Integrated circuit device and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-9508727-B2
Application number	US-201514853442-A
Country	US
Kind code	B2
Filing date	Sep 14, 2015
Priority date	Nov 12, 2014
Publication date	Nov 29, 2016
Grant date	Nov 29, 2016

Abstract

A method includes providing a plurality of active regions on a substrate, and at least a first device isolation layer between two of the plurality of active regions, wherein the plurality of active regions extend in a first direction; providing a gate layer extending in a second direction, the gate layer forming a plurality of gate lines including a first gate line and a second gate line extending in a straight line with respect to each other and having a space therebetween, each of the first gate line and second gate line crossing at least one of the active regions, providing an insulation layer covering the first device isolation layer and covering the active region around each of the first and second gate lines; and providing an inter-gate insulation region in the space between the first gate line and the second gate line.

First claim

What is claimed is:

1. An integrated circuit device comprising:
a plurality of active regions formed on a substrate and extending in a first direction;
a first gate line and a second gate line formed on the substrate, extending in a straight line in a second direction and crossing the plurality of active regions, wherein the first gate line and the second gate line are spaced apart from each other;
a first gate insulation layer extending in the second direction and covering a first surface of the first gate line facing a portion of the plurality of active regions and a first long-axis sidewall of the first gate line, while not covering a first short-axis sidewall of the first gate line facing the second gate line;
a second gate insulation layer extending in the second direction and covering a second surface of the second gate line facing another portion of the plurality of active regions and a second long-axis sidewall of the second gate line, while not covering a second short-axis sidewall of the second gate line facing the first gate line; and
an inter-gate insulation region interposed between the first gate line and the second gate line and abutting the first short-axis sidewall and the second short-axis sidewall.

2. The integrated circuit device of claim 1 , wherein the first gate line and the second gate line each include a metal.

3. The integrated circuit device of claim 1 , wherein the plurality of active regions are formed of a plurality of fin-type active regions protruding from the substrate,
wherein the first gate line extends to cover a first group active region including at least one fin-type active region selected from the plurality of fin-type active regions, and
the second gate line extends to cover a second group active region including at least one fin-type active region selected from the plurality of fin-type active regions and spaced apart from the first group active region.

4. The integrated circuit device of claim 1 , wherein the first gate line and the second gate line each have a planar upper surface extending in the second direction, and the planar surfaces are positioned at a first level on the substrate.

5. The integrated circuit device of claim 1 , wherein the first gate insulation layer and the second gate insulation layer are spaced apart from each other, and the inter-gate insulation region is between the first gate insulation layer and the second gate insulation layer.

6. The integrated circuit device of claim 1 , wherein the first gate insulation layer and the second gate insulation layer are integrally connected to each other.

7. The integrated circuit device of claim 1 , further comprising a third gate insulation layer interposed between the substrate and the inter-gate insulation region,
wherein the first gate insulation layer and the second gate insulation layer are integrally connected to each other via the third gate insulation layer.

8. The integrated circuit device of claim 1 , further comprising:
a first insulation spacer covering the first long-axis sidewall of the first gate line, wherein the first gate insulation layer is between the first insulation spacer and the first long-axis sidewall; and
a second insulation spacer covering the second long-axis sidewall of the second gate line, wherein the second gate insulation layer is between the second insulation spacer and the second long-axis sidewall,
wherein the first insulation spacer and the second insulation spacer are integrally connected to each other.

9. The integrated circuit device of claim 8 , further comprising a third insulation spacer covering a portion of the inter-gate insulation region,
wherein the first insulation spacer and the second insulation spacer are integrally connected to each other via the third insulation spacer.

10. The integrated circuit device of claim 1 , further comprising:
a first insulation spacer covering the first long-axis sidewall of the first gate line, wherein the first gate insulation layer is between the first insulation spacer and the first long-axis sidewall; and
a second insulation spacer covering the second long-axis sidewall of the second gate line, wherein the second gate insulation layer is between the second insulation spacer and the second long-axis sidewall,
wherein the first insulation spacer and the second insulation spacer are spaced apart from each other, and the inter-gate insulation region is between the first insulation spacer and the second insulation spacer.

11. The integrated circuit device of claim 1 , wherein the plurality of active regions, the first gate line, the second gate line, the first gate insulating layer, the second gate insulating layer, and the inter-gate insulation region form part of a static random access memory (SRAM) array comprising a plurality of SRAM cells formed on the substrate.

12. The integrated circuit device of claim 11 , wherein the SRAM array further comprises:
a plurality of inverters each comprising a pull up transistor and a pull down transistor;
a plurality of pass transistors respectively connected to output nodes of the plurality of inverters,
wherein the first gate line is shared by a pull up transistor and a pull down transistor of a first inverter selected from the plurality of inverters, and
the second gate line is shared by two pass transistors selected from the plurality of pass transistors.

13. The integrated circuit device of claim 11 , wherein the SRAM array further comprises:
a plurality of inverters each comprising a pull up transistor and a pull down transistor;
a plurality of pass transistors respectively connected to output nodes of the plurality of inverters,
wherein the first gate line is shared by a pull up transistor and a pull down transistor of a first inverter selected from the plurality of inverters, and
the second gate line is shared by a pull up transistor and a pull down transistor of a second inverter selected from the plurality of inverters.

14. The integrated circuit device of claim 11 , wherein the SRAM array further comprises a plurality of NMOS transistors and a plurality of PMOS transistors,
wherein the first gate line and the second gate line are each shared by a plurality of transistors including channels of the same conductivity type as one another, selected from the plurality of NMOS transistors and the plurality of PMOS transistors.

15. The integrated circuit device of claim 11 , wherein the SRAM array further comprises a plurality of NMOS transistors and a plurality of PMOS transistors,
wherein the first gate line and the second gate line are each shared by a plurality of transistors including channels of different conductivity types, selected from the plurality of NMOS transistors and the plurality of PMOS transistors.

16. The integrated circuit device of claim 11 , wherein the SRAM array further comprises a plurality of NMOS transistors and a plurality of PMOS transistors,
wherein one of the first gate line and the second gate line is shared by a plurality of transistors including channels of the same conductivity type as one another, selected from the plurality of NMOS transistors and the plurality of PMOS transistors, and
the other of the first gate line and the second gate line is shared by a plurality of transistors including channels of different conductivity types, selected from the plurality of NMOS transistors and the plurality of PMOS transistors.

17. The integrated circuit device of claim 11 , wherein the plurality of active regions are formed of a plurality of fin-type active regions protruding from the

Assignees

• Park Hong-Bae
• Ku Ja-Hum
• Kim Myeong-Cheol
• Lee Jin-Wook
• Han Sung-Kee
• Samsung Electronics Co Ltd

Inventors

• Park Hong-Bae
• Ku Ja-Hum
• Kim Myeong-Cheol
• Lee Jin-Wook
• Han Sung-Kee

Classifications

• H10P14/69433

  the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz · CPC title

• H10P14/69215

  the material being a silicon oxide, e.g. SiO2 · CPC title

• H10W20/43

  Layouts of interconnections · CPC title

• H10D30/611

  having multiple independently-addressable gate electrodes influencing the same channel (FinFETs having multiple distinct gate electrodes H10D30/6215; multi-gate TFT H10D30/6733) · CPC title

• H10D30/62 Primary

  Fin field-effect transistors [FinFET] · CPC title