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Method and system for analyzing particles in cold plasma
US9506868B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9506868-B2 |
| Application number | US-201314431727-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 27, 2013 |
| Priority date | Sep 27, 2012 |
| Publication date | Nov 29, 2016 |
| Grant date | Nov 29, 2016 |
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Abstract
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The invention relates to a method of analyzing particles, in particular particles of diameter less than 1 μm, the method comprising the following steps: firing laser shots into a cold plasma ( 45 ) at low pressure; using an optical spectrometer device ( 60 ) to acquire emission spectra of the light emitted by the plasma as a result of the laser shots, in such a manner that for each acquired spectrum, an acquisition period begins no later than 100 ns after firing the laser shot; and analyzing the particles present in the plasma on the basis of the emission spectra. A system for detecting and/or analyzing particles by performing the method.
First claim
Opening claim text (preview).
The invention claimed is: 1. An analysis method for analyzing particles, in particular particles of diameter less than 1 μm, the method comprising the following steps: a) providing a cold plasma at a pressure less than 10 mbar; b) firing laser shots into the cold plasma; c) using an optical spectrometer device to acquire emission spectra of the light emitted by the plasma as a result of the laser shots, in such a manner that for each acquired spectrum, an acquisition period be…
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- G01N21/718Primary
Physics · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9506868B2 cover?
- The invention relates to a method of analyzing particles, in particular particles of diameter less than 1 μm, the method comprising the following steps: firing laser shots into a cold plasma ( 45 ) at low pressure; using an optical spectrometer device ( 60 ) to acquire emission spectra of the light emitted by the plasma as a result of the laser shots, in such a manner that for each a…
- Who is the assignee on this patent?
- Centre Nat Rech Scient, Univ D'Orleans, Cilas, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification G01N21/718. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Nov 29 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).