Specimen holder, specimen preparation device, and positioning method

Patent metadata

Field	Value
Publication number	US-9507139-B2
Application number	US-201514944517-A
Country	US
Kind code	B2
Filing date	Nov 18, 2015
Priority date	Nov 19, 2014
Publication date	Nov 29, 2016
Grant date	Nov 29, 2016

Abstract

A specimen holder is used for an optical microscope, comprising: a specimen support that supports a specimen to enable the specimen to tilt relative to the optical axis of the optical microscope; an adjustment plate that has an observation surface for making observations using the optical microscope; and an adjustment plate support that supports the adjustment plate, so that the angle formed by the optical axis and the observation surface is larger than the angle formed by the optical axis and a specimen surface of the specimen.

First claim

What is claimed is:

1. A specimen holder that is used for an optical microscope, comprising:
a specimen support that supports a specimen to enable the specimen to tilt relative to an optical axis of the optical microscope;
an adjustment plate that has an observation surface for making observations using the optical microscope; and
an adjustment plate support that supports the adjustment plate so that an angle formed by the optical axis and the observation surface is larger than an angle formed by the optical axis and a specimen surface of the specimen.

2. The specimen holder as defined in claim 1 ,
wherein a marker that serves as a mark used when positioning the specimen is formed on the observation surface.

3. The specimen holder as defined in claim 2 ,
wherein the adjustment plate is movable so that a distance from the specimen surface can be changed.

4. The specimen holder as defined in claim 2 ,
wherein the marker includes a part that extends from an edge of the adjustment plate in a diagonal direction.

5. The specimen holder as defined in claim 1 ,
wherein the adjustment plate support supports the adjustment plate, so that the adjustment plate tilts when the specimen is tilted by the specimen support.

6. The specimen holder as defined in claim 1 ,
wherein an angle formed by the specimen surface and the observation surface is 90°.

7. A specimen preparation device comprising:
the specimen holder as defined in claim 1 .

8. The specimen preparation device as defined in claim 7 , further comprising:
an ion source that generates an ion beam,
the specimen preparation device applying the ion beam to the specimen to process the specimen.

9. A positioning method that positions a specimen using an optical microscope, the positioning method comprising:
placing an adjustment plate relative to a specimen that is supported to enable a specimen surface to tilt relative to an optical axis of the optical microscope, so that an angle formed by the optical axis and an observation surface of the adjustment plate is larger than an angle formed by the optical axis and the specimen surface; and
positioning the specimen while focusing the optical microscope on the adjustment plate.

10. The positioning method as defined in claim 9 ,
wherein a marker that serves as a mark used when positioning the specimen is formed on the observation surface.

Assignees

• Jeol Ltd

Inventors

• Negishi Tsutomu
• Kasai Tooru

Classifications

• G02B21/26 Primary

  Stages; Adjusting means therefor · CPC title

• G01N1/32

  Polishing; Etching · CPC title

• H01J2237/20207

  Tilt · CPC title

• H01J37/20

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title

• H01J2237/3151

  Etching · CPC title