Perpendicularly magnetized ultrathin film exhibiting high perpendicular magnetic anisotropy, method for manufacturing same, and application

Patent metadata

Field	Value
Publication number	US-9508373-B2
Application number	US-201314367348-A
Country	US
Kind code	B2
Filing date	Mar 22, 2013
Priority date	Mar 22, 2012
Publication date	Nov 29, 2016
Grant date	Nov 29, 2016

Abstract

Provided are an element structure in which a magnetic layer has a high magnetic anisotropy constant and saturated magnetization properties in a thickness of 1.5 nm or less, and a magnetic device that uses the element structure. A BCC metal nitride/CoFeB/MgO film structure that uses a nitride of a BCC metal as a seed layer is fabricated. The nitride amount in the BCC metal nitride is preferably less than 60% in terms of volume ratio based on 100% BCC metal. It is thereby possible to readily obtain a perpendicularly magnetized film having the magnetic properties that the perpendicular magnetic anisotropy is 0.1×10 6 erg/cm 3 or more and the saturated magnetization is 200 emu/cm 3 or more, even when the thickness of the magnetic layer is 0.3 nm or more and 1.5 nm or less.

First claim

The invention claimed is:

1. A perpendicularly magnetized ultrathin film exhibiting a perpendicular magnetic anisotropy comprising
a seed layer,
a magnetic layer, and
an oxide layer on a substrate, characterized in that
the seed layer is TaN,
the magnetic layer contains CoFeB alloy,
the oxide layer contains MgO,
the film thickness of the magnetic layer is 0.3 nm or more and 1.5 nm or less,
the perpendicularly magnetized ultrathin film has the magnetic properties that the perpendicular magnetic anisotropy is 0.1×10 6 erg/cm 3 or more and the saturated magnetization is 200 emu/cm 3 or more, and
the seed layer and the oxide layer are in direct contact with the magnetic layer.

2. The perpendicularly magnetized ultrathin film according to claim 1 , characterized in that the component composition (Co x Fe 1-x ) y B 1-y of the CoFeB alloy of the magnetic layer has the relationships of 0 <x≦0.8 and y≧0.7.

3. A method for manufacturing the perpendicularly magnetized ultrathin film according to claim 1 , characterized in that Q, the gas flow volume ratio of Ar and N 2 (defined as Q=N 2 flow/total flow of gas (Ar +N 2 ), in the film formation of the seed layer by sputtering method has the relationship of 0<Q<0.05.

4. The method for manufacturing the perpendicularly magnetized ultrathin film according to claim 3 , characterized in that heat treatment is performed in the temperature range of 150° C. or more and 350° C. or less after the film formation.

5. An in-plane current applying type magnetic recording memory or magnetic device, characterized by comprising the perpendicularly magnetized ultrathin film according to claim 1 .

6. An in-plane current applying type magnetic recording memory or magnetic device, characterized by comprising the perpendicularly magnetized ultrathin film according to claim 1 .

Assignees

• Nat Inst For Materials Science

Inventors

• Hayashi Masamitsu
• JAIVARDHAN Sinha
• Kodzuka Masaya
• Nakatani Tomoya
• Takahashi Yukiko
• Furubayashi Takao
• Mitani Seiji
• Hono Kazuhiro

Classifications

• C23C14/34

  Sputtering · CPC title

• H01L43/10

  Electricity · mapped topic

• H01F10/007

  ultrathin or granular films (H01F10/005 and H01F10/3227 take precedence; applying ultrathin or granular layers to substrates H01F41/301) · CPC title

• G01R33/00

  Arrangements or instruments for measuring magnetic variables · CPC title

• G11B5/64

  comprising only the magnetic material without bonding agent · CPC title