the silicon-rich trapping layer; a silicon-rich oxide layer on the nitrogen-containing layer; and a polysilicon layer on the silicon-rich…

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What does patent US9508734B2 cover?
A silicon-oxide-nitride-oxide-silicon (SONOS) device is disclosed. The SONOS device includes a substrate; a first oxide layer on the substrate; a silicon-rich trapping layer on the first oxide layer; a nitrogen-containing layer on the silicon-rich trapping layer; a silicon-rich oxide layer on the nitrogen-containing layer; and a polysilicon layer on the silicon-rich oxide layer.
Who is the assignee on this patent?
United Microelectronics Corp
What technology area does this patent fall under?
Primary CPC classification H10D30/0413. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Nov 29 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).